MKSI


Line plots across dimensions of each concept
Line plots across concepts
Tables

Table of contents



us-gaap:CommonStockValue

us-gaap:WeightedAverageNumberOfDilutedSharesOutstanding

us-gaap:WeightedAverageNumberOfSharesOutstandingBasic
us-gaap:AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecurities
us-gaap:AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount

us-gaap:EarningsPerShareBasic

us-gaap:EarningsPerShareDiluted

us-gaap:AllocatedShareBasedCompensationExpense
us-gaap:IncomeStatementLocation

us-gaap:ComprehensiveIncomeNetOfTax

us-gaap:CostOfGoodsAndServicesSold
us-gaap:ProductOrService

us-gaap:GrossProfit
us-gaap:StatementBusinessSegments

us-gaap:IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest

us-gaap:IncomeTaxExpenseBenefit

us-gaap:InterestExpense

us-gaap:InterestExpenseLongTermDebt

us-gaap:NetIncomeLoss
us-gaap:StatementEquityComponents

us-gaap:NonoperatingIncomeExpense

us-gaap:OperatingIncomeLoss

us-gaap:OtherNonoperatingIncomeExpense

us-gaap:ProfitLoss

us-gaap:ResearchAndDevelopmentExpense

us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax
us-gaap:ProductOrService
us-gaap:ProductOrService, us-gaap:StatementBusinessSegments
us-gaap:StatementBusinessSegments
us-gaap:StatementGeographical

us-gaap:SellingGeneralAndAdministrativeExpense

us-gaap:Assets
us-gaap:ConsolidationItems

us-gaap:Liabilities

us-gaap:LiabilitiesAndStockholdersEquity

us-gaap:StockholdersEquity
us-gaap:StatementEquityComponents

us-gaap:AssetsCurrent

us-gaap:Cash

us-gaap:CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents
us-gaap:ConsolidationItems

us-gaap:ShortTermInvestments
us-gaap:ConsolidationItems
us-gaap:FairValueByFairValueHierarchyLevel, us-gaap:FairValueByMeasurementFrequency
us-gaap:FairValueByMeasurementFrequency

us-gaap:AccountsReceivableNetCurrent
us-gaap:ConsolidationItems
us-gaap:ConsolidationItems, us-gaap:StatementBusinessSegments

us-gaap:InventoryNet
us-gaap:ConsolidationItems
us-gaap:ConsolidationItems, us-gaap:StatementBusinessSegments

us-gaap:OtherAssetsCurrent
us-gaap:ConsolidationItems

us-gaap:NoncurrentAssets
us-gaap:StatementGeographical

us-gaap:PropertyPlantAndEquipmentGross
us-gaap:PropertyPlantAndEquipmentByType

us-gaap:AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment

us-gaap:AmortizationOfIntangibleAssets

us-gaap:PropertyPlantAndEquipmentNet
us-gaap:ConsolidationItems

us-gaap:LongTermInvestments
us-gaap:InformationByCategoryOfDebtSecurity, us-gaap:InvestmentType

us-gaap:Goodwill
us-gaap:StatementBusinessSegments

us-gaap:FiniteLivedIntangibleAssetsNet
us-gaap:FiniteLivedIntangibleAssetsByMajorClass
us-gaap:ConsolidationItems
us-gaap:IntangibleAssetsNetIncludingGoodwill

us-gaap:OperatingLeaseRightOfUseAsset
us-gaap:AdjustmentsForNewAccountingPronouncements
us-gaap:ConsolidationItems

us-gaap:OtherAssetsNoncurrent
us-gaap:ConsolidationItems

us-gaap:AccountsPayableCurrent

us-gaap:AccruedIncomeTaxesCurrent

us-gaap:ContractWithCustomerLiabilityCurrent
us-gaap:BalanceSheetLocation

us-gaap:LiabilitiesCurrent

us-gaap:OperatingLeaseLiabilityCurrent
us-gaap:AdjustmentsForNewAccountingPronouncements

us-gaap:OtherLiabilitiesCurrent

us-gaap:LongTermDebt
us-gaap:DebtInstrument
us-gaap:DebtInstrument
us-gaap:DeferredFinanceCostsNoncurrentNet

us-gaap:DeferredIncomeTaxLiabilitiesNet

us-gaap:OtherLiabilitiesNoncurrent

us-gaap:OperatingLeaseLiabilityNoncurrent
us-gaap:AdjustmentsForNewAccountingPronouncements

us-gaap:LesseeOperatingLeaseLiabilityPaymentsDueYearTwo

us-gaap:LesseeOperatingLeaseLiabilityPaymentsDueYearThree

us-gaap:LesseeOperatingLeaseLiabilityPaymentsDueYearFour

us-gaap:LesseeOperatingLeaseLiabilityPaymentsDueYearFive

us-gaap:LesseeOperatingLeaseLiabilityPaymentsDueAfterYearFive

us-gaap:OperatingLeaseLiability

us-gaap:LesseeOperatingLeaseLiabilityPaymentsDue

us-gaap:LesseeOperatingLeaseLiabilityUndiscountedExcessAmount

us-gaap:StockholdersEquity
us-gaap:StatementEquityComponents

us-gaap:CommonStockValue

us-gaap:AdditionalPaidInCapitalCommonStock

us-gaap:RetainedEarningsAccumulatedDeficit

us-gaap:AccumulatedOtherComprehensiveIncomeLossNetOfTax

us-gaap:AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue
us-gaap:StatementEquityComponents

us-gaap:NetCashProvidedByUsedInOperatingActivities

us-gaap:NetCashProvidedByUsedInInvestingActivities

us-gaap:NetCashProvidedByUsedInFinancingActivities

us-gaap:CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect

us-gaap:DeferredIncomeTaxExpenseBenefit

us-gaap:IncreaseDecreaseInAccountsReceivable

us-gaap:IncreaseDecreaseInInventories

us-gaap:NetCashProvidedByUsedInOperatingActivities

us-gaap:NetIncomeLoss
us-gaap:StatementEquityComponents

us-gaap:ProfitLoss

us-gaap:ShareBasedCompensation

us-gaap:NetCashProvidedByUsedInInvestingActivities

us-gaap:PaymentsToAcquirePropertyPlantAndEquipment
us-gaap:StatementBusinessSegments

us-gaap:NetCashProvidedByUsedInFinancingActivities

us-gaap:RepaymentsOfLongTermDebt

us-gaap:PaymentsOfDividendsCommonStock

us-gaap:DeferredTaxLiabilities

us-gaap:UnrecognizedTaxBenefits

us-gaap:DeferredTaxAssetsValuationAllowance

mksi:BusinessCombinationIntegrationReversalOfAcquisitionAndIntegrationCosts

mksi:ContractWithCustomerAmountOfDeferredRevenueAndCustomerAdvancesRecognized

mksi:ContractWithCustomerLiabilityAdditions
us-gaap:BusinessAcquisition, us-gaap:CreditFacility, us-gaap:DebtInstrument
mksi:DebtInstrumentIssueDiscountPercentageOnPrincipal

mksi:GoodwillTranslationAdjustmentsGross
us-gaap:BusinessAcquisition
mksi:InsuranceReimbursementReceived
us-gaap:Range, us-gaap:BusinessAcquisition, us-gaap:CreditFacility, us-gaap:DebtInstrument
mksi:LineOfCreditFacilityExcessAvailabilityAmount

mksi:OtherComprehensiveIncomeGainLossDefinedBenefitPlanNetActuarialGainLossOnPensionAndPostretirementBenefitsAfterTaxAndReclassificationAdjustmentAttributableToParent

mksi:OtherCosts

mksi:PaymentsAndAdjustmentForRestructuring

mksi:PaymentsForProceedsFromTenantAllowanceYearTwo
us-gaap:BusinessAcquisition, us-gaap:CreditFacility, us-gaap:DebtInstrument
mksi:PercentageOfBorrowingBasedOnEligibleAccountsReceivable
us-gaap:BusinessAcquisition, us-gaap:CreditFacility, us-gaap:DebtInstrument
mksi:PercentageOfBorrowingBasedOnLowerOfCostOrMarketValueOfCertainEligibleInventory
us-gaap:BusinessAcquisition, us-gaap:CreditFacility, us-gaap:DebtInstrument
mksi:PercentageOfBorrowingBasedOnLowerOfNetBookValueOfEligibleInventory
us-gaap:BusinessAcquisition, us-gaap:CreditFacility, us-gaap:DebtInstrument
mksi:PercentageOfBorrowingBasedOnNetOrderlyLiquidationValueOfCertainEligibleInventory
us-gaap:Range, us-gaap:BusinessAcquisition, us-gaap:CreditFacility, us-gaap:DebtInstrument
mksi:PercentageOfLineOfCreditFacilityExcessAvailabilityCommitmentFee

mksi:ProceedsFromPaymentsForEmployeeStockAwards

mksi:RestructuringAndOtherCharges
us-gaap:AwardType, us-gaap:PlanName
mksi:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsAccruedDividendEquivalentsWeightedAverageGrantDateFairValue

mksi:TenantImprovementsAllowanceReceipts

mksi:WeightedAverageNumberOfDilutedShares

us-gaap:AmortizationOfFinancingCostsAndDiscounts

us-gaap:AssetImpairmentCharges

us-gaap:BusinessCombinationAcquisitionRelatedCosts

us-gaap:CommonStockDividendsPerShareCashPaid
us-gaap:MajorCustomers, us-gaap:ConcentrationRiskByBenchmark, us-gaap:ConcentrationRiskByType
us-gaap:ConcentrationRiskPercentage1

us-gaap:ContractWithCustomerLiabilityRevenueRecognized
us-gaap:BusinessAcquisition, us-gaap:CreditFacility, us-gaap:DebtInstrument
us-gaap:DebtInstrumentBasisSpreadOnVariableRate1
us-gaap:BusinessAcquisition, us-gaap:CreditFacility, us-gaap:DebtInstrument, us-gaap:VariableRate
us-gaap:BusinessAcquisition, us-gaap:CreditFacility, us-gaap:VariableRate
us-gaap:BusinessAcquisition, us-gaap:DebtInstrument, us-gaap:VariableRate
us-gaap:CreditFacility, us-gaap:DebtInstrument, us-gaap:VariableRate
us-gaap:Range, us-gaap:CreditFacility, us-gaap:DebtInstrument, us-gaap:VariableRate
us-gaap:BusinessAcquisition, us-gaap:CreditFacility, us-gaap:DebtInstrument
us-gaap:DebtInstrumentPeriodicPaymentPrincipal

us-gaap:DepreciationAndAmortization
us-gaap:StatementBusinessSegments
us-gaap:DerivativeInstrumentRisk, us-gaap:DerivativeInstrumentsGainLossByHedgingRelationship
us-gaap:DerivativeInstrumentsGainLossReclassifiedFromAccumulatedOCIIntoIncomeEffectivePortionNet

us-gaap:DividendsCommonStockCash
us-gaap:StatementEquityComponents

us-gaap:EffectOfExchangeRateOnCashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsIncludingDisposalGroupAndDiscontinuedOperations

us-gaap:FiniteLivedIntangibleAssetsForeignCurrencyTranslationGainLoss
us-gaap:FiniteLivedIntangibleAssetsByMajorClass
us-gaap:DerivativeInstrumentRisk
us-gaap:GainLossOnForeignCurrencyDerivativeInstrumentsNotDesignatedAsHedgingInstruments

us-gaap:GoodwillForeignCurrencyTranslationGainLoss

us-gaap:ImpairmentOfIntangibleAssetsIndefinitelivedExcludingGoodwill
us-gaap:FiniteLivedIntangibleAssetsByMajorClass

us-gaap:IncreaseDecreaseInAccountsPayableTrade

us-gaap:IncreaseDecreaseInAccruedSalaries

us-gaap:IncreaseDecreaseInIncomeTaxesPayableNetOfIncomeTaxesReceivable

us-gaap:IncreaseDecreaseInOtherOperatingAssets

us-gaap:IncreaseDecreaseInOtherOperatingLiabilities

us-gaap:IncrementalCommonSharesAttributableToShareBasedPaymentArrangements

us-gaap:InterestAndOtherIncome

us-gaap:InventoryWriteDown

us-gaap:LeaseCost

us-gaap:LineOfCreditFacilityCommitmentFeePercentage
us-gaap:DebtInstrument
us-gaap:BusinessAcquisition, us-gaap:CreditFacility, us-gaap:DebtInstrument
us-gaap:LineOfCreditFacilityUnusedCapacityCommitmentFeePercentage

us-gaap:OperatingLeaseCost

us-gaap:OperatingLeasePayments

us-gaap:OtherComprehensiveIncomeAvailableforsaleSecuritiesAdjustmentNetOfTaxPortionAttributableToParent

us-gaap:OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent

us-gaap:OtherComprehensiveIncomeDerivativesQualifyingAsHedgesNetOfTaxPortionAttributableToParent

us-gaap:OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent

us-gaap:OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParent
us-gaap:StatementEquityComponents
us-gaap:DerivativeInstrumentRisk, us-gaap:DerivativeInstrumentsGainLossByHedgingRelationship
us-gaap:OtherComprehensiveIncomeUnrealizedGainLossOnDerivativesArisingDuringPeriodBeforeTax

us-gaap:OtherNoncashIncomeExpense

us-gaap:OtherRestructuringCosts

us-gaap:PaymentsForProceedsFromTenantAllowance

us-gaap:PaymentsToAcquireAvailableForSaleSecuritiesDebt
us-gaap:BusinessAcquisition, us-gaap:SubsequentEventType
us-gaap:PaymentsToAcquireBusinessesGross

us-gaap:ProceedsFromBankDebt

us-gaap:ProceedsFromMaturitiesPrepaymentsAndCallsOfAvailableForSaleSecurities

us-gaap:ProceedsFromSaleOfAvailableForSaleSecuritiesDebt

us-gaap:ProductWarrantyAccrualPeriodIncreaseDecrease

us-gaap:ProductWarrantyAccrualWarrantiesIssued

us-gaap:ProvisionForDoubtfulAccounts

us-gaap:RepaymentsOfShortTermDebt

us-gaap:RestructuringCharges
us-gaap:AwardType
us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeituresWeightedAverageGrantDateFairValue
us-gaap:AwardType, us-gaap:PlanName
us-gaap:AwardType, us-gaap:PlanName
us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue
us-gaap:AwardType
us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodWeightedAverageGrantDateFairValue
us-gaap:AwardType, us-gaap:PlanName

us-gaap:ShortTermLeaseCost

us-gaap:StockIssuedDuringPeriodValueShareBasedCompensation
us-gaap:StatementEquityComponents

us-gaap:UnrecognizedTaxBenefitsIncreasesResultingFromPriorPeriodTaxPositions

us-gaap:UnusualOrInfrequentItemNetGainLoss

mksi:AdditionalRightOfUseAssets

mksi:BenefitsOfTheTaxHoliDayPerShare
us-gaap:BusinessAcquisition, us-gaap:SubsequentEventType
mksi:BusinessCombinationPricePerShareOfCommonStockInCash
us-gaap:BusinessAcquisition, us-gaap:SubsequentEventType
mksi:BusinessCombinationShareReceivedPerCommonStock
us-gaap:FairValueByAssetClass, us-gaap:FairValueByFairValueHierarchyLevel, us-gaap:FairValueByMeasurementFrequency
mksi:CashEquivalentsFairValueDisclosure
us-gaap:FairValueByAssetClass, us-gaap:FairValueByMeasurementFrequency
us-gaap:FairValueByFairValueHierarchyLevel, us-gaap:FairValueByMeasurementFrequency
us-gaap:FairValueByFairValueHierarchyLevel, us-gaap:FairValueByMeasurementFrequency, us-gaap:InvestmentType
us-gaap:FairValueByMeasurementFrequency
us-gaap:FairValueByMeasurementFrequency, us-gaap:InvestmentType
us-gaap:FairValueByFairValueHierarchyLevel, us-gaap:FairValueByMeasurementFrequency
mksi:CurrentAssetsFairValueDisclosure
us-gaap:FairValueByMeasurementFrequency

mksi:DebtInstrumentOutstandingBalanceRepaid
us-gaap:BusinessAcquisition, us-gaap:CreditFacility, us-gaap:DebtInstrument
mksi:DebtInstrumentPeriodicPaymentPercentage
us-gaap:FairValueByAssetClass, us-gaap:FairValueByFairValueHierarchyLevel, us-gaap:FairValueByMeasurementFrequency
mksi:DeferredCompensationPlanAssetsFairValueDisclosure
us-gaap:FairValueByAssetClass, us-gaap:FairValueByMeasurementFrequency

mksi:DeferredTaxAssetsAccruedExpensesAndOtherReserves

mksi:DeferredTaxAssetsInventoryAndWarrantyReserves

mksi:DeferredTaxAssetsLeaseLiability

mksi:DeferredTaxLiabilitiesDepreciationAndAmortization

mksi:DeferredTaxLiabilitiesLoanCosts

mksi:DeferredTaxLiabilityRightOfUseAsset

mksi:Deferredtaxassetsutilizationloss
us-gaap:Range, us-gaap:RetirementPlanType
mksi:DefinedBenefitPlanAssetsForPlanBenefitsGuaranteedRateOfReturn

mksi:DefinedBenefitPlanAssetsForPlanBenefitsPercentage
us-gaap:DefinedBenefitPlanByPlanAssetCategories

mksi:DefinedBenefitPlanExpectedFutureBenefitPaymentsForNextTenYears

mksi:DefinedBenefitPlanExpectedFutureBenefitPaymentsYearSixToTen
us-gaap:RetirementPlanType
mksi:DefinedBenefitPlanVestedBenefitObligation
us-gaap:BusinessAcquisition
mksi:IncreaseOfAcquiredPropertyPlantAndEquipmentExcludingTheFairValueWriteUp

mksi:LesseeOperatingLeaseLiabilityPaymentsDueAfterYearFour
us-gaap:CreditFacility, us-gaap:DebtInstrument, us-gaap:VariableRate
mksi:LiborFloorRate

mksi:LongTermDebtMaturitiesRepaymentsOfPrincipalAfterYearFour
us-gaap:BusinessAcquisition, us-gaap:CreditFacility, us-gaap:DebtInstrument
mksi:MinimumTermLoanWithEarlierMaturityThanAssetBasedLineFacility
us-gaap:FairValueByFairValueHierarchyLevel, us-gaap:FairValueByMeasurementFrequency
mksi:NonCurrentAssetsFairValueDisclosure
us-gaap:FairValueByMeasurementFrequency
us-gaap:DerivativeInstrumentRisk, us-gaap:FairValueByFairValueHierarchyLevel, us-gaap:FairValueByMeasurementFrequency
mksi:NonCurrentInterestRateFairValueHedgeAssetAtFairValue
us-gaap:DerivativeInstrumentRisk, us-gaap:FairValueByMeasurementFrequency
us-gaap:DerivativeInstrumentRisk, us-gaap:FairValueByFairValueHierarchyLevel, us-gaap:FairValueByMeasurementFrequency
mksi:NonCurrentInterestRateFairValueHedgeLiabilitiesAtFairValue
us-gaap:DerivativeInstrumentRisk, us-gaap:FairValueByMeasurementFrequency
us-gaap:FairValueByFairValueHierarchyLevel, us-gaap:FairValueByMeasurementFrequency
mksi:OtherCurrentAssetsFairValueDisclosure
us-gaap:FairValueByMeasurementFrequency
us-gaap:FairValueByFairValueHierarchyLevel, us-gaap:FairValueByMeasurementFrequency
mksi:OtherNonCurrentAssetsFairValueDisclosure
us-gaap:FairValueByMeasurementFrequency
us-gaap:BusinessAcquisition, us-gaap:CreditFacility, us-gaap:DebtInstrument
mksi:PercentageOfBorrowingBase

mksi:SegmentAssets
us-gaap:ConsolidationItems
us-gaap:ConsolidationItems, us-gaap:StatementBusinessSegments
us-gaap:AwardType
mksi:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsOutstandingAndExercisableWeightedAverageBaseValue
us-gaap:AwardType
mksi:SharebasedCompensationArrangementBySharebasedPaymentAwardEquityInstrumentsOtherThanOptionsAggregateIntrinsicValueOutstandingAndExercisable

us-gaap:AllowanceForDoubtfulAccountsReceivableCurrent
us-gaap:FairValueByFairValueHierarchyLevel, us-gaap:FairValueByMeasurementFrequency
us-gaap:AssetsFairValueDisclosure
us-gaap:FairValueByMeasurementFrequency

us-gaap:AvailableForSaleSecurities
mksi:Investment1, us-gaap:InvestmentType
us-gaap:FairValueByAssetClass, us-gaap:FairValueByFairValueHierarchyLevel, us-gaap:FairValueByMeasurementFrequency
us-gaap:FairValueByAssetClass, us-gaap:FairValueByMeasurementFrequency
us-gaap:FairValueByFairValueHierarchyLevel, us-gaap:FairValueByMeasurementFrequency, us-gaap:InvestmentType
us-gaap:FairValueByMeasurementFrequency, us-gaap:InvestmentType
us-gaap:InvestmentType
mksi:Investment1, us-gaap:InvestmentType
us-gaap:AvailableForSaleSecuritiesAccumulatedGrossUnrealizedGainBeforeTax

us-gaap:AvailableForSaleSecuritiesAccumulatedGrossUnrealizedLossBeforeTax
us-gaap:InvestmentType

us-gaap:AvailableForSaleSecuritiesAmortizedCost
mksi:Investment1, us-gaap:InvestmentType
us-gaap:InvestmentType
us-gaap:FairValueByFairValueHierarchyLevel, us-gaap:FairValueByMeasurementFrequency
us-gaap:AvailableForSaleSecuritiesNoncurrent
us-gaap:FairValueByMeasurementFrequency
us-gaap:FairValueByAssetClass, us-gaap:FairValueByFairValueHierarchyLevel, us-gaap:FairValueByMeasurementFrequency
us-gaap:CashAndCashEquivalentsFairValueDisclosure
us-gaap:FairValueByAssetClass, us-gaap:FairValueByMeasurementFrequency
us-gaap:FairValueByFairValueHierarchyLevel, us-gaap:FairValueByMeasurementFrequency
us-gaap:FairValueByFairValueHierarchyLevel, us-gaap:FairValueByMeasurementFrequency, us-gaap:InvestmentType
us-gaap:FairValueByMeasurementFrequency
us-gaap:FairValueByMeasurementFrequency, us-gaap:InvestmentType

us-gaap:CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsIncludingDisposalGroupAndDiscontinuedOperations
us-gaap:AdjustmentsForNewAccountingPronouncements
us-gaap:ContractWithCustomerAssetNet

us-gaap:ContractWithCustomerLiability

us-gaap:ContractWithCustomerLiabilityNoncurrent
us-gaap:BusinessAcquisition, us-gaap:CreditFacility, us-gaap:DebtInstrument
us-gaap:DebtInstrumentFaceAmount
us-gaap:BusinessAcquisition, us-gaap:CreditFacility, us-gaap:SubsequentEventType
us-gaap:BusinessAcquisition, us-gaap:CreditFacility, us-gaap:DebtInstrument
us-gaap:DeferredFinanceCostsGross
us-gaap:BusinessAcquisition, us-gaap:DebtInstrument

us-gaap:DeferredIncomeTaxLiabilities

us-gaap:DeferredTaxAssetsGross

us-gaap:DeferredTaxAssetsOperatingLossCarryforwards

us-gaap:DeferredTaxAssetsOther

us-gaap:DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsEmployeeBenefits

us-gaap:DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsShareBasedCompensationCost

us-gaap:DeferredTaxLiabilitiesGoodwillAndIntangibleAssetsIntangibleAssets

us-gaap:DeferredTaxLiabilitiesUndistributedForeignEarnings
us-gaap:FairValueByFairValueHierarchyLevel, us-gaap:FairValueByMeasurementFrequency, us-gaap:InvestmentType
us-gaap:DefinedBenefitPlanAssetsForPlanBenefitsNoncurrent
us-gaap:FairValueByMeasurementFrequency, us-gaap:InvestmentType
us-gaap:RetirementPlanType
us-gaap:BusinessAcquisition
us-gaap:DefinedBenefitPlanBenefitObligation

us-gaap:DefinedBenefitPlanExpectedFutureBenefitPaymentsNextTwelveMonths

us-gaap:DefinedBenefitPlanExpectedFutureBenefitPaymentsYearFive

us-gaap:DefinedBenefitPlanExpectedFutureBenefitPaymentsYearFour

us-gaap:DefinedBenefitPlanExpectedFutureBenefitPaymentsYearThree

us-gaap:DefinedBenefitPlanExpectedFutureBenefitPaymentsYearTwo

us-gaap:DefinedBenefitPlanFairValueOfPlanAssets
us-gaap:BusinessAcquisition
us-gaap:DefinedBenefitPlanByPlanAssetCategories
us-gaap:BusinessAcquisition
us-gaap:DefinedBenefitPlanFundedStatusOfPlan
us-gaap:DerivativeInstrumentRisk
us-gaap:DerivativeAssetNotionalAmount
us-gaap:DerivativeInstrumentRisk, us-gaap:DerivativeInstrumentsGainLossByHedgingRelationship
us-gaap:BusinessAcquisition, us-gaap:CreditFacility, us-gaap:DebtInstrument, us-gaap:DerivativeInstrumentRisk
us-gaap:DerivativeBasisSpreadOnVariableRate
us-gaap:BusinessAcquisition, us-gaap:CreditFacility, us-gaap:DebtInstrument, us-gaap:DerivativeInstrumentRisk
us-gaap:DerivativeFairValueOfDerivativeNet
us-gaap:CreditFacility, us-gaap:DebtInstrument, us-gaap:DerivativeInstrumentRisk
us-gaap:DebtInstrument, us-gaap:DerivativeInstrumentRisk
us-gaap:CreditFacility, us-gaap:DebtInstrument, us-gaap:DerivativeInstrumentRisk
us-gaap:DerivativeFixedInterestRate
us-gaap:BalanceSheetLocation, us-gaap:FairValueByFairValueHierarchyLevel, us-gaap:FairValueByMeasurementFrequency
us-gaap:DerivativeLiabilities
us-gaap:BalanceSheetLocation, us-gaap:FairValueByMeasurementFrequency
us-gaap:FairValueByFairValueHierarchyLevel, us-gaap:FairValueByMeasurementFrequency
us-gaap:FairValueByMeasurementFrequency
us-gaap:CreditFacility, us-gaap:DebtInstrument, us-gaap:DerivativeInstrumentRisk
us-gaap:DerivativeNotionalAmount

us-gaap:EmployeeRelatedLiabilitiesCurrent

us-gaap:EmployeeRelatedLiabilitiesCurrentAndNoncurrent

us-gaap:EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognized
us-gaap:AwardType

us-gaap:FiniteLivedIntangibleAssetsAccumulatedAmortization
us-gaap:FiniteLivedIntangibleAssetsByMajorClass

us-gaap:FiniteLivedIntangibleAssetsAmortizationExpenseAfterYearFive

us-gaap:FiniteLivedIntangibleAssetsAmortizationExpenseNextTwelveMonths

us-gaap:FiniteLivedIntangibleAssetsAmortizationExpenseRemainderOfFiscalYear

us-gaap:FiniteLivedIntangibleAssetsAmortizationExpenseYearFive

us-gaap:FiniteLivedIntangibleAssetsAmortizationExpenseYearFour

us-gaap:FiniteLivedIntangibleAssetsAmortizationExpenseYearThree

us-gaap:FiniteLivedIntangibleAssetsAmortizationExpenseYearTwo

us-gaap:FiniteLivedIntangibleAssetsGross
us-gaap:FiniteLivedIntangibleAssetsByMajorClass
us-gaap:BalanceSheetLocation, us-gaap:DerivativeInstrumentRisk
us-gaap:ForeignCurrencyCashFlowHedgeAssetAtFairValue
us-gaap:DerivativeInstrumentRisk, us-gaap:FairValueByFairValueHierarchyLevel, us-gaap:FairValueByMeasurementFrequency
us-gaap:DerivativeInstrumentRisk, us-gaap:FairValueByMeasurementFrequency
us-gaap:DerivativeInstrumentRisk, us-gaap:HedgingDesignation
us-gaap:DerivativeInstrumentRisk
us-gaap:ForeignCurrencyCashFlowHedgeDerivativeAtFairValueNet
us-gaap:DerivativeInstrumentRisk, us-gaap:DerivativeInstrumentsGainLossByHedgingRelationship
us-gaap:HedgingDesignation
us-gaap:BalanceSheetLocation, us-gaap:DerivativeInstrumentRisk
us-gaap:ForeignCurrencyCashFlowHedgeLiabilityAtFairValue
us-gaap:DerivativeInstrumentRisk, us-gaap:FairValueByFairValueHierarchyLevel, us-gaap:FairValueByMeasurementFrequency
us-gaap:DerivativeInstrumentRisk, us-gaap:FairValueByMeasurementFrequency
us-gaap:DerivativeInstrumentRisk, us-gaap:HedgingDesignation

us-gaap:GoodwillGross

us-gaap:GoodwillImpairedAccumulatedImpairmentLoss
us-gaap:BalanceSheetLocation, us-gaap:DerivativeInstrumentRisk
us-gaap:InterestRateCashFlowHedgeAssetAtFairValue
us-gaap:BalanceSheetLocation, us-gaap:DerivativeInstrumentRisk
us-gaap:InterestRateCashFlowHedgeLiabilityAtFairValue
us-gaap:BusinessAcquisition, us-gaap:CreditFacility, us-gaap:DebtInstrument, us-gaap:DerivativeInstrumentRisk
us-gaap:InterestRateDerivativeLiabilitiesAtFairValue

us-gaap:InventoryFinishedGoodsNetOfReserves

us-gaap:InventoryRawMaterialsNetOfReserves

us-gaap:InventoryWorkInProcessNetOfReserves

us-gaap:LesseeOperatingLeaseLiabilityPaymentsDueNextTwelveMonths

us-gaap:LesseeOperatingLeaseLiabilityPaymentsRemainderOfFiscalYear
us-gaap:StatementGeographical, us-gaap:CreditFacility
us-gaap:LineOfCredit
us-gaap:StatementGeographical
us-gaap:LinesOfCreditCurrent

us-gaap:LongTermDebtMaturitiesRepaymentsOfPrincipalAfterYearFive

us-gaap:LongTermDebtMaturitiesRepaymentsOfPrincipalInNextTwelveMonths

us-gaap:LongTermDebtMaturitiesRepaymentsOfPrincipalInYearFive

us-gaap:LongTermDebtMaturitiesRepaymentsOfPrincipalRemainderOfFiscalYear

us-gaap:OperatingLeaseWeightedAverageDiscountRatePercent
us-gaap:IncomeTaxAuthority, us-gaap:TaxCreditCarryforward
us-gaap:OperatingLossCarryforwards

us-gaap:ProductWarrantyAccrual
us-gaap:BalanceSheetLocation
us-gaap:ProductWarrantyAccrualClassifiedCurrent
us-gaap:BalanceSheetLocation
us-gaap:ProductWarrantyAccrualNoncurrent

us-gaap:PurchaseCommitmentRemainingMinimumAmountCommitted
us-gaap:BusinessAcquisition, us-gaap:CreditFacility, us-gaap:DebtInstrument
us-gaap:RatioOfIndebtednessToNetCapital1

us-gaap:ReportingUnitPercentageOfFairValueInExcessOfCarryingAmount

us-gaap:RestructuringReserve
us-gaap:AwardType
us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue
us-gaap:AwardType, us-gaap:PlanName

us-gaap:ShortTermBorrowings
us-gaap:DebtInstrument
us-gaap:StatementGeographical, us-gaap:CreditFacility

us-gaap:TaxCreditCarryforwardAmount
us-gaap:TaxCreditCarryforward

us-gaap:UnrecognizedTaxBenefitsIncomeTaxPenaltiesAndInterestAccrued

us-gaap:UnrecognizedTaxBenefitsThatWouldImpactEffectiveTaxRate
us-gaap:ValuationAllowancesAndReservesType
us-gaap:ValuationAllowancesAndReservesBalance

Plots across concepts


IncomeStatement
Net Income Loss
Expenses
Other Nonoperating Income Expense
Balance Sheet
Operating Lease Right Of Use Asset
Assets
Operating Lease Right Of Use Asset
Current Assets
Other Assets Current
NonCurrent Assets
Long Term Investments
PropertyPlantAndEquipmentNet
Property Plant And Equipment Net
Liabilities
Operating Lease Liability
Current Liabilities
Short Term Borrowings
Noncurrent Liabilities
Other Liabilities Noncurrent
Stockholders Equity
Common Stock Value
Per Share
Common Stock Dividends Per Share Cash Paid
CashFlow
Net Cash Provided By Used In Investing Activities
NetCashProvidedByUsedInOperatingActivities
Amortization Of Financing Costs And Discounts
NetCashProvidedByUsedInInvestingActivities
Net Cash Provided By Used In Investing Activities
NetCashProvidedByUsedInFinancingActivities
Net Cash Provided By Used In Financing Activities
Shares
Weighted Average Number Of Shares Outstanding Basic
OperatingLeaseLiability
Operating Lease Liability Current
NonoperatingIncomeExpense
Nonoperating Income Expense
LesseeOperatingLeaseLiabilityPaymentsDue
Lessee Operating Lease Liability Payments Remainder Of Fiscal Year
FiniteLivedIntangibleAssets
Finite Lived Intangible Assets Accumulated Amortization
InventoryNet
Inventory Work In Process Net Of Reserves
AccountsReceivable
Allowance For Doubtful Accounts Receivable Current

Tables

  2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302016-03-312015-12-312015-09-302015-06-302015-03-312014-12-312014-09-302014-06-302014-03-312013-12-312013-09-302013-06-302013-03-312012-12-312012-09-302012-06-302012-03-312011-12-312011-09-302011-06-302011-03-312010-12-312010-09-302010-06-302010-03-31
us-gaap:CommonStockValue ▁▁▁▁▁▁█████████████████████████████████████0.10.10.10.10.10.10.1130.1130.1130.1130.1130.1130.1130.1130.1130.1130.1130.1130.1130.1130.1130.1130.1130.1130.1130.1130.1130.1130.1130.1130.1130.1130.1130.1130.1130.1130.1130.1130.1130.1130.1130.1130.113NANANA
us-gaap:WeightedAverageNumberOfDilutedSharesOutstanding █▁55.755.6NA55.455.355.2NA55.20455.08954.848NA54.95455.27455.286NA55.10155.00154.958NA54.31553.80653.563NA53.56853.58953.529NA53.3153.53753.776NA53.51353.35853.359NA53.2953.20653.222NA52.99252.90652.386NA50.99450.8750.6
us-gaap:WeightedAverageNumberOfSharesOutstandingBasic █▁55.455.3NA55.255.154.9NA54.94554.81554.147NA54.47654.71954.423NA54.28254.17853.769NA53.57453.46153.235NA53.31453.38453.214NA53.05453.36153.411NA53.16553.05452.773NA52.85452.67952.504NA52.45652.34651.407NA50.22650.06749.601
 us-gaap:AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount us-gaap:AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecurities us-gaap:RestrictedStockUnitsRSUNANANA0.00260.06050.0361NA0.2040.2060.1282NA0.15980.0990.00038NA0.00020.00080.0NA0.5290.0010.0NANANANANANANANANANANANANANANANANANANANANANANANA
us-gaap:EarningsPerShareBasic █▇▇▅▄▄▃▃▃▁▄▅▇▆▅▅▇▄▃▃▁▂▂▂▃▃▃▂▂▂▂▁▁▁▁▁▂▂▂▂▃▃▃▃▃▂2.642.212.11.661.341.260.780.860.690.231.331.712.251.931.431.42.221.210.850.610.170.330.480.560.620.630.640.550.40.580.380.050.140.110.080.050.350.430.430.580.740.740.72000000000000020.770.770.59
us-gaap:EarningsPerShareDiluted █▇▇▅▄▄▃▃▃▁▄▅▇▆▅▅▇▄▃▂▁▂▂▂▃▃▃▂▂▂▂▁▁▁▁▁▂▂▂▂▃▃▃▃▃▂2.632.22.081.661.331.250.770.860.690.231.321.72.221.91.411.382.191.180.830.60.170.330.480.560.620.630.640.550.40.580.380.050.140.110.080.050.350.430.430.570.730.730.69999999999999970.760.760.58
  2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302016-03-312015-12-312015-09-302015-06-302015-03-312014-12-312014-09-302014-06-302014-03-312013-12-312013-09-302013-06-302013-03-312012-12-312012-09-302012-06-302012-03-312011-12-312011-09-302011-06-302011-03-312010-12-312010-09-302010-06-302010-03-31
 COGS Ratio us-gaap:ProductOrService us-gaap:Product█▇▆▄▃▃▂▁▁▁▁▂▄▄▃▂▂656.7605.0573.8506.8473.0461.2426.435386.173401.326397.363402.271426.255509.999496.677458.155428.891426.317NANANANANANANANANANANANANANANANANANANANANANANANANANANANANA
 COGS Ratio us-gaap:ProductOrService us-gaap:Service█▇▇▆▄▅▄▅▄▃▂▂▃▂▁▂▁93.288.986.483.071.374.573.21676.27872.78466.19858.2760.89763.14157.59853.64557.37654.44NANANANANANANANANANANANANANANANANANANANANANANANANANANANANA
 Gross Margin us-gaap:StatementBusinessSegments mksi:EquipmentAndSolutions█▅▄▃▄▃▂▃▃▁99.376.167.152.663.851.043.27649.3155.87635.218NANANANANANANANANANANANANANANANANANANANANANANANANANANANANANANANANANANANA
 Gross Margin us-gaap:StatementBusinessSegments mksi:LightAndMotionSegment▁▁▁▁▁▁▁▁▁▁▁▁▁█▁▁▁▆▁▁▁192.9182.0182.3175.9166.0165.4176.543172.46182.579193.988202.389201.114204.812205931.0200.557177.998170.796159169.0153.056151.493118.502NANANANANANANANANANANANANANANANANANANANANANANANANA
 Gross Margin us-gaap:StatementBusinessSegments mksi:VacuumAndAnalysisSegment▁▁▁▁▁▁▁▁▁▁▁▁▁█▁▁▁▇▁▁▁▁457.7435.8410.8361.3314.5319.3279.832240.681235.655234.355258.152286.038368.328348344.0311.243308.269309.961277984.0252.084229.167207.359183.681NANANANANANANANANANANANANANANANANANANANANANANANA
  2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302016-03-312015-12-312015-09-302015-06-302015-03-312014-12-312014-09-302014-06-302014-03-312013-12-312013-09-302013-06-302013-03-312012-12-312012-09-302012-06-302012-03-312011-12-312011-09-302011-06-302011-03-312010-12-312010-09-302010-06-302010-03-31
 TTM Greenblatt ROC _ _█▇▆▅▅▄▃▃▃▂▄▅▇▆▅▅▄▄▃▃▂▂▂▂▃▃▂▂▂▂▂▁▁▁▁▁▂▂▂▂▃▃▃186.3155.5146.7116.4100.889.966.06366.8263.90223.06694.084117.045151.291131.639120.016110.15592.88383.5862.51453.00819.18622.55922.20541.36346.03447.0138.55428.1530.6637.77830.95212.33210.4274.6766.6156.39227.84733.36930.041.11257.30556.50848.401NANANA
  2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302016-03-312015-12-312015-09-302015-06-302015-03-312014-12-312014-09-302014-06-302014-03-312013-12-312013-09-302013-06-302013-03-312012-12-312012-09-302012-06-302012-03-312011-12-312011-09-302011-06-302011-03-312010-12-312010-09-302010-06-302010-03-31
us-gaap:AllocatedShareBasedCompensationExpense ▃▃▂▂▂▃▂▂▂█▂▂▂▃▁▂▂▃▂▂▃▁▁▁▁8.810.06.87.46.88.57.0547.3736.92927.8385.2575.2136.36610.4264.5444.8456.2078.7825.4025.15810.5164.1522.9883.2473.566NANANANANANANANANANANANANANANANANANANANANA
us-gaap:ComprehensiveIncomeNetOfTax █▆▇▆▅▃▃▃▃▁▄▅▆▆▅▅▇▄▂▃▁▂▂▂▃▂▂▂▂▂▂▁▁▁▁▁▂▂▂▂▃▃▃▃▃151.6114.5133.5108.378.852.152.9532.237.4998.18865.89890.118111.848115.92683.9383.91138.14767.14328.32737.9870.07319.04722.63427.18533.29830.09227.4120.7522.52231.13920.0657.2086.504-1.5844.2938.2413.67223.66921.93127.74440.28341.60936.20745.20134.879NA
us-gaap:CostOfGoodsAndServicesSold █▇▇▇▆▆▆▅▅▅▅▅▆▆▅▅▅▄▄▄▃▂▁▂▂▂▂▂▂▂▂▂▁▁▁▁▁▂▁▂▂▂▂▂▂▂394.7371.8358.6327.8298.0296.1283.369257.447263.083265.443250.657255.292298.263291.42273.474258.272261.174231.606221.732212.275189.948105.76899.588115.103119.168116.793113.587107.473105.062116.981116.714104.21994.9786.94381.19584.876100.881107.07795.71106.83119.499125.49121.657122.82123.328106.671
us-gaap:GrossProfit █▇▇▆▅▅▅▅▅▄▅▅▆▆▅▅▅▅▄▄▃▂▁▂▂▂▂▂▂▂▂▁▁▁▁▁▂▂▂▂▂▂▂▂▂▂355.2322.1301.6262.0246.3239.6216.282205.004211.027198.118209.884231.86274.877262.855238.326227.995219.583205.547183.408168.385135.91377.91372.79994.22998.79897.04689.43479.32579.63589.37287.6862.23461.95854.70252.60156.57176.51683.79175.96187.678104.988106.36197.32198.50397.31985.495
us-gaap:IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest █▇▇▅▄▄▃▃▃▁▄▅▇▆▅▅▇▄▃▂▁▁▁▂▃▃▂▂▂172.5148.2140.5108.892.481.355.21555.42251.86315.33691.148114.516148.544126.742110.997101.371157.97277.28549.55642.24812.36823.80523.04642.08446.82447.51438.94528.54430.891NANANANANANANANANANANANANANANANANA
us-gaap:IncomeTaxExpenseBenefit ▆▆▆▄▅▄▄▃▄▂▅▅▆▅▇▆█▄▂▃▂▃▁▄▄▄▂▁▃▃▃▃▂▁▂▂▃▃▃▃▅▅▄▅▄▄26.025.924.917.118.712.212.4517.99414.1242.88119.51221.23925.68221.62133.35925.37737.53212.2254.0699.6993.1586.242-2.47612.31513.60413.7284.753-0.5739.6676.76810.91910.0823.318-0.7942.7514.0799.42410.8537.56111.01119.01318.73614.52818.3717.05913.548
us-gaap:InterestExpense ▄▄▄▄▅▆▆██▆▃▃▃▄▅▅▅▆▆▇▅▁▁▁▁▁▁▁▁▁▁▁▁▁▁▁▁▁▁▁▁▁▁▁▁▁6.46.46.46.67.28.98.813.54212.6749.1193.8713.7193.9225.437.9897.1726.9978.83210.08412.0078.4740.0440.0110.0570.0380.0370.0370.0050.0120.0170.0350.0130.0230.0140.0540.0320.0510.0090.0150.0120.00.0050.0510.0320.030.022
us-gaap:InterestExpenseLongTermDebt ▄▄6.46.4NANA7.28.98.813.54212.6749.1193.8713.7193.9225.437.9897.172NANA10.08512.007NANANANANANANANANANANANANANANANANANANANANANANANANANA
us-gaap:NetIncomeLoss █▇▆▅▄▄▃▃▃▁▄▅▇▆▅▅▇▄▃▂▁▂▂▂▂▃▃▂▂▂▂▁▁▁▁▁▂▂▂▂▃▃▃▃▃▂146.5122.3115.691.773.769.142.76447.42837.73912.45571.63693.277122.862105.12177.63875.994120.4465.0645.48732.5499.2117.56325.52229.76933.2233.78634.19229.11721.22431.24520.2372.4587.325.7614.1092.5818.57222.76822.71430.37338.60138.04335.94938.63638.77729.225
us-gaap:NonoperatingIncomeExpense ▄▅█▄▄▅▁▇▇▆▆▅▅▄█▄▄▄▇▃▄▅-7.5-1.121.5-7.6-8.4-0.4-27.83411.39812.0397.738.231-2.5292.747-4.89718.95-8.784-9.767-6.29515.093-10.76-6.8181.246NA0.7210.79NANANANANANANANANANANANANANANANANANANANANA
us-gaap:OperatingIncomeLoss █▇▆▅▅▄▃▃▃▂▄▅▇▆▅▅▄▄▃▃▂▂▂▂▃▃▂▂▂▂▂▁▁▁▁▁▂▂▂▂▃▃▃▃▃▂186.3155.5146.7116.4100.889.966.06366.8263.90223.06694.084117.045151.291131.639120.016110.15592.88383.5862.51453.00819.18622.55922.20541.36346.03447.0138.55428.1530.6637.77830.95212.33210.4274.6766.6156.39227.84733.36930.041.11257.30556.50848.40154.93649.94942.221
us-gaap:OtherNonoperatingIncomeExpense ▁▆▆▆▅▆▄▇▆▆▆▆▆▆▅▅▄█▄▇▇-7.5-1.1-0.1-1.1-1.5-0.4-3.1340.914-0.788-0.325-0.763-0.326-0.281-0.572-2.155-2.485-3.2772.021-3.5750.8431.126NANANA0.79NANANA0.231NANANANANANANANANANANANANANANANANA
us-gaap:ProfitLoss █▇▆▅▄▄▃▃▂▁▄▅▇▆▄▄146.5122.3115.691.773.769.142.76447.42837.73912.45571.63693.277122.862105.12177.63875.994NANANANANANANANANANANANANANANANANANANA56.57176.516NANA87.678104.988NANANANANA
us-gaap:ResearchAndDevelopmentExpense █▇▇▇▇▇▆▆▆▆▅▄▅▅▅▅▅▅▅▅▄▂▂▂▂▁▁▁▁▁▁▁▂▁▁▁▁▁▁▁▁▂▁▁▁▁50.047.245.442.542.842.441.70741.56641.85538.93332.46131.89836.50434.85733.04532.54833.6833.28232.8732.26828.21417.22716.84117.21717.56716.6816.02215.82715.42115.61816.25215.25716.81315.24814.20714.13615.59116.18414.22414.33115.58216.89615.7915.0716.15415.675
us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax ▁▁▁▁▁▁▁▁▁▁▁▁▁█▁▁▁▇▁▁▁▁▁▁▁▁▁▁▁▁▁▁▁▁▁▁▁▁▁▁▁▁▁▁▁▁749.9693.9660.2589.8544.3535.7499.651462.451474.11463.561460.541487.152573.14554275.0511.8486.267480.757437153.0405.14380.66325.861183.681172.387209.332217.966213.839203.021186.798184.697206.353204.394166.453156.928141.645133.796141.447177.397190.868171.671194.508224.487231.851218.978221.323220.647192.166
us-gaap:SellingGeneralAndAdministrativeExpense ███▇▇▇▇▆▇▇▅▅▆▇▆▅▅▆▄▅▅▂▁▂▂▁▁▁▁▂▂▂▂▂▁▁▂▂▁▁▁▁▂▁▁▁97.295.992.887.086.187.282.55482.10183.23682.45568.16670.82276.55982.94972.5171.83971.97974.2253.36870.42471.42933.9531.55533.39633.26930.86732.63332.36532.23934.59139.87433.15834.84934.17330.85329.66132.95934.11931.47331.98431.85132.70732.8828.24730.90227.812
  2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302016-03-312015-12-312015-09-302015-06-302015-03-312014-12-312014-09-302014-06-302014-03-312013-12-312013-09-302013-06-302013-03-312012-12-312012-09-302012-06-302012-03-312011-12-312011-09-302011-06-302011-03-312010-12-312010-09-302010-06-302010-03-31
  2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302016-03-312015-12-312015-09-302015-06-302015-03-312014-12-312014-09-302014-06-302014-03-312013-12-312013-09-302013-06-302013-03-312012-12-312012-09-302012-06-302012-03-312011-12-312011-09-302011-06-302011-03-312010-12-312010-09-302010-06-302010-03-31
us-gaap:Assets ██▇▇▇▆▆▆▆▆▅▄▄▄▄▄▄▄▄▄▄▂▂▂▂▂▂▂▁▂▂▁▁▁▁▁▁▁▁▁▁▁▁4208.94017.93903.83750.93631.13474.93416.323354.5443381.9483412.7382614.2462564.5962573.4882481.4562414.0182370.3452384.6832220.5472212.2422241.6652245.1281290.661273.3471293.3451280.3331249.611224.0441217.3681197.9011222.761213.0181171.9741130.3471125.4081134.8421142.3021134.921127.7331118.6541087.7121080.6151049.319982.413NANANA
us-gaap:Liabilities ███▇▇▇▆▆▇▇▁▁▁▁▂▂▃▂▃▃▄1594.11548.91542.91524.11504.51422.41392.9761381.0131436.4611491.877741.059754.303772.05783.116825.111862.64954.927915.142970.451026.1261063.518NA112.466NANANANANANANANANANANANANANANANANANANANANANANA
us-gaap:LiabilitiesAndStockholdersEquity ██▇▇▇▆▆▆▆▆▅▄▄▄▄▄▄▄▄▄▄▂▂▂▂▂▂▂▁▂▂▁▁▁▁▁▁▁▁▁▁▁▁4208.94017.93903.83750.93631.13474.93416.323354.5443381.9483412.7382614.2462564.5962573.4882481.4562414.0182370.3452384.6832220.5472212.2422241.6652245.1281290.661273.3471293.3451280.3331249.611224.0441217.3681197.9011222.761213.0181171.9741130.3471125.4081134.8421142.3021134.921127.7331118.6541087.7121080.6151049.319982.413NANANA
us-gaap:StockholdersEquity █▇▇▆▆▆▆▅▅▅▅▅▅▄▄▄▃▃▃▂▂▂▂▂▂▂▂▂▂▂▂▂▂▂▂▂▂▂▂▁▁▁▁2614.82469.02360.92226.82126.62052.52023.3441973.5311945.4871920.8611873.1871810.2931801.4381698.341588.9071507.7051429.7561305.4051241.7921215.5391181.611171.0691160.8811146.6721129.4361104.6891081.8221058.561043.2861045.7681021.5231005.4221004.0681003.0631012.1561015.1871014.4091006.042990.012972.612948.966911.444847.039NANANA
  2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302016-03-312015-12-312015-09-302015-06-302015-03-312014-12-312014-09-302014-06-302014-03-312013-12-312013-09-302013-06-302013-03-312012-12-312012-09-302012-06-302012-03-312011-12-312011-09-302011-06-302011-03-312010-12-312010-09-302010-06-302010-03-31
us-gaap:AssetsCurrent █▇▆▆▅▅▅▄▄▄▅▅▅▄▄▄▄▃▃▃▃▂▂▁▁▁▁▁▁▂▂▂▂▂▂▂▂▂▂▂▂▂▁2121.71922.51804.41669.71569.81456.61433.5471360.3851370.01360.3521464.1041412.4711417.7241308.0221236.2531195.2031202.11021.518998.7691002.3431001.513959.133939.511719.362687.668675.341738.091736.875763.028895.609879.231893.557861.688858.645868.182852.937891.596884.109884.901850.328849.709823.574752.895NANANA
us-gaap:Cash NA592.9544.6423.5347.2331.7349.4NANANANANANANANANANANANANANANANANANANANANANANANANANA169.929185.143176.168167.364177.615146.035107.678105.292NA107.815NANANA
us-gaap:CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents █▇▆▄▃▃▂▂▂▂▆▂▃▁▁755.2699.8608.3493.3428.9442.0414.572386.281366.935418.016644.345399.85427.431340.888333.887NA428.112261.186233.91NANANA227.574NANANANANANANANANANANANANANANANANANANANANANANA
us-gaap:ShortTermInvestments ▅▄▄▄▃▁▂▂▂▁▂▄▄▄▄▄▃▃▄▁▁▆█▄▃▃▃▃▄▆▆▇▆▆▆▆▄▄▅▆▅▄▅283.8209.7227.7222.4178.161.4109.41788.84792.98544.32673.826219.776203.686200.614209.434228.631149.016155.299189.46353.10471.373308.768430.663196.842177.433158.631129.594140.042202.128306.513300.715365.876346.715331.634327.653298.666196.35223.772252.603309.728269.749219.913269.457NANANA
us-gaap:AccountsReceivableNetCurrent ██▇▇▇▇▆▆▆▆▅▆▆▆▅▅▅▅▄▄▄▂▁▂▂▂▁▁▁▂▂▁▁▁▁▁▁▂▂▂▂▂▂431.7420.8392.7363.9381.1381.0341.064327.983313.53335.99295.454318.47339.958341.718300.308280.302268.544267.249248.757243.853233.951113.472101.883115.988124.553124.445106.362106.29101.487119.463116.74498.13395.77190.45782.0687.536104.827131.132120.894125.517150.98155.682138.181NANANA
us-gaap:InventoryNet ███▇▇▇▇▇▇▇▅▆▅▅▅▄▄▄▄▄▄▁▁▂▂▂▁▁▁▁▁▁▁▁▁▁▁▁▁▂▂▂▁527.0515.2501.4494.2490.2474.2462.146463.263479.497475.633384.689399.077384.929365.709339.081319.46304.707285.518275.869278.965278.36151.65152.631168.079165.59164.412155.169153.93155.872147.511142.727136.06137.006131.253134.639145.518145.609148.474153.632161.059164.45159.843156.429NANANA
us-gaap:OtherAssetsCurrent █▅▅▆▆▆▇▆▅▆▄▅▄▄▄▄▃▃▃▄▄▂▂▂▂▂▂▂▂▁▁▂▃▂▂▂▂▂▂▂▂▁▁124.077.074.395.991.598.0106.34894.01180.30386.38765.7975.29861.7259.09353.54360.71651.72152.26646.16653.61657.99527.38826.7628.89428.20321.5827.51228.73528.70717.55216.71528.65138.42630.00828.04824.99825.07824.97834.23827.54224.1215.4412.577NANANA
  2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302016-03-312015-12-312015-09-302015-06-302015-03-312014-12-312014-09-302014-06-302014-03-312013-12-312013-09-302013-06-302013-03-312012-12-312012-09-302012-06-302012-03-312011-12-312011-09-302011-06-302011-03-312010-12-312010-09-302010-06-302010-03-31
us-gaap:NoncurrentAssets ███▇▇▆▅▄▄▄▃▃▃▃▃▃▃▃▃▃▃▁▁▁▁▁▁▁▁▁▁▁▁▁▁▁▁▁▁▁▁520.2518.3503.9479.1453.1395.2339.3261.91261.91286.253224.053214.538207.797205.99203.154193.214193.543196.764200.67201.748209.25769.81671.32971.48371.93673.0374.68775.65477.54477.17379.65979.97780.72281.60982.71179.76575.79275.87474.47971.91571.753NA72.68NANANA
us-gaap:PropertyPlantAndEquipmentGross NANA883.4NANANA835.388NANANA706.829NANANA657.143NANANA618.041NANANA284.119NANANA283.227NANANA277.629NANANA271.95NANANA254.593NANANA242.647NANANA
 us-gaap:PropertyPlantAndEquipmentGross us-gaap:PropertyPlantAndEquipmentByType mksi:FurnitureAndFixturesOfficeEquipmentAndSoftwareNANA187.1NANANA186.651NANANA149.145NANANA145.945NANANA139.392NANANA61.49NANANA59.972NANANANANANANANANANANANANANANANANANANA
 us-gaap:PropertyPlantAndEquipmentGross us-gaap:PropertyPlantAndEquipmentByType us-gaap:BuildingNANA120.2NANANA113.303NANANA104.023NANANA103.563NANANA100.169NANANA68.881NANANA66.885NANANA68.569NANANANANANANANANANANANANANANA
 us-gaap:PropertyPlantAndEquipmentGross us-gaap:PropertyPlantAndEquipmentByType us-gaap:ConstructionInProgressNANA70.6NANANA46.926NANANA44.823NANANA13.619NANANA6.592NANANA4.171NANANA3.647NANANA3.702NANANANANANANANANANANANANANANA
 us-gaap:PropertyPlantAndEquipmentGross us-gaap:PropertyPlantAndEquipmentByType us-gaap:LandNANA12.3NANANA11.926NANANA11.448NANANA11.65NANANA11.115NANANA8.535NANANA8.65NANANA9.225NANANANANANANANANANANANANANANA
 us-gaap:PropertyPlantAndEquipmentGross us-gaap:PropertyPlantAndEquipmentByType us-gaap:LeaseholdImprovementsNANA95.4NANANA80.389NANANA66.569NANANA65.293NANANA63.431NANANA21.303NANANA21.353NANANA20.59NANANANANANANANANANANANANANANA
 us-gaap:PropertyPlantAndEquipmentGross us-gaap:PropertyPlantAndEquipmentByType us-gaap:MachineryAndEquipmentNANA397.8NANANA396.193NANANA330.821NANANA317.073NANANA297.342NANANA119.739NANANA122.72NANANA116.475NANANANANANANANANANANANANANANA
us-gaap:AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment NANA599.1NANANA593.517NANANA512.462NANANA485.361NANANA443.482NANANA215.263NANANA210.451NANANA200.093NANANA191.434NANANA182.106NANANA173.671NANANA
us-gaap:AmortizationOfIntangibleAssets ▆▆▆▆▆▇███▇▅▅▅▅▅▅▆▆▆▆▅▂▂▂▂▂▂▂▁▁▁▁▁▁▁▁▁▁▁▁▁▁▁▁▁▁12.712.412.612.513.816.317.10317.0217.55215.72710.73510.69510.90111.1910.79710.97711.46812.50112.69112.4528.8551.6831.6931.6911.7091.6711.7311.761.0440.410.6020.3610.7420.4340.5830.2150.1190.1190.2640.2510.250.250.250.250.3140.469
us-gaap:PropertyPlantAndEquipmentNet ██▇▇▆▆▆▆▆▆▅▄▄▄▄▄▄▄▄▄▄▁▁▁▁▁▁▁▁▁▁▁▁▁▁▁▁▁▁▁▁▁▁303.9297.0284.3267.9248.4238.2241.871236.124230.649251.424194.367180.182174.054172.802171.782166.928167.212169.833174.559179.694184.22167.56168.85669.19369.89870.90872.77673.64275.9675.51777.53678.0278.87579.70980.51677.49373.98373.99472.48769.89169.65368.91268.976NANANA
us-gaap:LongTermInvestments ▂▂▂▂▁▁▁▇▇▇▇▇▇███▇▇▇6.66.56.56.36.06.05.85410.14610.40110.3510.2910.40410.47610.84110.65510.59310.3299.9339.858NANANANANANANANANANANANANANANANANANANANANANANANANANANA
us-gaap:Goodwill ██████████▄▄▄▄▄▄▄▄▄▄▄▁▁▁▁▁▁▁▁▁▁▁▁▁▁▁▁▁▁▁▁▁▁1063.71062.11066.41062.11058.11056.41058.4541054.0911058.6671057.331586.996587.861588.718593.494591.047589.099586.865590.502588.585594.635592.605199.999199.703199.562200.212199.33192.381193.125193.05151.112150.909150.7150.012150.34150.733149.887140.084140.084140.084140.084140.02140.02140.02NANANA
us-gaap:FiniteLivedIntangibleAssetsNet ▆▇▇▇▇▇▇███▅▅▅▅▅▅▅▅▆▆▆▁▁▂▂▂▂▂▂▁▁▁▁▁▁▁▁▁▁▁▁▁▁486.3498.4512.2523.3534.4547.7564.63580.88599.372619.091319.807331.288342.684356.345366.398376.334386.075396.409408.004419.811426.98342.57544.02745.64747.82249.55346.38948.81251.01212.51913.0913.31612.52313.7511.56111.8431.0311.151.0431.3071.2431.4931.743NANANA
 us-gaap:IntangibleAssetsNetIncludingGoodwill us-gaap:ConsolidationItems us-gaap:MaterialReconcilingItems▇▇▇▇▇▇████▁▁▁▁▁▂▂▂▂▂▂1550.01560.51578.61585.41592.51604.11623.0841634.9711658.0391676.422906.803919.149931.402949.839957.445965.433972.94986.911996.5891014.4461019.588NA243.73NANANANANANANANANANANANANANANANANANANANANANANA
us-gaap:OperatingLeaseRightOfUseAsset ████▇▅▁▁▁▁179.3182.7184.4180.1174.3127.164.49767.63268.63165.628NANANANANANANANANANANANANANANANANANANANANANANANANANANANANANANANANANANANA
us-gaap:OtherAssetsNoncurrent ██▇▇▆▇█▇▇█▆▇▆▆▆▅▅▅▅▅▄▃▃▃▂▂▂▅▅▅▅▅▁▁▁▁▁▁▁▂▂▂▃47.448.745.641.540.142.947.46745.28644.22848.56238.68242.3939.83239.95237.88332.18832.10232.35232.46729.92624.57621.39221.2518.67317.87817.16517.20630.16533.93934.38331.84731.19811.46112.80711.69210.0810.65811.91512.26616.84214.71314.01918.779NANANA
  2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302016-03-312015-12-312015-09-302015-06-302015-03-312014-12-312014-09-302014-06-302014-03-312013-12-312013-09-302013-06-302013-03-312012-12-312012-09-302012-06-302012-03-312011-12-312011-09-302011-06-302011-03-312010-12-312010-09-302010-06-302010-03-31
us-gaap:AccountsPayableCurrent ██▆▆▆▆▅▅▅▅▅▄▅▅▅▄▄▄▄▄▃▂▁▂▂▂▂▂▂▂▂▂▁▁▁▁▁▁▁▁▂▂▂148.1146.7110.6113.4105.0110.788.39788.07888.04695.31783.82581.48687.69992.36482.51877.84273.29170.49369.33768.37161.53828.07623.17726.32634.05437.54934.16630.80926.65435.38540.07427.30424.30221.15916.80316.39523.4322.58324.85322.57233.75434.85636.427NANANA
us-gaap:AccruedIncomeTaxesCurrent ▄▄▄▄▃▃▃▂▃▃▃▃▄▆▄▇█▅▅▃▂▁▁▂▂▂▂▁▁▂▂▂▁▁▁▁▁▁▂18.719.918.318.816.014.715.44811.04812.81114.35516.35812.94217.29431.09621.39838.60942.14227.46922.79413.7587.0223.514.0249.2798.6156.4556.7023.8214.1688.6210.4447.7683.2693.1514.1483.8584.6025.3957.548NA0.4913.0775.347NANANA
us-gaap:ContractWithCustomerLiabilityCurrent ██▇▆▆▄▄▄▅▄▂▁36.335.431.230.428.721.921.49422.36326.59721.05614.2469.136NANA12.842NANANANANANANANANANANANANANANANANANANANANANANANANANANANANANANA
us-gaap:LiabilitiesCurrent █▇▇▇▇▆▆▆▅▅▅▅▅▅▅▅▅▄▄▄▄▁▁▂▂▂▂▂▁▂▂▁▁▁▁▁▁▁▁▁▂▂▂420.3371.9373.9364.3351.6321.6317.681310.657285.156296.559263.285262.493282.071291.025289.822282.612258.256230.396237.3230.435207.6997.94190.984107.612111.978103.866103.627104.86892.772116.21128.42296.16179.58676.73279.31189.1984.57287.47996.43182.931101.983110.052109.686NANANA
us-gaap:OperatingLeaseLiabilityCurrent ▄▁▃▄▄▅███▇16.313.815.816.816.718.220.63220.57520.6719.459NANANANANANANANANANANANANANANANANANANANANANANANANANANANANANANANANANANANA
us-gaap:OtherLiabilitiesCurrent █▅▅▆▅▄▄▅▄▆▄▆▆▇▆▅▄▄▃▆▅▂▁▂▃▂▁▂▂▁▁▁▁▁▂▂▁▂▂▁▂▁▂92.670.565.677.569.659.058.7668.92561.68674.56862.5278.32778.20185.60173.94568.60457.79555.5851.98573.35467.09245.37235.35942.83545.66838.51335.78942.96139.50736.44234.24235.89932.69734.04237.40541.00234.56737.92340.32434.53837.91935.71337.968NANANA
  2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302016-03-312015-12-312015-09-302015-06-302015-03-312014-12-312014-09-302014-06-302014-03-312013-12-312013-09-302013-06-302013-03-312012-12-312012-09-302012-06-302012-03-312011-12-312011-09-302011-06-302011-03-312010-12-312010-09-302010-06-302010-03-31
us-gaap:LongTermDebt ▆▆▆▆▆▆▇▇▇█▁▁▁▁▂▂▃▃▄▄▅811.5813.3815.0816.8818.6820.4871.667873.45926.879976.823343.842342.97342.096341.29389.993435.731551.846552.232601.229639.068696.906NANANANANANANANANANANANANANANANANANANANANANANANANA
 us-gaap:DeferredFinanceCostsNoncurrentNet us-gaap:DebtInstrument mksi:TermLoanFacilityNet▃▃▃▃▄▄▄▅▅▆▁▁▂▂▃▅▆▇█8.58.99.49.810.310.711.8112.25813.54315.2244.7085.5816.4187.2269.18513.43816.02116.98719.642NANANANANANANANANANANANANANANANANANANANANANANANANANANA
us-gaap:DeferredIncomeTaxLiabilitiesNet ██▁▅█71.871.259.267.271.0NA72.4NANANANANANANANANANANANANANANANANANANANANANANANANANANANANANANANANANANANANANANA
us-gaap:OtherLiabilitiesNoncurrent ▆▆▆▆▆▆▄▃▃▂▂▂▂▃▃▁▂▁▁▁▆▁▁▄▄▄▄▆▇▇▇█▅▅▄▃▃▃▃▃▂▂▂54.253.457.958.757.454.942.51136.71834.29629.86230.11130.41227.50435.18432.02523.10724.3722.09220.76119.95656.82121.6521.48239.06138.91941.05538.59553.9461.84360.78263.07370.39146.69345.61343.37537.92535.93934.21232.21132.16929.66627.82325.688NANANA
us-gaap:OperatingLeaseLiabilityNoncurrent ███▇▇▄▁▁▁▁188.0191.7187.4172.2162.3111.644.75947.29451.14149.392NANANANANANANANANANANANANANANANANANANANANANANANANANANANANANANANANANANANA
us-gaap:LesseeOperatingLeaseLiabilityPaymentsDueYearTwo ▆▅█▁19.819.320.418.1NANANANANANANANANANANANANANANANANANANANANANANANANANANANANANANANANANANANANANANANANANA
us-gaap:LesseeOperatingLeaseLiabilityPaymentsDueYearThree █▇█▁18.418.118.316.9NANANANANANANANANANANANANANANANANANANANANANANANANANANANANANANANANANANANANANANANANANA
us-gaap:LesseeOperatingLeaseLiabilityPaymentsDueYearFour █▆█▁17.417.117.416.3NANANANANANANANANANANANANANANANANANANANANANANANANANANANANANANANANANANANANANANANANANA
us-gaap:LesseeOperatingLeaseLiabilityPaymentsDueYearFive NANA16.6NANANANANANANANANANANANANANANANANANANANANANANANANANANANANANANANANANANANANANANANANANANA
us-gaap:LesseeOperatingLeaseLiabilityPaymentsDueAfterYearFive NANA161.7NANANANANANANANANANANANANANANANANANANANANANANANANANANANANANANANANANANANANANANANANANANA
  2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302016-03-312015-12-312015-09-302015-06-302015-03-312014-12-312014-09-302014-06-302014-03-312013-12-312013-09-302013-06-302013-03-312012-12-312012-09-302012-06-302012-03-312011-12-312011-09-302011-06-302011-03-312010-12-312010-09-302010-06-302010-03-31
us-gaap:StockholdersEquity █▇▇▆▆▆▆▅▅▅▅▅▅▄▄▄▃▃▃▂▂▂▂▂▂▂▂▂▂▂▂▂▂▂▂▂▂▂▂▁▁▁▁2614.82469.02360.92226.82126.62052.52023.3441973.5311945.4871920.8611873.1871810.2931801.4381698.341588.9071507.7051429.7561305.4051241.7921215.5391181.611171.0691160.8811146.6721129.4361104.6891081.8221058.561043.2861045.7681021.5231005.4221004.0681003.0631012.1561015.1871014.4091006.042990.012972.612948.966911.444847.039NANANA
us-gaap:CommonStockValue ▁▁▁▁▁▁█████████████████████████████████████0.10.10.10.10.10.10.1130.1130.1130.1130.1130.1130.1130.1130.1130.1130.1130.1130.1130.1130.1130.1130.1130.1130.1130.1130.1130.1130.1130.1130.1130.1130.1130.1130.1130.1130.1130.1130.1130.1130.1130.1130.113NANANA
us-gaap:AdditionalPaidInCapitalCommonStock ███▇▇▇▇▇▇▇▅▅▅▅▅▅▅▅▅▄▄▄▄▃▃▃▃▃▃▃▃▃▃▃▃▃▃▂▂▂▂▂▁884.3877.9873.2861.6858.7852.4864.305856.437849.585844.261793.932786.138793.384791.15789.644782.597779.058783.371777.482770.444765.393745.84744.725741.423739.567736.29734.732730.11726.831732.741730.571726.018723.36719.782718.005715.001712.921709.707707.419703.405699.458694.355663.792NANANA
us-gaap:RetainedEarningsAccumulatedDeficit █▇▇▆▆▆▆▅▅▅▅▅▅▄▄▃▃▃▂▂▂▂▂▂▂▂▂▂▂▂▁▁▁▁▁▂▂▁▁▁▁▁▁1732.81598.51487.31382.71302.01239.31181.2161149.4571113.0361086.4091084.7971023.9591004.698892.82795.698727.835661.341550.385494.744458.369434.928434.803427.214413.419395.455374.063349.061323.639303.277301.147278.966267.246273.296275.058278.583284.802291.765281.711268.87254.701232.372201.636171.356NANANA
us-gaap:AccumulatedOtherComprehensiveIncomeLossNetOfTax ▆▅▆▄▂▁▃▂▄▅▅▆▆█▆▆▅▂▂▄▄▅▄▅▅▅▆▆█▇▇▇▇▇██▇█████▇2.4-7.50.3-17.6-34.2-39.3-22.29-32.476-17.247-9.922-5.6550.0833.24314.2573.452-2.84-10.756-28.464-30.547-13.387-18.824-9.687-11.171-8.283-5.699-5.777-2.0844.69813.06511.76711.87312.0457.2998.1115.45515.2719.6114.51113.6114.39317.02315.3411.778NANANA
us-gaap:AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue ▁█8.810.0NA7.46.88.5NA7.3767.20527.8385.2575.2136.36610.426NANANANANANANANANANANANANANANANANANANANANANANANANANANANANANANANA
  2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302016-03-312015-12-312015-09-302015-06-302015-03-312014-12-312014-09-302014-06-302014-03-312013-12-312013-09-302013-06-302013-03-312012-12-312012-09-302012-06-302012-03-312011-12-312011-09-302011-06-302011-03-312010-12-312010-09-302010-06-302010-03-31
us-gaap:NetCashProvidedByUsedInOperatingActivities █▆▇▇▇▃▃▃▃▁▆▄▅▃▄▅165.2126.9147.20000000000005152.1139.074.977.24760.65877.55429.05135.45895.956109.61172.75680.78698.963NANANANANANANANANANANANANANA34.30536.1363.1832.46323.31931.85354.56227.43351.39245.9231.95626.76887.21837.07922.45616.717
us-gaap:NetCashProvidedByUsedInInvestingActivities ▇▇▇▇▆▇▇▇▇▁█▇▇▇▇▇-90.7-9.2-30.1-72.9-137.438.0-39.55828.946-62.509-874.132120.204-30.915-15.92-0.6176.647-87.751NANANANANANANANANANANANANA-1.9726.192-11.421-24.107-7.198-7.085-149.19222.96615.44452.517-47.534-57.49246.431-49.929-57.616-5.4457.367
us-gaap:NetCashProvidedByUsedInFinancingActivities ▂▂▂▂▂▁▂▂▂█▂▁▂▂▂▁-17.0-23.5-6.2-17.1-16.7-81.5-13.857-64.618-63.979618.632-10.514-92.62-7.776-67.096-58.313-135.301NANANANANANANANANANANANANA-10.071-6.407-8.534-11.046-11.162-14.791-10.445-9.307-12.427-6.491-5.983-6.60221.467-3.813-3.5958.157-5.776
us-gaap:CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect ▅▆▆▅▄▅▅▅▄▁█▄▆▄▅▃▇▅55.491.5115.064.4-13.127.428.29119.346-51.081-226.329244.495-27.58186.5437.00127.793-122.018166.92627.276NANANANANANANANANANANANANANANANANANANANANANANANANANANANA
  2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302016-03-312015-12-312015-09-302015-06-302015-03-312014-12-312014-09-302014-06-302014-03-312013-12-312013-09-302013-06-302013-03-312012-12-312012-09-302012-06-302012-03-312011-12-312011-09-302011-06-302011-03-312010-12-312010-09-302010-06-302010-03-31
us-gaap:DeferredIncomeTaxExpenseBenefit ▆█▅▆▇▆▇▅▆▆▃▅▇▆▄▆█▆▁▄▆▆▇▆▆▆▇▆▇▆▅▆▇▆▆▆▆▆▇▆▆▇▆█▇▆0.29.5-6.4-4.12.80.64.852-6.442-0.18-2.445-15.863-4.6951.875-0.705-11.472-1.1579.607-1.809-29.255-10.9481.0340.3472.563-2.495-0.3940.7364.79-0.9225.37-3.974-6.7120.7781.6171.2280.760.881.1471.0324.4650.599-0.5082.993-1.6189.4351.7740.506
us-gaap:IncreaseDecreaseInAccountsReceivable ▅▇▆▂▄█▅▆▁▃▁▂▄▇▅▅▄▅▅▅▆▅▂▃▄▆▄▄▂▄▆▄▄▅▃▂▁▅▃▁▃▅▂▄▅█10.333.123.9-20.4-1.242.59.37717.879-23.135-4.028-22.579-19.3865.17537.33617.58810.5880.68615.21513.6038.63425.7910.084-13.758-7.363-0.24319.033.1496.59-18.6262.78418.4511.3575.99710.348-4.296-19.408-26.80112.217-4.412-24.464-5.88516.838-17.8342.3817.14440.85
us-gaap:IncreaseDecreaseInInventories ▅▇▄▄▆▆▃▂▆▅▂▆█▇▆▆▇▅▄▄▂▃▁▄▄▅▄▃▄▄▅▄▅▃▂▃▃▃▂▃▄▄▄▅▆▅14.024.15.15.621.220.33.494-5.02620.49410.327-6.66220.91231.35228.17721.2217.19522.34211.7148.7218.945-4.7120.844-10.7186.7485.65412.8176.4342.6724.4027.40211.8487.01510.5870.347-6.234-0.1511.622-0.578-3.1591.9766.8965.9848.05316.13417.37310.907
us-gaap:NetCashProvidedByUsedInOperatingActivities █▆▇▇▇▃▃▃▃▁▆▄▅▃▄▅165.2126.9147.20000000000005152.1139.074.977.24760.65877.55429.05135.45895.956109.61172.75680.78698.963NANANANANANANANANANANANANANA34.30536.1363.1832.46323.31931.85354.56227.43351.39245.9231.95626.76887.21837.07922.45616.717
us-gaap:NetIncomeLoss █▇▆▅▄▄▃▃▃▁▄▅▇▆▅▅▇▄▃▂▁▂▂▂▂▃▃▂▂▂▂▁▁▁▁▁▂▂▂▂▃▃▃▃▃▂146.5122.3115.691.773.769.142.76447.42837.73912.45571.63693.277122.862105.12177.63875.994120.4465.0645.48732.5499.2117.56325.52229.76933.2233.78634.19229.11721.22431.24520.2372.4587.325.7614.1092.5818.57222.76822.71430.37338.60138.04335.94938.63638.77729.225
us-gaap:ProfitLoss █▇▆▅▄▄▃▃▂▁▄▅▇▆▄▄146.5122.3115.691.773.769.142.76447.42837.73912.45571.63693.277122.862105.12177.63875.994NANANANANANANANANANANANANANANANANANANA56.57176.516NANA87.678104.988NANANANANA
us-gaap:ShareBasedCompensation ▃▃▂▂▂▃▂▂▂█▂▂▂▃▂▂▂▃▂▂▃▂▁▁▁▁▁▁▁▁▁▁▂▁▁▁▁▁▁▁▁▁▁▁▁▁8.810.06.87.46.88.57.0547.3736.92927.8385.2575.2136.36610.4264.5444.8456.2078.7825.4025.15810.5164.1522.9883.2473.5663.2122.5642.7532.83.1982.4832.75.0113.7983.1312.8213.7793.32.6282.5492.9563.0923.892.4042.1732.137
  2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302016-03-312015-12-312015-09-302015-06-302015-03-312014-12-312014-09-302014-06-302014-03-312013-12-312013-09-302013-06-302013-03-312012-12-312012-09-302012-06-302012-03-312011-12-312011-09-302011-06-302011-03-312010-12-312010-09-302010-06-302010-03-31
us-gaap:NetCashProvidedByUsedInInvestingActivities ▇▇▇▇▆▇▇▇▇▁█▇▇▇▇▇-90.7-9.2-30.1-72.9-137.438.0-39.55828.946-62.509-874.132120.204-30.915-15.92-0.6176.647-87.751NANANANANANANANANANANANANA-1.9726.192-11.421-24.107-7.198-7.085-149.19222.96615.44452.517-47.534-57.49246.431-49.929-57.616-5.4457.367
us-gaap:PaymentsToAcquirePropertyPlantAndEquipment ▅▇▇█▆▃▅▅▄▄▇▄▄▃▄▃▂▂▂▂▂▁▁▁▁▁▁▁▂▁▁▁▁▁▂▁▁▂▂▁▁▁▂▂▁▁16.326.525.029.020.910.019.15116.49913.72514.52926.05615.06712.4289.3913.438.1185.644.0997.1644.6955.1082.1563.5833.4972.832.5043.8212.1074.1573.0983.2562.7943.0043.3566.6653.0283.4454.5675.8763.4263.9342.3314.3894.8033.3533.274
  2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302016-03-312015-12-312015-09-302015-06-302015-03-312014-12-312014-09-302014-06-302014-03-312013-12-312013-09-302013-06-302013-03-312012-12-312012-09-302012-06-302012-03-312011-12-312011-09-302011-06-302011-03-312010-12-312010-09-302010-06-302010-03-31
us-gaap:NetCashProvidedByUsedInFinancingActivities ▂▂▂▂▂▁▂▂▂█▂▁▂▂▂▁-17.0-23.5-6.2-17.1-16.7-81.5-13.857-64.618-63.979618.632-10.514-92.62-7.776-67.096-58.313-135.301NANANANANANANANANANANANANA-10.071-6.407-8.534-11.046-11.162-14.791-10.445-9.307-12.427-6.491-5.983-6.60221.467-3.813-3.5958.157-5.776
us-gaap:RepaymentsOfLongTermDebt NA2.2NANANA52.32.24752.244NANA0.0010.0020.050.050.0125.01.57151.5741.5761.825NANANANANANANANANANANANANANANANANANANANANANANANANANA
us-gaap:PaymentsOfDividendsCommonStock ▃▃▃▃▃▃▃▃▅▃██▄▃▇▆▄▃▇▅▄▂▂▅▄▂▂▂▂▂▂▂▂▂▂▂▂▂▂▂▂▂▁12.211.111.011.011.011.010.90710.89821.72310.84342.40542.40520.759.80838.17828.40318.9039.41936.36127.24918.1419.0569.04126.92817.8688.7848.778.7558.7738.5538.5178.5078.5038.4488.4258.4557.9297.8777.8757.877.8657.7630.0NANANA
  2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302016-03-312015-12-312015-09-302015-06-302015-03-312014-12-312014-09-302014-06-302014-03-312013-12-312013-09-302013-06-302013-03-312012-12-312012-09-302012-06-302012-03-312011-12-312011-09-302011-06-302011-03-312010-12-312010-09-302010-06-302010-03-31

Common Stock Value

us-gaap:CommonStockValue

us-gaap:CommonStockValue


Common
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302016-03-312015-12-312015-09-302015-06-302015-03-312014-12-312014-09-302014-06-302014-03-312013-12-312013-09-302013-06-302013-03-312012-12-312012-09-302012-06-302012-03-312011-12-312011-09-302011-06-302011-03-312010-12-312009-12-31
Value100000.0100000.0100000.0100000.0100000.0100000.0113000.0113000.0113000.0113000.0113000.0113000.0113000.0113000.0113000.0113000.0113000.0113000.0113000.0113000.0113000.0113000.0113000.0113000.0113000.0113000.0113000.0113000.0113000.0113000.0113000.0113000.0113000.0113000.0113000.0113000.0113000.0113000.0113000.0113000.0113000.0113000.0113000.0113000.0
Percentage of CommonStockValue100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0
Percentage of Assets0.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.0

Weighted Average Number Of Diluted Shares Outstanding

us-gaap:WeightedAverageNumberOfDilutedSharesOutstanding

us-gaap:WeightedAverageNumberOfDilutedSharesOutstanding


Weighted
Period End2021-06-302021-03-312020-09-302020-06-302020-03-312019-09-302019-06-302019-03-312018-09-302018-06-302018-03-312017-09-302017-06-302017-03-312016-09-302016-06-302016-03-312015-09-302015-06-302015-03-312014-09-302014-06-302014-03-312013-09-302013-06-302013-03-312012-09-302012-06-302012-03-312011-09-302011-06-302011-03-312010-09-302010-06-302010-03-31
Value5555555555555554545555555554545353535353535353535353535353525252505050
Percentage of WeightedAverageNumberOfDilutedSharesOutstanding100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0

Weighted Average Number Of Shares Outstanding Basic

us-gaap:WeightedAverageNumberOfSharesOutstandingBasic

us-gaap:WeightedAverageNumberOfSharesOutstandingBasic


Weighted
Period End2021-06-302021-03-312020-09-302020-06-302020-03-312019-09-302019-06-302019-03-312018-09-302018-06-302018-03-312017-09-302017-06-302017-03-312016-09-302016-06-302016-03-312015-09-302015-06-302015-03-312014-09-302014-06-302014-03-312013-09-302013-06-302013-03-312012-09-302012-06-302012-03-312011-09-302011-06-302011-03-312010-09-302010-06-302010-03-31
Value5555555554545454545454545453535353535353535353535352525252525251505049
Percentage of WeightedAverageNumberOfSharesOutstandingBasic100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0

Antidilutive Securities Excluded From Computation Of Earnings Per Share Amount

us-gaap:AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount us-gaap:AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecurities

us-gaap:AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount

us-gaap:RestrictedStockUnitsRSU


Antidilutive
Period End2020-09-302020-06-302020-03-312019-09-302019-06-302019-03-312018-09-302018-06-302018-03-312017-09-302017-06-302017-03-312016-09-302016-06-302016-03-31
Value2600.060500.036100.0204000.0206000.0128200.0159800.099000.0380.0200.0800.00529000.01000.00
Percentage of AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.00.0100.0100.00.0

Earnings Per Share Basic

us-gaap:EarningsPerShareBasic

us-gaap:EarningsPerShareBasic


Earnings
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302016-03-312015-12-312015-09-302015-06-302015-03-312014-12-312014-09-302014-06-302014-03-312013-12-312013-09-302013-06-302013-03-312012-12-312012-09-302012-06-302012-03-312011-12-312011-09-302011-06-302011-03-312010-12-312010-09-302010-06-302010-03-31
Value2.642.212.11.661.341.260.780.860.690.231.331.712.251.931.431.42.221.210.850.610.170.330.480.560.620.630.640.550.40.580.380.050.140.110.080.050.350.430.430.580.740.740.720.770.770.59
Percentage of EarningsPerShareBasic100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0

Earnings Per Share Diluted

us-gaap:EarningsPerShareDiluted

us-gaap:EarningsPerShareDiluted


Earnings
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302016-03-312015-12-312015-09-302015-06-302015-03-312014-12-312014-09-302014-06-302014-03-312013-12-312013-09-302013-06-302013-03-312012-12-312012-09-302012-06-302012-03-312011-12-312011-09-302011-06-302011-03-312010-12-312010-09-302010-06-302010-03-31
Value2.632.22.081.661.331.250.770.860.690.231.321.72.221.91.411.382.191.180.830.60.170.330.480.560.620.630.640.550.40.580.380.050.140.110.080.050.350.430.430.570.730.730.70.760.760.58
Percentage of EarningsPerShareDiluted100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0

Allocated Share Based Compensation Expense

us-gaap:AllocatedShareBasedCompensationExpense

us-gaap:AllocatedShareBasedCompensationExpense


Allocated
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302016-03-312015-12-312015-09-302015-06-30
Value8.810.06.87.46.88.57.0547.3736.929275.2575.2136.366104.5444.8456.2078.7825.4025.158104.1522.9883.2473.566
Percentage of AllocatedShareBasedCompensationExpense100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0
Percentage of RevenueFromContractWithCustomerExcludingAssessedTax1.21.41.01.31.21.61.41.61.56.01.11.11.10.00.91.01.30.01.31.43.22.31.71.61.6

us-gaap:AllocatedShareBasedCompensationExpense us-gaap:IncomeStatementLocation

mksi:AcquisitionAndIntegrationCost


Allocated
Period End2020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-31
Value0.20.10.10.50.91.21.018
Percentage of AllocatedShareBasedCompensationExpense2.91.41.55.912.816.314.466.8
Percentage of RevenueFromContractWithCustomerExcludingAssessedTax0.00.00.00.10.20.30.24.0
Percentage of RevenueFromContractWithCustomerExcludingAssessedTax mksi:AcquisitionAndIntegrationCost0.00.00.00.00.00.00.00.0

us-gaap:CostOfSales


Allocated
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302016-03-312015-12-312015-09-302015-06-30
Value0.81.01.11.20.91.00.9130.8180.6360.4220.8520.171.4891.0050.7611.0161.1870.931.0010.6660.890.440.3250.4320.578
Percentage of AllocatedShareBasedCompensationExpense9.110.016.216.213.211.812.911.19.21.516.23.323.49.616.721.019.110.618.512.98.510.610.913.316.2
Percentage of RevenueFromContractWithCustomerExcludingAssessedTax0.10.10.20.20.20.20.20.20.10.10.20.00.30.00.10.20.20.00.20.20.30.20.20.20.3
Percentage of RevenueFromContractWithCustomerExcludingAssessedTax us-gaap:CostOfSales0.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.0

us-gaap:ResearchAndDevelopmentExpense


Allocated
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302016-03-312015-12-312015-09-302015-06-30
Value1.11.11.01.00.91.11.0050.9711.0610.810.5010.7080.8190.7220.5320.7120.8270.7450.9150.5510.6890.3740.3350.4050.428
Percentage of AllocatedShareBasedCompensationExpense12.511.014.713.513.212.914.213.215.32.99.513.612.96.911.714.713.38.516.910.76.69.011.212.512.0
Percentage of RevenueFromContractWithCustomerExcludingAssessedTax0.10.20.20.20.20.20.20.20.20.20.10.10.10.00.10.10.20.00.20.10.20.20.20.20.2
Percentage of RevenueFromContractWithCustomerExcludingAssessedTax us-gaap:ResearchAndDevelopmentExpense0.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.0

us-gaap:SellingGeneralAndAdministrativeExpenses


Allocated
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302016-03-312015-12-312015-09-302015-06-30
Value6.97.94.55.14.95.94.2044.0094.2068.0383.9044.3354.0588.6993.2513.1174.1937.1073.4863.9418.9373.3382.3282.412.56
Percentage of AllocatedShareBasedCompensationExpense78.479.066.268.972.169.459.654.460.728.974.383.263.783.471.564.367.680.964.576.485.080.477.974.271.8
Percentage of RevenueFromContractWithCustomerExcludingAssessedTax0.91.10.70.90.91.10.80.90.91.70.80.90.70.00.60.60.90.00.91.02.71.81.41.21.2
Percentage of RevenueFromContractWithCustomerExcludingAssessedTax us-gaap:SellingGeneralAndAdministrativeExpenses0.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.0

Comprehensive Income Net Of Tax

us-gaap:ComprehensiveIncomeNetOfTax

us-gaap:ComprehensiveIncomeNetOfTax


Comprehensive
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302016-03-312015-12-312015-09-302015-06-302015-03-312014-12-312014-09-302014-06-302014-03-312013-12-312013-09-302013-06-302013-03-312012-12-312012-09-302012-06-302012-03-312011-12-312011-09-302011-06-302011-03-312010-12-312010-09-302010-06-30
Value15111413310878525232378.188659011111583831386728370.073192227333027202231207.2086.504-1.5844.2938.24132321274041364534
Percentage of ComprehensiveIncomeNetOfTax100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0
Percentage of RevenueFromContractWithCustomerExcludingAssessedTax20.216.520.218.414.59.710.67.07.91.814.318.519.50.016.417.328.70.07.010.00.010.413.113.015.314.113.511.112.215.19.84.34.1-1.13.25.87.712.412.814.317.917.916.520.415.8

Cost Of Goods And Services Sold

us-gaap:CostOfGoodsAndServicesSold

us-gaap:CostOfGoodsAndServicesSold


Cost
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302016-03-312015-12-312015-09-302015-06-302015-03-312014-12-312014-09-302014-06-302014-03-312013-12-312013-09-302013-06-302013-03-312012-12-312012-09-302012-06-302012-03-312011-12-312011-09-302011-06-302011-03-312010-12-312010-09-302010-06-302010-03-31
Value394371358327298296283257263265250255298291273258261231221212189105991151191161131071051161161049486818410010795106119125121122123106
Percentage of CostOfGoodsAndServicesSold100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0
Percentage of RevenueFromContractWithCustomerExcludingAssessedTax52.653.654.355.654.755.356.755.755.557.354.452.452.00.153.453.154.30.154.755.858.357.657.855.054.754.655.957.556.956.757.162.660.561.460.760.056.956.155.854.953.254.155.655.555.955.5

us-gaap:CostOfGoodsAndServicesSold us-gaap:ProductOrService

us-gaap:Product


Cost
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-30
Value344322311280258256241216226229221219266261243226230
Percentage of CostOfGoodsAndServicesSold87.386.886.985.686.686.585.284.086.086.588.585.989.589.789.087.788.3
Percentage of RevenueFromContractWithCustomerExcludingAssessedTax46.046.547.247.647.447.848.346.847.749.648.245.046.60.047.646.648.0
Percentage of RevenueFromContractWithCustomerExcludingAssessedTax us-gaap:Product52.553.30.055.454.555.50.056.056.457.80.051.552.352.60.052.854.1

us-gaap:Service


Cost
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-30
Value5049474740404241363528353130303130
Percentage of CostOfGoodsAndServicesSold12.713.213.114.413.413.514.816.014.013.511.514.110.510.311.012.311.7
Percentage of RevenueFromContractWithCustomerExcludingAssessedTax6.77.17.18.07.37.58.48.97.87.76.37.45.50.05.96.56.3
Percentage of RevenueFromContractWithCustomerExcludingAssessedTax us-gaap:Service53.655.30.056.756.153.70.054.050.754.00.059.149.752.30.055.556.0

Gross Profit

us-gaap:GrossProfit

us-gaap:GrossProfit


Gross
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302016-03-312015-12-312015-09-302015-06-302015-03-312014-12-312014-09-302014-06-302014-03-312013-12-312013-09-302013-06-302013-03-312012-12-312012-09-302012-06-302012-03-312011-12-312011-09-302011-06-302011-03-312010-12-312010-09-302010-06-302010-03-31
Value3553223012622462392162052111982092312742622382272192051831681357772949897897979898762615452567683758710410697989785
Percentage of GrossProfit100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0
Percentage of RevenueFromContractWithCustomerExcludingAssessedTax47.446.445.744.445.344.743.344.344.542.745.647.648.00.046.646.945.70.045.344.241.742.442.245.045.345.444.142.543.143.342.937.439.538.639.340.043.143.944.245.146.845.944.444.544.144.5

us-gaap:GrossProfit us-gaap:StatementBusinessSegments

mksi:EquipmentAndSolutions


Gross
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-31
Value5235302230231322237.238
Percentage of GrossProfit14.910.99.98.612.29.76.310.911.43.7
Percentage of RevenueFromContractWithCustomerExcludingAssessedTax7.05.04.53.85.54.32.74.85.11.6
Percentage of RevenueFromContractWithCustomerExcludingAssessedTax mksi:EquipmentAndSolutions53.246.00.042.847.245.50.045.242.920.6

mksi:LightAndMotionSegment


Gross
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-30
Value89828276767579798492949910310497867976686445
Percentage of GrossProfit25.325.527.229.031.131.636.639.040.346.845.142.737.839.740.938.036.337.337.238.133.1
Percentage of RevenueFromContractWithCustomerExcludingAssessedTax12.011.812.412.914.114.115.917.317.920.020.620.318.10.019.017.816.60.016.816.913.8
Percentage of RevenueFromContractWithCustomerExcludingAssessedTax mksi:LightAndMotionSegment46.645.10.043.246.145.70.046.346.547.80.049.250.70.10.048.646.70.00.042.338.0

mksi:VacuumAndAnalysisSegment


Gross
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302016-03-31
Value212205189163139140123102102981151321711581401411391281151049077
Percentage of GrossProfit59.863.662.962.456.758.857.150.248.449.554.957.362.260.359.162.063.762.762.861.966.9100.0
Percentage of RevenueFromContractWithCustomerExcludingAssessedTax28.329.528.727.725.726.324.722.221.521.225.027.329.80.027.529.129.10.028.427.427.942.4
Percentage of RevenueFromContractWithCustomerExcludingAssessedTax mksi:VacuumAndAnalysisSegment46.447.00.045.344.444.10.042.743.341.90.046.446.40.00.045.945.10.00.045.543.842.4

Income Loss From Continuing Operations Before Income Taxes Extraordinary Items Noncontrolling Interest

us-gaap:IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest

us-gaap:IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest


Income
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302016-03-312015-12-312015-09-302015-06-302015-03-312014-12-312014-09-302014-06-30
Value17214814010892815555511591114148126110101157774942122323424647382830
Percentage of IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0
Percentage of RevenueFromContractWithCustomerExcludingAssessedTax23.021.421.318.417.015.211.112.010.93.319.823.525.90.021.720.832.90.012.211.13.813.013.420.121.522.219.215.316.7

Income Tax Expense Benefit

us-gaap:IncomeTaxExpenseBenefit

us-gaap:IncomeTaxExpenseBenefit


Income
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302016-03-312015-12-312015-09-302015-06-302015-03-312014-12-312014-09-302014-06-302014-03-312013-12-312013-09-302013-06-302013-03-312012-12-312012-09-302012-06-302012-03-312011-12-312011-09-302011-06-302011-03-312010-12-312010-09-302010-06-302010-03-31
Value262524171812127.994142.88119212521332537124.0699.6993.1586.242-2.4761213134.753-0.5739.6676.76810103.318-0.7942.7514.0799.424107.56111191814181713
Percentage of IncomeTaxExpenseBenefit100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0
Percentage of RevenueFromContractWithCustomerExcludingAssessedTax3.53.73.82.93.42.32.51.73.00.64.24.44.50.06.55.27.80.01.02.51.03.4-1.45.96.26.42.3-0.35.23.35.36.12.1-0.62.12.95.35.74.45.78.58.16.68.37.77.1

Interest Expense

us-gaap:InterestExpense

us-gaap:InterestExpense


Interest
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302016-03-312015-12-312015-09-302015-06-302015-03-312014-12-312014-09-302014-06-302014-03-312013-12-312013-09-302013-06-302013-03-312012-12-312012-09-302012-06-302012-03-312011-12-312011-09-302011-06-302011-03-312010-12-312010-09-302010-06-302010-03-31
Value6.46.46.46.67.28.98.813129.1193.8713.7193.9225.437.9897.1726.9978.83210128.4740.0440.0110.0570.0380.0370.0370.0050.0120.0170.0350.0130.0230.0140.0540.0320.0510.0090.0150.0120.00.0050.0510.0320.030.022
Percentage of InterestExpense100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.00.0100.0100.0100.0100.0100.0
Percentage of RevenueFromContractWithCustomerExcludingAssessedTax0.90.91.01.11.31.71.82.92.72.00.80.80.70.01.61.51.50.02.53.22.60.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.0

Interest Expense Long Term Debt

us-gaap:InterestExpenseLongTermDebt

us-gaap:InterestExpenseLongTermDebt


Interest
Period End2021-06-302021-03-312020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302016-12-312016-09-30
Value6.46.47.28.98.813129.1193.8713.7193.9225.437.9897.1721012
Percentage of InterestExpenseLongTermDebt100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0
Percentage of RevenueFromContractWithCustomerExcludingAssessedTax0.90.91.31.71.82.92.72.00.80.80.70.01.61.52.53.2

Net Income Loss

us-gaap:NetIncomeLoss

us-gaap:NetIncomeLoss


Net
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302016-03-312015-12-312015-09-302015-06-302015-03-312014-12-312014-09-302014-06-302014-03-312013-12-312013-09-302013-06-302013-03-312012-12-312012-09-302012-06-302012-03-312011-12-312011-09-302011-06-302011-03-312010-12-312010-09-302010-06-302010-03-31
Value14612211591736942473712719312210577751206545329.21172529333334292131202.4587.325.7614.1092.5818222230383835383829
Percentage of NetIncomeLoss100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0
Percentage of RevenueFromContractWithCustomerExcludingAssessedTax19.517.617.515.513.512.98.610.38.02.715.619.121.40.015.215.625.10.011.28.62.89.614.814.215.215.816.815.611.515.19.91.54.74.13.11.810.511.913.215.617.216.416.417.517.615.2

us-gaap:NetIncomeLoss us-gaap:StatementEquityComponents

us-gaap:RetainedEarnings


Net
Period End2021-06-302021-03-312020-09-302020-06-302020-03-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-31
Value1461229173694737127193122105
Percentage of NetIncomeLoss100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0
Percentage of RevenueFromContractWithCustomerExcludingAssessedTax19.517.615.513.512.910.38.02.715.619.121.40.0
Percentage of RevenueFromContractWithCustomerExcludingAssessedTax us-gaap:RetainedEarnings0.00.00.00.00.00.00.00.00.00.00.00.0

Nonoperating Income Expense

us-gaap:NonoperatingIncomeExpense

us-gaap:NonoperatingIncomeExpense


Nonoperating
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302016-03-312015-09-302015-06-30
Value-7.5-1.121-7.6-8.4-0.4-27.83411127.738.231-2.5292.747-4.89718-8.784-9.767-6.29515-10.76-6.8181.2460.7210.79
Percentage of NonoperatingIncomeExpense100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0
Percentage of RevenueFromContractWithCustomerExcludingAssessedTax-1.0-0.23.3-1.3-1.5-0.1-5.62.52.51.71.8-0.50.5-0.03.7-1.8-2.0-0.03.7-2.8-2.10.70.30.4

Operating Income Loss

us-gaap:OperatingIncomeLoss

us-gaap:OperatingIncomeLoss


Operating
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302016-03-312015-12-312015-09-302015-06-302015-03-312014-12-312014-09-302014-06-302014-03-312013-12-312013-09-302013-06-302013-03-312012-12-312012-09-302012-06-302012-03-312011-12-312011-09-302011-06-302011-03-312010-12-312010-09-302010-06-302010-03-31
Value18615514611610089666663239411715113112011092836253192222414647382830373012104.6766.6156.39227333041575648544942
Percentage of OperatingIncomeLoss100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0
Percentage of RevenueFromContractWithCustomerExcludingAssessedTax24.822.422.219.718.516.813.214.413.55.020.424.026.40.023.422.719.30.015.413.95.912.312.919.821.122.019.015.116.618.315.17.46.63.34.94.515.717.517.521.125.524.422.124.822.622.0

Other Nonoperating Income Expense

us-gaap:OtherNonoperatingIncomeExpense

us-gaap:OtherNonoperatingIncomeExpense


Other
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302015-06-302014-06-30
Value-7500000.0-1100000.0-100000.0-1100000.0-1500000.0-400000.0-3134000.0914000.0-788000.0-325000.0-763000.0-326000.0-281000.0-572000.0-2155000.0-2485000.0-3277000.02021000.0-3575000.0843000.01126000.0790000.0231000.0
Percentage of OtherNonoperatingIncomeExpense100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0
Percentage of RevenueFromContractWithCustomerExcludingAssessedTax-1.0-0.2-0.0-0.2-0.3-0.1-0.60.2-0.2-0.1-0.2-0.1-0.0-0.0-0.4-0.5-0.70.0-0.90.20.30.40.1

Profit Loss

us-gaap:ProfitLoss

us-gaap:ProfitLoss


Profit
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302012-09-302012-06-302011-09-302011-06-30
Value1461221159173694247371271931221057775567687104
Percentage of ProfitLoss100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0
Percentage of RevenueFromContractWithCustomerExcludingAssessedTax19.517.617.515.513.512.98.610.38.02.715.619.121.40.015.215.640.043.145.146.8

Research And Development Expense

us-gaap:ResearchAndDevelopmentExpense

us-gaap:ResearchAndDevelopmentExpense


Research
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302016-03-312015-12-312015-09-302015-06-302015-03-312014-12-312014-09-302014-06-302014-03-312013-12-312013-09-302013-06-302013-03-312012-12-312012-09-302012-06-302012-03-312011-12-312011-09-302011-06-302011-03-312010-12-312010-09-302010-06-302010-03-31
Value50474542424241414138323136343332333332322817161717161615151516151615141415161414151615151615
Percentage of ResearchAndDevelopmentExpense100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0
Percentage of RevenueFromContractWithCustomerExcludingAssessedTax6.76.86.97.27.97.98.39.08.88.47.06.56.40.06.56.77.00.08.18.58.79.49.88.28.17.87.98.58.37.68.09.210.710.810.610.08.88.58.37.46.97.37.26.87.38.2

Revenue From Contract With Customer Excluding Assessed Tax

us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax

us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax


Revenue
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302016-03-312015-12-312015-09-302015-06-302015-03-312014-12-312014-09-302014-06-302014-03-312013-12-312013-09-302013-06-302013-03-312012-12-312012-09-302012-06-302012-03-312011-12-312011-09-302011-06-302011-03-312010-12-312010-09-302010-06-302010-03-31
Value749693660589544535499462474463460487573554275511486480437153405380325183172209217213203186184206204166156141133141177190171194224231218221220192
Percentage of RevenueFromContractWithCustomerExcludingAssessedTax100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0
Percentage of RevenueFromContractWithCustomerExcludingAssessedTax100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0

us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax us-gaap:ProductOrService

us-gaap:Product


Revenue
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-30
Value656605573506473461426386401397402426509496458428426
Percentage of RevenueFromContractWithCustomerExcludingAssessedTax87.687.286.985.986.986.185.383.584.685.787.387.589.00.189.588.288.7
Percentage of RevenueFromContractWithCustomerExcludingAssessedTax87.687.286.985.986.986.185.383.584.685.787.387.589.00.189.588.288.7
Percentage of RevenueFromContractWithCustomerExcludingAssessedTax us-gaap:Product100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0

us-gaap:Service


Revenue
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-30
Value9388868371747376726658606357535754
Percentage of RevenueFromContractWithCustomerExcludingAssessedTax12.412.813.114.113.113.914.716.515.414.312.712.511.00.010.511.811.3
Percentage of RevenueFromContractWithCustomerExcludingAssessedTax12.412.813.114.113.113.914.716.515.414.312.712.511.00.010.511.811.3
Percentage of RevenueFromContractWithCustomerExcludingAssessedTax us-gaap:Service100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0

us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax us-gaap:ProductOrService, us-gaap:StatementBusinessSegments

us-gaap:Product, mksi:EquipmentAndSolutions


Revenue
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-31
Value82605036483527324226
Percentage of RevenueFromContractWithCustomerExcludingAssessedTax11.08.87.66.19.06.65.67.08.95.6
Percentage of RevenueFromContractWithCustomerExcludingAssessedTax11.08.87.66.19.06.65.67.08.95.6
Percentage of RevenueFromContractWithCustomerExcludingAssessedTax us-gaap:Product mksi:EquipmentAndSolutions100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0

us-gaap:Product, mksi:LightAndMotionSegment


Revenue
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-30
Value175165164156150149161156167178187186188192186163156
Percentage of RevenueFromContractWithCustomerExcludingAssessedTax23.423.824.926.627.727.932.333.835.338.540.738.232.90.036.533.732.6
Percentage of RevenueFromContractWithCustomerExcludingAssessedTax23.423.824.926.627.727.932.333.835.338.540.738.232.90.036.533.732.6
Percentage of RevenueFromContractWithCustomerExcludingAssessedTax us-gaap:Product mksi:LightAndMotionSegment100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0

us-gaap:Product, mksi:VacuumAndAnalysisSegment


Revenue
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-30
Value398379358313273276237197191192214239321304271265269
Percentage of RevenueFromContractWithCustomerExcludingAssessedTax53.254.654.453.250.251.647.542.640.441.646.649.356.10.153.054.556.1
Percentage of RevenueFromContractWithCustomerExcludingAssessedTax53.254.654.453.250.251.647.542.640.441.646.649.356.10.153.054.556.1
Percentage of RevenueFromContractWithCustomerExcludingAssessedTax us-gaap:Product mksi:VacuumAndAnalysisSegment100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0

us-gaap:Service, mksi:EquipmentAndSolutions


Revenue
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-31
Value1715161614151516139.2
Percentage of RevenueFromContractWithCustomerExcludingAssessedTax2.32.22.52.82.72.93.13.62.92.0
Percentage of RevenueFromContractWithCustomerExcludingAssessedTax2.32.22.52.82.72.93.13.62.92.0
Percentage of RevenueFromContractWithCustomerExcludingAssessedTax us-gaap:Service mksi:EquipmentAndSolutions100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0

us-gaap:Service, mksi:LightAndMotionSegment


Revenue
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-30
Value1717171915151516151514141613131414
Percentage of RevenueFromContractWithCustomerExcludingAssessedTax2.32.42.73.22.82.93.13.53.23.33.23.02.80.02.72.92.9
Percentage of RevenueFromContractWithCustomerExcludingAssessedTax2.32.42.73.22.82.93.13.53.23.33.23.02.80.02.72.92.9
Percentage of RevenueFromContractWithCustomerExcludingAssessedTax us-gaap:Service mksi:LightAndMotionSegment100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0

us-gaap:Service, mksi:VacuumAndAnalysisSegment


Revenue
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-30
Value5956514741434243434143464644394340
Percentage of RevenueFromContractWithCustomerExcludingAssessedTax7.98.27.98.07.68.08.59.49.39.09.59.58.20.07.88.98.4
Percentage of RevenueFromContractWithCustomerExcludingAssessedTax7.98.27.98.07.68.08.59.49.39.09.59.58.20.07.88.98.4
Percentage of RevenueFromContractWithCustomerExcludingAssessedTax us-gaap:Service mksi:VacuumAndAnalysisSegment100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0

us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax us-gaap:StatementBusinessSegments

mksi:EquipmentAndSolutions


Revenue
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-31
Value99766752635143495535
Percentage of RevenueFromContractWithCustomerExcludingAssessedTax13.211.010.28.911.79.58.710.711.87.6
Percentage of RevenueFromContractWithCustomerExcludingAssessedTax13.211.010.28.911.79.58.710.711.87.6
Percentage of RevenueFromContractWithCustomerExcludingAssessedTax mksi:EquipmentAndSolutions100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0

mksi:LightAndMotionSegment


Revenue
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-30
Value192182182175166165176172182193202201204205931200177170159169153151118
Percentage of RevenueFromContractWithCustomerExcludingAssessedTax25.726.227.629.830.530.935.337.338.541.843.941.335.737.239.236.635.536.437.839.836.4
Percentage of RevenueFromContractWithCustomerExcludingAssessedTax25.726.227.629.830.530.935.337.338.541.843.941.335.737.239.236.635.536.437.839.836.4
Percentage of RevenueFromContractWithCustomerExcludingAssessedTax mksi:LightAndMotionSegment100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0

mksi:VacuumAndAnalysisSegment


Revenue
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302016-03-31
Value457435410361314319279240235234258286368348344311308309277984252229207183
Percentage of RevenueFromContractWithCustomerExcludingAssessedTax61.062.862.261.357.859.656.052.049.750.656.158.764.362.860.863.464.563.662.260.263.6100.0
Percentage of RevenueFromContractWithCustomerExcludingAssessedTax61.062.862.261.357.859.656.052.049.750.656.158.764.362.860.863.464.563.662.260.263.6100.0
Percentage of RevenueFromContractWithCustomerExcludingAssessedTax mksi:VacuumAndAnalysisSegment100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0

us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax us-gaap:StatementGeographical

country:CN


Revenue
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-30
Value101818167754938465637293532
Percentage of RevenueFromContractWithCustomerExcludingAssessedTax13.611.712.311.513.89.37.610.111.88.26.37.35.6
Percentage of RevenueFromContractWithCustomerExcludingAssessedTax13.611.712.311.513.89.37.610.111.88.26.37.35.6
Percentage of RevenueFromContractWithCustomerExcludingAssessedTax country:CN100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0

country:DE


Revenue
Period End2020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-31
Value29303438363738
Percentage of RevenueFromContractWithCustomerExcludingAssessedTax5.05.66.47.77.97.98.2
Percentage of RevenueFromContractWithCustomerExcludingAssessedTax5.05.66.47.77.97.98.2
Percentage of RevenueFromContractWithCustomerExcludingAssessedTax country:DE100.0100.0100.0100.0100.0100.0100.0

country:IL


Revenue
Period End2020-09-302019-09-30
Value3426
Percentage of RevenueFromContractWithCustomerExcludingAssessedTax5.85.7
Percentage of RevenueFromContractWithCustomerExcludingAssessedTax5.85.7
Percentage of RevenueFromContractWithCustomerExcludingAssessedTax country:IL100.0100.0

country:JP


Revenue
Period End2021-06-302021-03-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302016-03-312015-12-312015-09-302015-06-302015-03-312014-12-312014-09-302014-06-302014-03-312013-12-312013-09-302013-06-302013-03-312012-12-312012-09-302012-06-302012-03-312011-12-312011-09-302011-06-302011-03-312010-12-312010-09-30
Value46483937393732304241385458543836372826251613141717141414161613121314141933252827242729
Percentage of RevenueFromContractWithCustomerExcludingAssessedTax6.26.96.86.97.47.57.06.59.19.18.09.40.010.67.97.70.07.07.17.88.88.17.07.88.17.47.97.88.28.28.38.09.811.010.110.917.514.714.712.310.612.713.3
Percentage of RevenueFromContractWithCustomerExcludingAssessedTax6.26.96.86.97.47.57.06.59.19.18.09.40.010.67.97.70.07.07.17.88.88.17.07.88.17.47.97.88.28.28.38.09.811.010.110.917.514.714.712.310.612.713.3
Percentage of RevenueFromContractWithCustomerExcludingAssessedTax country:JP100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0

country:KR


Revenue
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302016-03-312015-12-312015-09-302015-06-302015-03-312014-12-312014-09-302014-06-302014-03-312013-12-312013-09-302013-06-302013-03-312012-12-312012-09-302012-06-30
Value104977265657651413835394366544760594433322620192727322620172728161613101218
Percentage of RevenueFromContractWithCustomerExcludingAssessedTax13.914.110.911.211.914.210.38.98.27.78.58.911.70.09.212.512.40.08.28.68.011.211.413.312.515.013.111.09.313.414.19.910.59.57.58.910.5
Percentage of RevenueFromContractWithCustomerExcludingAssessedTax13.914.110.911.211.914.210.38.98.27.78.58.911.70.09.212.512.40.08.28.68.011.211.413.312.515.013.111.09.313.414.19.910.59.57.58.910.5
Percentage of RevenueFromContractWithCustomerExcludingAssessedTax country:KR100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0

country:TW


Revenue
Period End2021-06-302021-03-312020-06-302020-03-31
Value61592025
Percentage of RevenueFromContractWithCustomerExcludingAssessedTax8.28.63.74.7
Percentage of RevenueFromContractWithCustomerExcludingAssessedTax8.28.63.74.7
Percentage of RevenueFromContractWithCustomerExcludingAssessedTax country:TW100.0100.0100.0100.0

country:US


Revenue
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302016-03-312015-12-312015-09-302015-06-302015-03-312014-12-312014-09-302014-06-302014-03-312013-12-312013-09-302013-06-302013-03-312012-12-312012-09-302012-06-302012-03-312011-12-312011-09-302011-06-302011-03-312010-12-312010-09-30
Value2912823012812452312352112172242202432812762542372442182141981689492122123120115107107117111918674667391958089110110117125
Percentage of RevenueFromContractWithCustomerExcludingAssessedTax38.940.845.647.745.043.247.145.745.948.448.049.949.20.049.848.950.90.053.052.151.751.353.658.456.656.256.957.658.456.954.454.855.352.650.052.251.349.847.145.949.247.753.656.9
Percentage of RevenueFromContractWithCustomerExcludingAssessedTax38.940.845.647.745.043.247.145.745.948.448.049.949.20.049.848.950.90.053.052.151.751.353.658.456.656.256.957.658.456.954.454.855.352.650.052.251.349.847.145.949.247.753.656.9
Percentage of RevenueFromContractWithCustomerExcludingAssessedTax country:US100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0

mksi:OtherAsia


Revenue
Period End2021-06-302021-03-312020-06-302020-03-31
Value84705758
Percentage of RevenueFromContractWithCustomerExcludingAssessedTax11.210.110.511.0
Percentage of RevenueFromContractWithCustomerExcludingAssessedTax11.210.110.511.0
Percentage of RevenueFromContractWithCustomerExcludingAssessedTax mksi:OtherAsia100.0100.0100.0100.0

mksi:OtherCountries


Revenue
Period End2020-09-302020-06-302020-03-312019-09-302019-06-302019-03-31
Value7191104689385
Percentage of RevenueFromContractWithCustomerExcludingAssessedTax12.116.819.414.719.718.4
Percentage of RevenueFromContractWithCustomerExcludingAssessedTax12.116.819.414.719.718.4
Percentage of RevenueFromContractWithCustomerExcludingAssessedTax mksi:OtherCountries100.0100.0100.0100.0100.0100.0

srt:Europe


Revenue
Period End2021-06-302021-03-312020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-30
Value6054445457535859605610763585591
Percentage of RevenueFromContractWithCustomerExcludingAssessedTax8.17.88.210.111.511.612.312.913.211.518.70.011.511.419.1
Percentage of RevenueFromContractWithCustomerExcludingAssessedTax8.17.88.210.111.511.612.312.913.211.518.70.011.511.419.1
Percentage of RevenueFromContractWithCustomerExcludingAssessedTax srt:Europe100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0

Selling General And Administrative Expense

us-gaap:SellingGeneralAndAdministrativeExpense

us-gaap:SellingGeneralAndAdministrativeExpense


Selling
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302016-03-312015-12-312015-09-302015-06-302015-03-312014-12-312014-09-302014-06-302014-03-312013-12-312013-09-302013-06-302013-03-312012-12-312012-09-302012-06-302012-03-312011-12-312011-09-302011-06-302011-03-312010-12-312010-09-302010-06-302010-03-31
Value97959287868782828382687076827271717453707133313333303232323439333434302932343131313232283027
Percentage of SellingGeneralAndAdministrativeExpense100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0
Percentage of RevenueFromContractWithCustomerExcludingAssessedTax13.013.814.114.815.816.316.517.817.617.814.814.513.40.014.214.815.00.013.218.521.918.518.316.015.314.416.117.317.516.819.519.922.224.123.121.018.617.918.316.414.214.115.012.814.014.5

Assets

us-gaap:Assets

us-gaap:Assets


Assets
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302016-03-312015-12-312015-09-302015-06-302015-03-312014-12-312014-09-302014-06-302014-03-312013-12-312013-09-302013-06-302013-03-312012-12-312012-09-302012-06-302012-03-312011-12-312011-09-302011-06-302011-03-312010-12-312009-12-31
Value420840173903375036313474341633543381341226142564257324812414237023842220221222412245129012731293128012491224121711971222121311711130112511341142113411271118108710801049982774
Percentage of Assets100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0
Percentage of Assets100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0

us-gaap:Assets us-gaap:ConsolidationItems

us-gaap:MaterialReconcilingItems


Assetsus-gaap:
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-31
Value4208401739033750363134743416
Percentage of Assets100.0100.0100.0100.0100.0100.0100.0
Percentage of Assets100.0100.0100.0100.0100.0100.0100.0
Percentage of Assets us-gaap:MaterialReconcilingItems100.0100.0100.0100.0100.0100.0100.0

Liabilities

us-gaap:Liabilities

us-gaap:Liabilities


Liabilities
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302015-12-31
Value159415481542152415041422139213811436149174175477278382586295491597010261063112
Percentage of Liabilities100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0
Percentage of Assets37.938.539.540.641.440.940.841.242.543.728.329.430.031.634.236.440.041.243.945.847.48.8

Liabilities And Stockholders Equity

us-gaap:LiabilitiesAndStockholdersEquity

us-gaap:LiabilitiesAndStockholdersEquity


Liabilities
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302016-03-312015-12-312015-09-302015-06-302015-03-312014-12-312014-09-302014-06-302014-03-312013-12-312013-09-302013-06-302013-03-312012-12-312012-09-302012-06-302012-03-312011-12-312011-09-302011-06-302011-03-312010-12-312009-12-31
Value420840173903375036313474341633543381341226142564257324812414237023842220221222412245129012731293128012491224121711971222121311711130112511341142113411271118108710801049982774
Percentage of LiabilitiesAndStockholdersEquity100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0
Percentage of Assets100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0

Stockholders Equity

us-gaap:StockholdersEquity

us-gaap:StockholdersEquity


Stockholders
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302016-03-312015-12-312015-09-302015-06-302015-03-312014-12-312014-09-302014-06-302014-03-312013-12-312013-09-302013-06-302013-03-312012-12-312012-09-302012-06-302012-03-312011-12-312011-09-302011-06-302011-03-312010-12-312009-12-312008-12-312007-12-31
Value26142469236022262126205220231973194519201873181018011698158815071429130512411215118111711160114611291104108110581043104510211005100410031012101510141006990972948911847684886954
Percentage of StockholdersEquity100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0
Percentage of Assets62.161.560.559.458.659.159.258.857.556.371.770.670.068.465.863.660.058.856.154.252.690.791.288.788.288.488.487.087.185.584.285.888.889.189.288.989.489.288.589.487.886.986.288.50.00.0

us-gaap:StockholdersEquity us-gaap:StatementEquityComponents

us-gaap:AdditionalPaidInCapital


Stockholders
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312016-12-312015-12-312014-12-312013-12-312012-12-312011-12-312010-12-312009-12-312008-12-312007-12-31
Value884877873861858852864856849844793786793791789777744734730718707663645637685
Percentage of StockholdersEquity33.835.637.038.740.441.542.743.443.744.042.443.444.046.649.762.664.267.971.570.971.578.494.271.971.9
Percentage of Assets21.021.822.423.023.624.525.325.525.124.730.430.730.831.932.735.158.560.060.263.363.267.683.40.00.0
Percentage of Assets us-gaap:AdditionalPaidInCapital0.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.0

us-gaap:AociIncludingPortionAttributableToNoncontrollingInterest


Stockholders
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312016-12-312015-12-31
Value-2.4-7.50.3-17.6-34.2-39.3-22.29-32.476-17.247-9.922-5.6550.0833.243143.452-30.547-11.171
Percentage of StockholdersEquity-0.1-0.30.0-0.8-1.6-1.9-1.1-1.6-0.9-0.5-0.30.00.20.80.2-2.5-1.0
Percentage of Assets-0.1-0.20.0-0.5-0.9-1.1-0.7-1.0-0.5-0.3-0.20.00.10.60.1-1.4-0.9
Percentage of Assets us-gaap:AociIncludingPortionAttributableToNoncontrollingInterest0.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.0

us-gaap:CommonStock


Stockholders
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312016-12-312015-12-312014-12-312013-12-312012-12-312011-12-312010-12-312009-12-312008-12-312007-12-31
Value0.10.10.10.10.10.10.1130.1130.1130.1130.1130.1130.1130.1130.1130.1130.1130.1130.1130.1130.1130.1130.1130.1130.113
Percentage of StockholdersEquity0.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.0
Percentage of Assets0.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.0
Percentage of Assets us-gaap:CommonStock0.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.0

us-gaap:RetainedEarnings


Stockholders
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312016-12-312015-12-312014-12-312013-12-312012-12-312011-12-312010-12-312009-12-312008-12-312007-12-31
Value173215981487138213021239118111491113108610841023100489279549442734927827826817128241255
Percentage of StockholdersEquity66.364.763.062.161.260.458.458.257.256.657.956.655.852.650.139.836.832.327.327.527.220.24.227.226.8
Percentage of Assets41.239.838.136.935.935.734.634.332.931.841.539.939.036.033.022.433.628.523.024.524.017.43.70.00.0
Percentage of Assets us-gaap:RetainedEarnings0.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.0

Assets Current

us-gaap:AssetsCurrent

us-gaap:AssetsCurrent


Assets
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302016-03-312015-12-312015-09-302015-06-302015-03-312014-12-312014-09-302014-06-302014-03-312013-12-312013-09-302013-06-302013-03-312012-12-312012-09-302012-06-302012-03-312011-12-312011-09-302011-06-302011-03-312010-12-312009-12-31
Value21211922180416691569145614331360137013601464141214171308123611951202102199810021001959939719687675738736763895879893861858868852891884884850849823752532
Percentage of AssetsCurrent100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0
Percentage of Assets50.447.846.244.543.241.942.040.640.539.956.055.155.152.751.250.450.446.045.144.744.674.373.855.653.754.060.360.563.773.272.576.276.276.376.574.778.678.479.178.278.678.576.668.8

Cash

us-gaap:Cash

us-gaap:Cash


Cash
Period End2021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312013-03-312012-12-312012-09-302012-06-302012-03-312011-12-312011-09-302011-06-302010-12-31
Value592544423347331349169185176167177146107105107
Percentage of Cash100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0
Percentage of Assets14.814.011.39.69.510.215.116.315.414.715.713.19.99.711.0

Cash Cash Equivalents Restricted Cash And Restricted Cash Equivalents

us-gaap:CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents

us-gaap:CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents


Cash
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-06-302017-03-312016-12-312015-12-31
Value755699608493428442414386366418644399427340333428261233227
Percentage of CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0
Percentage of Assets17.917.415.613.211.812.712.111.510.812.224.615.616.613.713.818.011.810.617.9

us-gaap:CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents us-gaap:ConsolidationItems

us-gaap:MaterialReconcilingItems


Cash
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302019-12-31
Value1039909836493428414
Percentage of CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents137.6130.0137.4100.0100.0100.0
Percentage of Assets24.722.621.413.211.812.1
Percentage of Assets us-gaap:MaterialReconcilingItems24.722.621.413.211.812.1

Short Term Investments

us-gaap:ShortTermInvestments

us-gaap:ShortTermInvestments


Short
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302016-03-312015-12-312015-09-302015-06-302015-03-312014-12-312014-09-302014-06-302014-03-312013-12-312013-09-302013-06-302013-03-312012-12-312012-09-302012-06-302012-03-312011-12-312011-09-302011-06-302011-03-312010-12-312009-12-31
Value28320922722217861109889244732192032002092281491551895371308430196177158129140202306300365346331327298196223252309269219269160
Percentage of ShortTermInvestments100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0
Percentage of Assets6.75.25.85.94.91.83.22.62.71.32.88.67.98.18.79.66.27.08.62.43.223.933.815.213.912.710.611.516.925.124.831.230.729.528.926.117.319.822.628.525.021.027.420.8

us-gaap:ShortTermInvestments us-gaap:ConsolidationItems

us-gaap:MaterialReconcilingItems


Short
Period End2020-09-302020-06-302019-12-31
Value222178109
Percentage of ShortTermInvestments100.0100.0100.0
Percentage of Assets5.94.93.2
Percentage of Assets us-gaap:MaterialReconcilingItems5.94.93.2

us-gaap:ShortTermInvestments us-gaap:FairValueByFairValueHierarchyLevel, us-gaap:FairValueByMeasurementFrequency

us-gaap:FairValueInputsLevel2, us-gaap:FairValueMeasurementsRecurring


Short
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302016-03-312015-12-312015-09-302015-06-302015-03-312014-12-312014-09-302014-06-302013-12-31
Value28320922722217861109889244732192032002092281491551895371308430196177158129140202299
Percentage of ShortTermInvestments100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.099.7
Percentage of Assets6.75.25.85.94.91.83.22.62.71.32.88.67.98.18.79.66.27.08.62.43.223.933.815.213.912.710.611.516.924.7
Percentage of Assets us-gaap:FairValueInputsLevel2 us-gaap:FairValueMeasurementsRecurring0.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.0

us-gaap:ShortTermInvestments us-gaap:FairValueByMeasurementFrequency

us-gaap:FairValueMeasurementsRecurring


Short
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302016-03-312015-12-312015-09-302015-06-302015-03-312014-12-312014-09-302014-06-302013-12-31
Value28320922722217861109889244732192032002092281491551895371308430196177158129140202300
Percentage of ShortTermInvestments100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0
Percentage of Assets6.75.25.85.94.91.83.22.62.71.32.88.67.98.18.79.66.27.08.62.43.223.933.815.213.912.710.611.516.924.8
Percentage of Assets us-gaap:FairValueMeasurementsRecurring0.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.0

Accounts Receivable Net Current

us-gaap:AccountsReceivableNetCurrent

us-gaap:AccountsReceivableNetCurrent


Accounts
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302016-03-312015-12-312015-09-302015-06-302015-03-312014-12-312014-09-302014-06-302014-03-312013-12-312013-09-302013-06-302013-03-312012-12-312012-09-302012-06-302012-03-312011-12-312011-09-302011-06-302011-03-312010-12-312009-12-31
Value431420392363381381341327313335295318339341300280268267248243233113101115124124106106101119116989590828710413112012515015513894
Percentage of AccountsReceivableNetCurrent100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0
Percentage of Assets10.310.510.19.710.511.010.09.89.39.811.312.413.213.812.411.811.312.011.210.910.48.88.09.09.710.08.78.78.59.89.68.48.58.07.27.79.211.610.811.514.014.814.112.2

us-gaap:AccountsReceivableNetCurrent us-gaap:ConsolidationItems

mksi:CorporateReconcilingItemsAndEliminations


Accounts
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-31
Value-23.3-21.0-10.7-25.2-32.3-31.4-32.1-27.433-29.795-14.73-16.808-15.373-15.234-15.781-20.944-24.07-11.493-21.208-21.275
Percentage of AccountsReceivableNetCurrent-5.4-5.0-2.7-6.9-8.5-8.2-9.4-8.4-9.5-4.4-5.7-4.8-4.5-4.6-7.0-8.6-4.3-7.9-8.6
Percentage of Assets-0.6-0.5-0.3-0.7-0.9-0.9-0.9-0.8-0.9-0.4-0.6-0.6-0.6-0.6-0.9-1.0-0.5-1.0-1.0
Percentage of Assets mksi:CorporateReconcilingItemsAndEliminations0.00.00.00.00.00.0100.3100.199.599.4100.4100.3100.0100.0100.0100.0100.0100.0100.0

us-gaap:AccountsReceivableNetCurrent us-gaap:ConsolidationItems, us-gaap:StatementBusinessSegments

us-gaap:OperatingSegments, mksi:EquipmentAndSolutions


Accounts
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-31
Value66615142645740
Percentage of AccountsReceivableNetCurrent15.514.613.211.716.815.111.8
Percentage of Assets1.61.51.31.11.81.71.2
Percentage of Assets us-gaap:OperatingSegments mksi:EquipmentAndSolutions0.00.00.00.00.00.00.0

us-gaap:OperatingSegments, mksi:LightAndMotionSegment


Accounts
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-31
Value131132122143147158147140138127131119108102123121
Percentage of AccountsReceivableNetCurrent30.431.631.239.538.841.643.247.643.537.538.539.938.638.346.148.8
Percentage of Assets3.13.33.13.84.14.64.35.45.45.05.35.04.64.35.65.5
Percentage of Assets us-gaap:OperatingSegments mksi:LightAndMotionSegment0.00.00.00.00.00.00.046.545.844.846.845.945.645.851.052.3

us-gaap:OperatingSegments, mksi:VacuumAndAnalysisSegment


Accounts
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312015-12-31
Value257247229202201196185171195227225201196177165148101
Percentage of AccountsReceivableNetCurrent59.558.858.355.852.951.554.558.161.367.066.167.070.066.061.859.7100.0
Percentage of Assets6.16.25.95.45.55.65.46.67.68.89.18.38.37.47.46.78.0
Percentage of Assets us-gaap:OperatingSegments mksi:VacuumAndAnalysisSegment0.00.00.00.00.00.00.043.545.450.051.150.450.849.249.747.440.0

Inventory Net

us-gaap:InventoryNet

us-gaap:InventoryNet


Inventory
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302016-03-312015-12-312015-09-302015-06-302015-03-312014-12-312014-09-302014-06-302014-03-312013-12-312013-09-302013-06-302013-03-312012-12-312012-09-302012-06-302012-03-312011-12-312011-09-302011-06-302011-03-312010-12-312009-12-31
Value527515501494490474462463479475384399384365339319304285275278278151152168165164155153155147142136137131134145145148153161164159156118
Percentage of InventoryNet100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0
Percentage of Assets12.512.812.813.213.513.613.513.814.213.914.715.615.014.714.013.512.812.912.512.412.411.712.013.012.913.212.712.613.012.111.811.612.111.711.912.712.813.213.714.815.215.215.915.2

us-gaap:InventoryNet us-gaap:ConsolidationItems

mksi:CorporateReconcilingItemsAndEliminations


Inventory
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-30
Value-3.4-2.6-1.7-1.3-1.40.10.1050.035-0.14-0.0910.0660.041
Percentage of InventoryNet-0.6-0.5-0.3-0.3-0.30.00.00.0-0.0-0.00.00.0
Percentage of Assets-0.1-0.1-0.0-0.0-0.00.00.00.0-0.0-0.00.00.0
Percentage of Assets mksi:CorporateReconcilingItemsAndEliminations0.00.00.00.00.00.0-0.3-0.10.50.6-0.4-0.3

us-gaap:InventoryNet us-gaap:ConsolidationItems, us-gaap:StatementBusinessSegments

us-gaap:OperatingSegments, mksi:EquipmentAndSolutions


Inventory
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-31
Value63696364667273
Percentage of InventoryNet12.013.612.713.113.515.315.9
Percentage of Assets1.51.71.61.71.82.12.2
Percentage of Assets us-gaap:OperatingSegments mksi:EquipmentAndSolutions0.00.00.00.00.00.00.0

us-gaap:OperatingSegments, mksi:LightAndMotionSegment


Inventory
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-31
Value157157166169177174163161163157149141129121118110
Percentage of InventoryNet29.830.633.134.436.336.835.442.041.040.940.941.740.440.041.440.2
Percentage of Assets3.73.94.34.54.95.04.86.26.46.16.05.95.55.15.35.0
Percentage of Assets us-gaap:OperatingSegments mksi:LightAndMotionSegment0.00.00.00.00.00.00.053.554.255.253.254.154.454.249.047.7

us-gaap:OperatingSegments, mksi:VacuumAndAnalysisSegment


Inventory
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312015-12-31
Value310290273261247227224222235227216197190182167165152
Percentage of InventoryNet58.856.454.552.850.547.948.658.058.959.159.158.359.660.058.659.8100.0
Percentage of Assets7.47.27.07.06.86.56.68.59.28.88.78.28.07.77.57.512.0
Percentage of Assets us-gaap:OperatingSegments mksi:VacuumAndAnalysisSegment0.00.00.00.00.00.00.056.554.650.048.949.649.250.850.352.660.0

Other Assets Current

us-gaap:OtherAssetsCurrent

us-gaap:OtherAssetsCurrent


Other
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302016-03-312015-12-312015-09-302015-06-302015-03-312014-12-312014-09-302014-06-302014-03-312013-12-312013-09-302013-06-302013-03-312012-12-312012-09-302012-06-302012-03-312011-12-312011-09-302011-06-302011-03-312010-12-312009-12-31
Value124777495919810694808665756159536051524653572726282821272828171628383028242524342724151212
Percentage of OtherAssetsCurrent100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0
Percentage of Assets2.91.91.92.62.52.83.12.82.42.52.52.92.42.42.22.62.22.42.12.42.62.12.12.22.21.72.22.42.41.41.42.43.42.72.52.22.22.23.12.52.21.51.31.7

us-gaap:OtherAssetsCurrent us-gaap:ConsolidationItems

us-gaap:MaterialReconcilingItems


Other
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-31
Value1247774959198106948086657561595360515250
Percentage of OtherAssetsCurrent100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0110.0
Percentage of Assets2.91.91.92.62.52.83.12.82.42.52.52.92.42.42.22.62.22.42.3
Percentage of Assets us-gaap:MaterialReconcilingItems2.91.91.92.62.52.83.10.00.00.00.00.00.00.00.00.00.00.00.0

Noncurrent Assets

us-gaap:NoncurrentAssets

us-gaap:NoncurrentAssets


Noncurrent
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302016-03-312015-12-312015-09-302015-06-302015-03-312014-12-312014-09-302014-06-302014-03-312013-12-312013-09-302013-06-302013-03-312012-12-312012-09-302012-06-302012-03-312011-12-312011-09-302011-06-302010-12-31
Value520518503479453395339261261286224214207205203193193196200201209697171717374757777797980818279757574717172
Percentage of NoncurrentAssets100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0
Percentage of Assets12.412.912.912.812.511.49.97.87.78.48.68.48.18.38.48.28.18.99.19.09.35.45.65.55.65.86.16.26.56.36.66.87.17.37.37.06.76.76.76.66.67.4

us-gaap:NoncurrentAssets us-gaap:StatementGeographical

country:US


Noncurrent
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-03-312015-12-312015-09-302015-06-302015-03-312014-12-312014-09-302014-06-302014-03-312013-12-312013-09-302013-06-302013-03-312012-12-312012-09-302012-06-302012-03-312011-12-312011-09-302010-12-31
Value3803793643533312732081711711981461381321271241161161191225556565657575758586061626262595958565354
Percentage of NoncurrentAssets73.173.372.273.773.169.261.465.465.469.465.564.663.662.061.460.460.360.661.179.779.379.178.878.577.376.175.475.476.276.877.376.675.274.377.977.176.275.075.5
Percentage of Assets9.09.59.39.49.17.96.15.15.15.85.65.45.15.15.24.94.95.45.54.34.44.44.44.64.74.74.94.85.05.25.55.65.55.25.25.25.15.05.6
Percentage of Assets country:US0.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.0

srt:Asia


Noncurrent
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302017-12-31
Value102101948885848960605750494949
Percentage of NoncurrentAssets19.619.518.818.518.821.326.422.922.920.122.623.223.624.4
Percentage of Assets2.42.52.42.42.32.42.61.81.81.71.91.91.92.1
Percentage of Assets srt:Asia0.00.00.00.00.00.00.00.00.00.00.00.00.00.0

srt:Europe


Noncurrent
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302017-12-31
Value3737453737374130302926262628
Percentage of NoncurrentAssets7.27.29.07.88.29.512.211.711.710.512.012.212.814.2
Percentage of Assets0.90.91.21.01.01.11.20.90.90.91.01.01.01.2
Percentage of Assets srt:Europe0.00.00.00.00.00.00.00.00.00.00.00.00.00.0

Property Plant And Equipment Gross

us-gaap:PropertyPlantAndEquipmentGross

us-gaap:PropertyPlantAndEquipmentGross


Property
Period End2020-12-312019-12-312018-12-312017-12-312016-12-312015-12-312014-12-312013-12-312012-12-312011-12-312010-12-31
Value883835706657618284283277271254242
Percentage of PropertyPlantAndEquipmentGross100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0
Percentage of Assets22.624.527.027.227.922.323.122.924.022.824.7

us-gaap:PropertyPlantAndEquipmentGross us-gaap:PropertyPlantAndEquipmentByType

mksi:FurnitureAndFixturesOfficeEquipmentAndSoftware


Property
Period End2020-12-312019-12-312018-12-312017-12-312016-12-312015-12-312014-12-31
Value1871861491451396159
Percentage of PropertyPlantAndEquipmentGross21.222.321.122.222.621.621.2
Percentage of Assets4.85.55.76.06.34.84.9
Percentage of Assets mksi:FurnitureAndFixturesOfficeEquipmentAndSoftware0.00.00.00.00.00.00.0

us-gaap:Building


Property
Period End2020-12-312019-12-312018-12-312017-12-312016-12-312015-12-312014-12-312013-12-31
Value120113104103100686668
Percentage of PropertyPlantAndEquipmentGross13.613.614.715.816.224.223.624.7
Percentage of Assets3.13.34.04.34.55.45.55.7
Percentage of Assets us-gaap:Building0.00.00.00.00.00.00.00.0

us-gaap:ConstructionInProgress


Property
Period End2020-12-312019-12-312018-12-312017-12-312016-12-312015-12-312014-12-312013-12-31
Value704644136.5924.1713.6473.702
Percentage of PropertyPlantAndEquipmentGross8.05.66.32.11.11.51.31.3
Percentage of Assets1.81.41.70.60.30.30.30.3
Percentage of Assets us-gaap:ConstructionInProgress0.00.00.00.00.00.00.00.0

us-gaap:Land


Property
Period End2020-12-312019-12-312018-12-312017-12-312016-12-312015-12-312014-12-312013-12-31
Value12111111118.5358.659.225
Percentage of PropertyPlantAndEquipmentGross1.41.41.61.81.83.03.13.3
Percentage of Assets0.30.30.40.50.50.70.70.8
Percentage of Assets us-gaap:Land0.00.00.00.00.00.00.00.0

us-gaap:LeaseholdImprovements


Property
Period End2020-12-312019-12-312018-12-312017-12-312016-12-312015-12-312014-12-312013-12-31
Value9580666563212120
Percentage of PropertyPlantAndEquipmentGross10.89.69.49.910.37.57.57.4
Percentage of Assets2.42.42.52.72.91.71.71.7
Percentage of Assets us-gaap:LeaseholdImprovements0.00.00.00.00.00.00.00.0

us-gaap:MachineryAndEquipment


Property
Period End2020-12-312019-12-312018-12-312017-12-312016-12-312015-12-312014-12-312013-12-31
Value397396330317297119122116
Percentage of PropertyPlantAndEquipmentGross45.047.446.848.348.142.143.342.0
Percentage of Assets10.211.612.713.113.49.410.09.6
Percentage of Assets us-gaap:MachineryAndEquipment0.00.00.00.00.00.00.00.0

Accumulated Depreciation Depletion And Amortization Property Plant And Equipment

us-gaap:AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment

us-gaap:AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment


Accumulated
Period End2020-12-312019-12-312018-12-312017-12-312016-12-312015-12-312014-12-312013-12-312012-12-312011-12-312010-12-31
Value599593512485443215210200191182173
Percentage of AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0
Percentage of Assets15.317.419.620.120.016.917.216.516.916.317.7

Amortization Of Intangible Assets

us-gaap:AmortizationOfIntangibleAssets

us-gaap:AmortizationOfIntangibleAssets


Amortization
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302016-03-312015-12-312015-09-302015-06-302015-03-312014-12-312014-09-302014-06-302014-03-312013-12-312013-09-302013-06-302013-03-312012-12-312012-09-302012-06-302012-03-312011-12-312011-09-302011-06-302011-03-312010-12-312010-09-302010-06-302010-03-31
Value12121212131617171715101010111010111212128.8551.6831.6931.6911.7091.6711.7311.761.0440.410.6020.3610.7420.4340.5830.2150.1190.1190.2640.2510.250.250.250.250.3140.469
Percentage of AmortizationOfIntangibleAssets100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0
Percentage of Assets0.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.0

Property Plant And Equipment Net

us-gaap:PropertyPlantAndEquipmentNet

us-gaap:PropertyPlantAndEquipmentNet


Property
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302016-03-312015-12-312015-09-302015-06-302015-03-312014-12-312014-09-302014-06-302014-03-312013-12-312013-09-302013-06-302013-03-312012-12-312012-09-302012-06-302012-03-312011-12-312011-09-302011-06-302011-03-312010-12-312009-12-31
Value3032972842672482382412362302511941801741721711661671691741791846768696970727375757778787980777373726969686867
Percentage of PropertyPlantAndEquipmentNet100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0
Percentage of Assets7.27.47.37.16.86.97.17.06.87.47.47.06.87.07.17.07.07.67.98.08.25.25.45.35.55.75.96.06.36.26.46.77.07.17.16.86.56.66.56.46.46.67.08.7

us-gaap:PropertyPlantAndEquipmentNet us-gaap:ConsolidationItems

us-gaap:MaterialReconcilingItems


Property
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302015-12-31
Value30329728426724823824123623025119418017417217116616716917417918468
Percentage of PropertyPlantAndEquipmentNet100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0
Percentage of Assets7.27.47.37.16.86.97.17.06.87.47.47.06.87.07.17.07.07.67.98.08.25.4
Percentage of Assets us-gaap:MaterialReconcilingItems7.27.47.37.16.86.97.10.00.00.00.00.00.00.00.00.00.00.00.00.00.00.0

Long Term Investments

us-gaap:LongTermInvestments

us-gaap:LongTermInvestments


Long
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-31
Value6.66.56.56.36.06.05.854101010101010101010109.9339.858
Percentage of LongTermInvestments100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0
Percentage of Assets0.20.20.20.20.20.20.20.30.30.30.40.40.40.40.40.40.40.40.4

us-gaap:LongTermInvestments us-gaap:InformationByCategoryOfDebtSecurity, us-gaap:InvestmentType

us-gaap:AvailableforsaleSecurities, mksi:GroupInsuranceContracts


Long
Period End2020-12-312019-12-312019-09-302019-06-302019-03-312018-12-312018-06-302017-12-31
Value6.55.8545.7466.0015.955.896.0766.255
Percentage of LongTermInvestments100.0100.056.657.757.557.258.058.7
Percentage of Assets0.20.20.20.20.20.20.20.3
Percentage of Assets us-gaap:AvailableforsaleSecurities mksi:GroupInsuranceContracts0.00.00.00.00.00.00.00.0

Goodwill

us-gaap:Goodwill

us-gaap:Goodwill


Goodwill
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302016-03-312015-12-312015-09-302015-06-302015-03-312014-12-312014-09-302014-06-302014-03-312013-12-312013-09-302013-06-302013-03-312012-12-312012-09-302012-06-302012-03-312011-12-312011-09-302011-06-302011-03-312010-12-312009-12-31
Value1063106210661062105810561058105410581057586587588593591589586590588594592199199199200199192193193151150150150150150149140140140140140140140144
Percentage of Goodwill100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0
Percentage of Assets25.326.427.328.329.130.431.031.431.331.022.522.922.923.924.524.924.626.626.626.526.415.515.715.415.616.015.715.916.112.412.412.913.313.413.313.112.312.412.512.913.013.314.318.7

us-gaap:Goodwill us-gaap:StatementBusinessSegments

mksi:EquipmentAndSolutions


Goodwillus-gaap:
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-31
Value474474474473473472473471472471
Percentage of Goodwill44.644.744.544.644.744.844.744.844.644.6
Percentage of Assets11.311.812.212.613.013.613.914.114.013.8
Percentage of Assets mksi:EquipmentAndSolutions0.00.00.00.00.00.0416.7414.8396.1344.7

mksi:LightAndMotionSegment


Goodwillus-gaap:
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-31
Value393391395391388387388386389388389390391395393392390390389
Percentage of Goodwill37.036.937.136.936.736.736.736.736.836.866.466.566.566.766.666.666.566.166.1
Percentage of Assets9.39.810.110.410.711.111.411.511.511.414.915.215.216.016.316.516.417.617.6
Percentage of Assets mksi:LightAndMotionSegment0.00.00.00.00.00.0124.9118.1118.2127.8129.00.00.00.00.00.00.00.00.0

mksi:VacuumAndAnalysisSegment


Goodwillus-gaap:
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312015-12-31
Value195195196196196196196195196196197197197197197196196200199199
Percentage of Goodwill18.418.418.418.518.618.618.618.518.618.633.633.533.533.333.433.433.533.933.9100.0
Percentage of Assets4.64.95.05.25.45.65.85.85.85.87.57.77.78.08.28.38.39.09.015.7
Percentage of Assets mksi:VacuumAndAnalysisSegment0.00.00.00.00.00.047.951.852.651.150.00.00.00.00.00.00.00.00.00.0

Finite Lived Intangible Assets Net

us-gaap:FiniteLivedIntangibleAssetsNet

us-gaap:FiniteLivedIntangibleAssetsNet


Finite
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302016-03-312015-12-312015-09-302015-06-302015-03-312014-12-312014-09-302014-06-302014-03-312013-12-312013-09-302013-06-302013-03-312012-12-312012-09-302012-06-302012-03-312011-12-312011-09-302011-06-302011-03-312010-12-312009-12-31
Value4864985125235345475645805996193193313423563663763863964084194264244454749464851121313121311111.0311.151.0431.3071.2431.4931.7434.963
Percentage of FiniteLivedIntangibleAssetsNet100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0
Percentage of Assets11.612.413.114.014.715.816.517.317.718.112.212.913.314.415.215.916.217.918.418.719.03.33.53.53.74.03.84.04.31.01.11.11.11.21.01.00.10.10.10.10.10.10.20.6

us-gaap:FiniteLivedIntangibleAssetsNet us-gaap:FiniteLivedIntangibleAssetsByMajorClass

mksi:PatentsTrademarksTradeNamesAndOther


Finite
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302016-03-312015-12-312015-09-302015-06-302015-03-312014-12-312014-09-302014-06-302014-03-312013-12-312013-09-302013-06-302013-03-312012-12-312012-09-302012-06-302012-03-312011-12-312011-09-302011-06-302010-12-31
Value7071727273747577787967686970717273757872714.3514.5134.6814.8915.0392.2822.4082.7390.7110.7690.8280.8971.0150.4690.4970.1890.2180.2460.2770.2380.287
Percentage of FiniteLivedIntangibleAssetsNet14.514.314.113.913.813.613.413.313.112.921.120.720.319.819.619.419.119.119.217.416.810.210.310.310.210.24.94.95.45.75.96.27.27.44.14.218.319.023.621.219.116.5
Percentage of Assets1.71.81.81.92.02.12.22.32.32.32.62.72.72.83.03.13.13.43.53.33.20.30.40.40.40.40.20.20.20.10.10.10.10.10.00.00.00.00.00.00.00.0
Percentage of Assets mksi:PatentsTrademarksTradeNamesAndOther0.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.0

us-gaap:CustomerRelationships


Finite
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302016-03-312015-12-312015-09-302015-06-302015-03-312014-12-312014-09-302014-06-302014-03-312013-12-312013-09-302013-06-302013-03-312012-12-312012-09-302012-06-302012-03-312011-12-312011-09-302011-06-302010-12-31
Value19219720320721121522122523223721722222723323724124424825125325820202122232324254.965.1945.2625.1765.5555.9976.1030.640.7190.7970.890.7120.857
Percentage of FiniteLivedIntangibleAssetsNet39.639.639.839.639.539.439.238.838.738.367.967.166.365.664.864.163.362.661.760.460.547.247.547.747.948.250.650.850.739.639.739.541.340.451.951.562.162.576.468.157.349.2
Percentage of Assets4.64.95.25.55.86.26.56.76.96.98.38.78.89.49.810.210.311.211.411.311.51.61.61.71.81.91.92.02.20.40.40.40.50.50.50.50.10.10.10.10.10.1
Percentage of Assets us-gaap:CustomerRelationships0.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.0

us-gaap:PatentedTechnology


Finite
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302016-03-312015-12-312015-09-302015-06-302015-03-312014-12-312014-09-302014-06-302014-03-312013-12-312013-09-302013-06-302013-03-312012-12-312012-09-302012-06-302012-03-312011-12-312011-09-302011-06-302010-12-31
Value223229236243249257267278288301344045515762677277869018181920202021226.8487.1277.2266.457.185.0955.2430.2020.2130.00.140.2930.599
Percentage of FiniteLivedIntangibleAssetsNet45.946.146.246.446.747.047.447.948.248.810.912.213.414.615.616.617.518.319.120.621.242.642.242.141.941.744.544.343.954.754.454.351.552.244.144.319.618.50.010.723.634.4
Percentage of Assets5.35.76.16.56.97.47.88.38.58.81.31.61.82.12.42.62.83.33.53.94.01.41.51.51.61.71.71.81.90.60.60.60.60.60.40.50.00.00.00.00.00.1
Percentage of Assets us-gaap:PatentedTechnology0.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.0

Intangible Assets Net Including Goodwill

us-gaap:IntangibleAssetsNetIncludingGoodwill us-gaap:ConsolidationItems

us-gaap:IntangibleAssetsNetIncludingGoodwill

us-gaap:MaterialReconcilingItems


Intangible
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302015-12-31
Value155015601578158515921604162316341658167690691993194995796597298699610141019243
Percentage of IntangibleAssetsNetIncludingGoodwill100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0
Percentage of Assets36.838.840.442.343.946.247.548.749.049.134.735.836.238.339.740.740.844.445.045.345.419.1
Percentage of Assets us-gaap:MaterialReconcilingItems36.838.840.442.343.946.247.50.00.00.00.00.00.00.00.00.00.00.00.00.00.00.0

Operating Lease Right Of Use Asset

us-gaap:OperatingLeaseRightOfUseAsset

us-gaap:OperatingLeaseRightOfUseAsset


Operating
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-31
Value17918218418017412764676865
Percentage of OperatingLeaseRightOfUseAsset100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0
Percentage of Assets4.34.54.74.84.83.71.92.02.01.9

us-gaap:OperatingLeaseRightOfUseAsset us-gaap:AdjustmentsForNewAccountingPronouncements

us-gaap:AccountingStandardsUpdate201602


Operating
Period End2020-12-312019-01-01
Value7171
Percentage of OperatingLeaseRightOfUseAsset38.50.0
Percentage of Assets1.80.0
Percentage of Assets us-gaap:AccountingStandardsUpdate2016020.00.0

us-gaap:OperatingLeaseRightOfUseAsset us-gaap:ConsolidationItems

us-gaap:MaterialReconcilingItems


Operating
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-31
Value17918218418017412764
Percentage of OperatingLeaseRightOfUseAsset100.0100.0100.0100.0100.0100.0100.0
Percentage of Assets4.34.54.74.84.83.71.9
Percentage of Assets us-gaap:MaterialReconcilingItems4.34.54.74.84.83.71.9

Other Assets Noncurrent

us-gaap:OtherAssetsNoncurrent

us-gaap:OtherAssetsNoncurrent


Other
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302016-03-312015-12-312015-09-302015-06-302015-03-312014-12-312014-09-302014-06-302014-03-312013-12-312013-09-302013-06-302013-03-312012-12-312012-09-302012-06-302012-03-312011-12-312011-09-302011-06-302011-03-312010-12-312009-12-31
Value4748454140424745444838423939373232323229242121181717173033343131111211101011121614141819
Percentage of OtherAssetsNoncurrent100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0
Percentage of Assets1.11.21.21.11.11.21.41.31.31.41.51.71.51.61.61.41.31.51.51.31.11.71.71.41.41.41.42.52.82.82.62.71.01.11.00.90.91.11.11.51.41.31.92.5

us-gaap:OtherAssetsNoncurrent us-gaap:ConsolidationItems

us-gaap:MaterialReconcilingItems


Other
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302015-12-31
Value54555247464853454448384239393732323232292421
Percentage of OtherAssetsNoncurrent113.9113.3114.3115.2115.0114.0112.3100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0
Percentage of Assets1.31.41.31.31.31.41.61.31.31.41.51.71.51.61.61.41.31.51.51.31.11.7
Percentage of Assets us-gaap:MaterialReconcilingItems1.31.41.31.31.31.41.60.00.00.00.00.00.00.00.00.00.00.00.00.00.00.0

Accounts Payable Current

us-gaap:AccountsPayableCurrent

us-gaap:AccountsPayableCurrent


Accounts
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302016-03-312015-12-312015-09-302015-06-302015-03-312014-12-312014-09-302014-06-302014-03-312013-12-312013-09-302013-06-302013-03-312012-12-312012-09-302012-06-302012-03-312011-12-312011-09-302011-06-302011-03-312010-12-312009-12-31
Value1481461101131051108888889583818792827773706968612823263437343026354027242116162322242233343626
Percentage of AccountsPayableCurrent100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0
Percentage of Assets3.53.72.83.02.93.22.62.62.62.83.23.23.43.73.43.33.13.23.13.12.72.21.82.02.73.02.82.52.22.93.32.32.11.91.51.42.12.02.22.13.13.33.73.4

Accrued Income Taxes Current

us-gaap:AccruedIncomeTaxesCurrent

us-gaap:AccruedIncomeTaxesCurrent


Accrued
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302016-03-312015-12-312015-09-302015-06-302015-03-312014-12-312014-09-302014-06-302014-03-312013-12-312013-09-302013-06-302013-03-312012-12-312012-09-302012-06-302012-03-312011-12-312011-06-302011-03-312010-12-312009-12-31
Value18191818161415111214161217312138422722137.0223.514.0249.2798.6156.4556.7023.8214.1688.62107.7683.2693.1514.1483.8584.6025.3957.5480.49135.3470.0
Percentage of AccruedIncomeTaxesCurrent100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.00.0
Percentage of Assets0.40.50.50.50.40.40.50.30.40.40.60.50.71.30.91.61.81.21.00.60.30.30.30.70.70.50.50.30.30.70.90.70.30.30.40.30.40.50.70.01.20.50.0

Contract With Customer Liability Current

us-gaap:ContractWithCustomerLiabilityCurrent

us-gaap:ContractWithCustomerLiabilityCurrent


Contract
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-01-012017-12-31
Value36353130282121222621149.1361112
Percentage of ContractWithCustomerLiabilityCurrent100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0
Percentage of Assets0.90.90.80.80.80.60.60.70.80.60.50.40.00.5

us-gaap:ContractWithCustomerLiabilityCurrent us-gaap:BalanceSheetLocation

mksi:CustomerAdvances


Contract
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-01-01
Value16181210109.59.0538.2028.6297.7346.11213
Percentage of ContractWithCustomerLiabilityCurrent44.151.141.035.235.543.442.136.732.436.742.9117.9
Percentage of Assets0.40.50.30.30.30.30.30.20.30.20.20.0
Percentage of Assets mksi:CustomerAdvances0.00.00.00.00.00.00.00.00.00.00.00.0

mksi:DeferredRevenue


Contract
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-01-01
Value201718191812121417131412
Percentage of ContractWithCustomerLiabilityCurrent55.948.958.764.864.556.657.963.367.663.3100.0113.4
Percentage of Assets0.50.40.50.50.50.40.40.40.50.40.50.0
Percentage of Assets mksi:DeferredRevenue0.00.00.00.00.00.00.00.00.00.00.00.0

Liabilities Current

us-gaap:LiabilitiesCurrent

us-gaap:LiabilitiesCurrent


Liabilities
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302016-03-312015-12-312015-09-302015-06-302015-03-312014-12-312014-09-302014-06-302014-03-312013-12-312013-09-302013-06-302013-03-312012-12-312012-09-302012-06-302012-03-312011-12-312011-09-302011-06-302011-03-312010-12-312009-12-31
Value42037137336435132131731028529626326228229128928225823023723020797901071111031031049211612896797679898487968210111010971
Percentage of LiabilitiesCurrent100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0
Percentage of Assets10.09.39.69.79.79.39.39.38.48.710.110.211.011.712.011.910.810.410.710.39.37.67.18.38.78.38.58.67.79.510.68.27.06.87.07.87.57.88.67.69.410.511.29.2

Operating Lease Liability Current

us-gaap:OperatingLeaseLiabilityCurrent

us-gaap:OperatingLeaseLiabilityCurrent


Operating
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-31
Value16131516161820202019
Percentage of OperatingLeaseLiabilityCurrent100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0
Percentage of Assets0.40.30.40.40.50.50.60.60.60.6

us-gaap:OperatingLeaseLiabilityCurrent us-gaap:AdjustmentsForNewAccountingPronouncements

us-gaap:AccountingStandardsUpdate201602


Operating
Period End2020-12-312019-01-01
Value2020
Percentage of OperatingLeaseLiabilityCurrent127.80.0
Percentage of Assets0.50.0
Percentage of Assets us-gaap:AccountingStandardsUpdate2016020.00.0

Other Liabilities Current

us-gaap:OtherLiabilitiesCurrent

us-gaap:OtherLiabilitiesCurrent


Other
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302016-03-312015-12-312015-09-302015-06-302015-03-312014-12-312014-09-302014-06-302014-03-312013-12-312013-09-302013-06-302013-03-312012-12-312012-09-302012-06-302012-03-312011-12-312011-09-302011-06-302011-03-312010-12-312009-12-31
Value9270657769595868617462787885736857555173674535424538354239363435323437413437403437353721
Percentage of OtherLiabilitiesCurrent100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0
Percentage of Assets2.21.81.72.11.91.71.72.11.82.22.43.13.03.43.12.92.42.52.33.33.03.52.83.33.63.12.93.53.33.02.83.12.93.03.33.63.03.43.63.23.53.43.92.8

Long Term Debt

us-gaap:LongTermDebt

us-gaap:LongTermDebt


Long
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-30
Value811813815816818820871873926976343342342341389435551552601639696
Percentage of LongTermDebt100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0
Percentage of Assets19.320.220.921.822.523.625.526.027.428.613.213.413.313.816.218.423.124.927.228.531.0

us-gaap:LongTermDebt us-gaap:DebtInstrument

mksi:TermLoanFacilityNet


Long
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-30
Value811813815816818820871873926976343342342341389435551551600638696
Percentage of LongTermDebt100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.099.899.899.999.999.999.999.9
Percentage of Assets19.320.220.921.822.523.625.526.027.428.613.113.413.313.816.118.423.124.827.228.531.0
Percentage of Assets mksi:TermLoanFacilityNet0.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.0

Deferred Finance Costs Noncurrent Net

us-gaap:DeferredFinanceCostsNoncurrentNet us-gaap:DebtInstrument

us-gaap:DeferredFinanceCostsNoncurrentNet

mksi:TermLoanFacilityNet


Deferred
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-31
Value8.58.99.49.81010111213154.7085.5816.4187.2269.18513161619
Percentage of DeferredFinanceCostsNoncurrentNet100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0
Percentage of Assets0.20.20.20.30.30.30.30.40.40.40.20.20.20.30.40.60.70.80.9
Percentage of Assets mksi:TermLoanFacilityNet0.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.0

Deferred Income Tax Liabilities Net

us-gaap:DeferredIncomeTaxLiabilitiesNet

us-gaap:DeferredIncomeTaxLiabilitiesNet


Deferred
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302019-12-31
Value717159677172
Percentage of DeferredIncomeTaxLiabilitiesNet100.0100.0100.0100.0100.0100.0
Percentage of Assets1.71.81.51.82.02.1

Other Liabilities Noncurrent

us-gaap:OtherLiabilitiesNoncurrent

us-gaap:OtherLiabilitiesNoncurrent


Other
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302016-03-312015-12-312015-09-302015-06-302015-03-312014-12-312014-09-302014-06-302014-03-312013-12-312013-09-302013-06-302013-03-312012-12-312012-09-302012-06-302012-03-312011-12-312011-09-302011-06-302011-03-312010-12-312009-12-31
Value5453575857544236342930302735322324222019562121393841385361606370464543373534323229272517
Percentage of OtherLiabilitiesNoncurrent100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0
Percentage of Assets1.31.31.51.61.61.61.21.11.00.91.21.21.11.41.31.01.01.00.90.92.51.71.73.03.03.33.24.45.25.05.26.04.14.13.83.33.23.02.93.02.72.72.62.3

Operating Lease Liability Noncurrent

us-gaap:OperatingLeaseLiabilityNoncurrent

us-gaap:OperatingLeaseLiabilityNoncurrent


Operating
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-31
Value18819118717216211144475149
Percentage of OperatingLeaseLiabilityNoncurrent100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0
Percentage of Assets4.54.84.84.64.53.21.31.41.51.4

us-gaap:OperatingLeaseLiabilityNoncurrent us-gaap:AdjustmentsForNewAccountingPronouncements

us-gaap:AccountingStandardsUpdate201602


Operating
Period End2020-12-312019-01-01
Value5454
Percentage of OperatingLeaseLiabilityNoncurrent28.90.0
Percentage of Assets1.40.0
Percentage of Assets us-gaap:AccountingStandardsUpdate2016020.00.0

Lessee Operating Lease Liability Payments Due Year Two

us-gaap:LesseeOperatingLeaseLiabilityPaymentsDueYearTwo

us-gaap:LesseeOperatingLeaseLiabilityPaymentsDueYearTwo


Lessee
Period End2021-06-302021-03-312020-12-312020-09-30
Value19192018
Percentage of LesseeOperatingLeaseLiabilityPaymentsDueYearTwo100.0100.0100.0100.0
Percentage of Assets0.50.50.50.5

Lessee Operating Lease Liability Payments Due Year Three

us-gaap:LesseeOperatingLeaseLiabilityPaymentsDueYearThree

us-gaap:LesseeOperatingLeaseLiabilityPaymentsDueYearThree


Lessee
Period End2021-06-302021-03-312020-12-312020-09-30
Value18181816
Percentage of LesseeOperatingLeaseLiabilityPaymentsDueYearThree100.0100.0100.0100.0
Percentage of Assets0.40.50.50.5

Lessee Operating Lease Liability Payments Due Year Four

us-gaap:LesseeOperatingLeaseLiabilityPaymentsDueYearFour

us-gaap:LesseeOperatingLeaseLiabilityPaymentsDueYearFour


Lessee
Period End2021-06-302021-03-312020-12-312020-09-30
Value17171716
Percentage of LesseeOperatingLeaseLiabilityPaymentsDueYearFour100.0100.0100.0100.0
Percentage of Assets0.40.40.40.4

Lessee Operating Lease Liability Payments Due Year Five

us-gaap:LesseeOperatingLeaseLiabilityPaymentsDueYearFive

us-gaap:LesseeOperatingLeaseLiabilityPaymentsDueYearFive


Lessee
Period End2020-12-31
Value16
Percentage of LesseeOperatingLeaseLiabilityPaymentsDueYearFive100.0
Percentage of Assets0.4

Lessee Operating Lease Liability Payments Due After Year Five

us-gaap:LesseeOperatingLeaseLiabilityPaymentsDueAfterYearFive

us-gaap:LesseeOperatingLeaseLiabilityPaymentsDueAfterYearFive


Lessee
Period End2020-12-31
Value161
Percentage of LesseeOperatingLeaseLiabilityPaymentsDueAfterYearFive100.0
Percentage of Assets4.1

Operating Lease Liability

us-gaap:OperatingLeaseLiability

us-gaap:OperatingLeaseLiability


Operating
Period End2021-06-302021-03-312020-12-312020-09-30
Value204205203189
Percentage of OperatingLeaseLiability100.0100.0100.0100.0
Percentage of Assets4.95.15.25.0

Lessee Operating Lease Liability Payments Due

us-gaap:LesseeOperatingLeaseLiabilityPaymentsDue

us-gaap:LesseeOperatingLeaseLiabilityPaymentsDue


Lessee
Period End2021-06-302021-03-312020-12-312020-09-30
Value254257256243
Percentage of LesseeOperatingLeaseLiabilityPaymentsDue100.0100.0100.0100.0
Percentage of Assets6.16.46.66.5

Lessee Operating Lease Liability Undiscounted Excess Amount

us-gaap:LesseeOperatingLeaseLiabilityUndiscountedExcessAmount

us-gaap:LesseeOperatingLeaseLiabilityUndiscountedExcessAmount


Lessee
Period End2021-06-302021-03-312020-12-312020-09-30
Value50525254
Percentage of LesseeOperatingLeaseLiabilityUndiscountedExcessAmount100.0100.0100.0100.0
Percentage of Assets1.21.31.41.4

Stockholders Equity

us-gaap:StockholdersEquity

us-gaap:StockholdersEquity


Stockholders
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302016-03-312015-12-312015-09-302015-06-302015-03-312014-12-312014-09-302014-06-302014-03-312013-12-312013-09-302013-06-302013-03-312012-12-312012-09-302012-06-302012-03-312011-12-312011-09-302011-06-302011-03-312010-12-312009-12-312008-12-312007-12-31
Value26142469236022262126205220231973194519201873181018011698158815071429130512411215118111711160114611291104108110581043104510211005100410031012101510141006990972948911847684886954
Percentage of StockholdersEquity100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0
Percentage of Assets62.161.560.559.458.659.159.258.857.556.371.770.670.068.465.863.660.058.856.154.252.690.791.288.788.288.488.487.087.185.584.285.888.889.189.288.989.489.288.589.487.886.986.288.50.00.0

us-gaap:StockholdersEquity us-gaap:StatementEquityComponents

us-gaap:AdditionalPaidInCapital


Stockholders
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312016-12-312015-12-312014-12-312013-12-312012-12-312011-12-312010-12-312009-12-312008-12-312007-12-31
Value884877873861858852864856849844793786793791789777744734730718707663645637685
Percentage of StockholdersEquity33.835.637.038.740.441.542.743.443.744.042.443.444.046.649.762.664.267.971.570.971.578.494.271.971.9
Percentage of Assets21.021.822.423.023.624.525.325.525.124.730.430.730.831.932.735.158.560.060.263.363.267.683.40.00.0
Percentage of Assets us-gaap:AdditionalPaidInCapital0.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.0

us-gaap:AociIncludingPortionAttributableToNoncontrollingInterest


Stockholders
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312016-12-312015-12-31
Value-2.4-7.50.3-17.6-34.2-39.3-22.29-32.476-17.247-9.922-5.6550.0833.243143.452-30.547-11.171
Percentage of StockholdersEquity-0.1-0.30.0-0.8-1.6-1.9-1.1-1.6-0.9-0.5-0.30.00.20.80.2-2.5-1.0
Percentage of Assets-0.1-0.20.0-0.5-0.9-1.1-0.7-1.0-0.5-0.3-0.20.00.10.60.1-1.4-0.9
Percentage of Assets us-gaap:AociIncludingPortionAttributableToNoncontrollingInterest0.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.0

us-gaap:CommonStock


Stockholders
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312016-12-312015-12-312014-12-312013-12-312012-12-312011-12-312010-12-312009-12-312008-12-312007-12-31
Value0.10.10.10.10.10.10.1130.1130.1130.1130.1130.1130.1130.1130.1130.1130.1130.1130.1130.1130.1130.1130.1130.1130.113
Percentage of StockholdersEquity0.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.0
Percentage of Assets0.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.0
Percentage of Assets us-gaap:CommonStock0.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.0

us-gaap:RetainedEarnings


Stockholders
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312016-12-312015-12-312014-12-312013-12-312012-12-312011-12-312010-12-312009-12-312008-12-312007-12-31
Value173215981487138213021239118111491113108610841023100489279549442734927827826817128241255
Percentage of StockholdersEquity66.364.763.062.161.260.458.458.257.256.657.956.655.852.650.139.836.832.327.327.527.220.24.227.226.8
Percentage of Assets41.239.838.136.935.935.734.634.332.931.841.539.939.036.033.022.433.628.523.024.524.017.43.70.00.0
Percentage of Assets us-gaap:RetainedEarnings0.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.0

Common Stock Value

us-gaap:CommonStockValue

us-gaap:CommonStockValue


Common
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302016-03-312015-12-312015-09-302015-06-302015-03-312014-12-312014-09-302014-06-302014-03-312013-12-312013-09-302013-06-302013-03-312012-12-312012-09-302012-06-302012-03-312011-12-312011-09-302011-06-302011-03-312010-12-312009-12-31
Value100000.0100000.0100000.0100000.0100000.0100000.0113000.0113000.0113000.0113000.0113000.0113000.0113000.0113000.0113000.0113000.0113000.0113000.0113000.0113000.0113000.0113000.0113000.0113000.0113000.0113000.0113000.0113000.0113000.0113000.0113000.0113000.0113000.0113000.0113000.0113000.0113000.0113000.0113000.0113000.0113000.0113000.0113000.0113000.0
Percentage of CommonStockValue100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0
Percentage of Assets0.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.0

Additional Paid In Capital Common Stock

us-gaap:AdditionalPaidInCapitalCommonStock

us-gaap:AdditionalPaidInCapitalCommonStock


Additional
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302016-03-312015-12-312015-09-302015-06-302015-03-312014-12-312014-09-302014-06-302014-03-312013-12-312013-09-302013-06-302013-03-312012-12-312012-09-302012-06-302012-03-312011-12-312011-09-302011-06-302011-03-312010-12-312009-12-31
Value884877873861858852864856849844793786793791789782779783777770765745744741739736734730726732730726723719718715712709707703699694663645
Percentage of AdditionalPaidInCapitalCommonStock100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0
Percentage of Assets21.021.822.423.023.624.525.325.525.124.730.430.730.831.932.733.032.735.335.134.434.157.858.557.357.858.960.060.060.759.960.261.964.064.063.362.662.862.963.264.764.766.267.683.4

Retained Earnings Accumulated Deficit

us-gaap:RetainedEarningsAccumulatedDeficit

us-gaap:RetainedEarningsAccumulatedDeficit


Retained
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302016-03-312015-12-312015-09-302015-06-302015-03-312014-12-312014-09-302014-06-302014-03-312013-12-312013-09-302013-06-302013-03-312012-12-312012-09-302012-06-302012-03-312011-12-312011-09-302011-06-302011-03-312010-12-312009-12-31
Value173215981487138213021239118111491113108610841023100489279572766155049445843443442741339537434932330330127826727327527828429128126825423220117128
Percentage of RetainedEarningsAccumulatedDeficit100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0
Percentage of Assets41.239.838.136.935.935.734.634.332.931.841.539.939.036.033.030.727.724.822.420.419.433.733.632.030.929.928.526.625.324.623.022.824.224.424.524.925.725.024.023.421.519.217.43.7

Accumulated Other Comprehensive Income Loss Net Of Tax

us-gaap:AccumulatedOtherComprehensiveIncomeLossNetOfTax

us-gaap:AccumulatedOtherComprehensiveIncomeLossNetOfTax


Accumulated
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302016-03-312015-12-312015-09-302015-06-302015-03-312014-12-312014-09-302014-06-302014-03-312013-12-312013-09-302013-06-302013-03-312012-12-312012-09-302012-06-302012-03-312011-12-312011-09-302011-06-302011-03-312010-12-312009-12-31
Value2.4-7.50.3-17.6-34.2-39.3-22.29-32.476-17.247-9.922-5.6550.0833.243143.452-2.84-10.756-28.464-30.547-13.387-18.824-9.687-11.171-8.283-5.699-5.777-2.0844.698131111127.2998.1115159.6114131417151110
Percentage of AccumulatedOtherComprehensiveIncomeLossNetOfTax100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0
Percentage of Assets0.1-0.20.0-0.5-0.9-1.1-0.7-1.0-0.5-0.3-0.20.00.10.60.1-0.1-0.5-1.3-1.4-0.6-0.8-0.8-0.9-0.6-0.4-0.5-0.20.41.11.01.01.00.60.71.41.30.81.31.21.31.61.51.21.4

Adjustments To Additional Paid In Capital Sharebased Compensation Requisite Service Period Recognition Value

us-gaap:AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue

us-gaap:AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue


Adjustments
Period End2021-06-302021-03-312020-09-302020-06-302020-03-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-31
Value8.810.07.46.88.57.3767.205275.2575.2136.36610
Percentage of AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0
Percentage of Assets0.00.00.00.00.00.00.00.00.00.00.00.0

us-gaap:AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue us-gaap:StatementEquityComponents

us-gaap:AdditionalPaidInCapital


Adjustments
Period End2021-06-302021-03-312020-09-302020-06-302020-03-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-31
Value8.810.07.46.88.57.3767.205275.2575.2136.36610
Percentage of AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0
Percentage of Assets0.00.00.00.00.00.00.00.00.00.00.00.0
Percentage of Assets us-gaap:AdditionalPaidInCapital0.00.00.00.00.00.00.00.00.00.00.00.0

Net Cash Provided By Used In Operating Activities

us-gaap:NetCashProvidedByUsedInOperatingActivities

us-gaap:NetCashProvidedByUsedInOperatingActivities


Net
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302013-12-312013-09-302013-06-302013-03-312012-12-312012-09-302012-06-302012-03-312011-12-312011-09-302011-06-302011-03-312010-12-312010-09-302010-06-302010-03-31
Value16512614715213974776077291359510972809834363.1832.463233154275145312687372216
Percentage of NetCashProvidedByUsedInOperatingActivities100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0
Percentage of RevenueFromContractWithCustomerExcludingAssessedTax22.018.322.325.825.514.015.513.116.46.329.419.719.10.015.820.416.821.72.01.717.422.530.814.429.923.614.211.539.816.810.28.7

Net Cash Provided By Used In Investing Activities

us-gaap:NetCashProvidedByUsedInInvestingActivities

us-gaap:NetCashProvidedByUsedInInvestingActivities


Net
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302014-03-312013-12-312013-09-302013-06-302013-03-312012-12-312012-09-302012-06-302012-03-312011-12-312011-09-302011-06-302011-03-312010-12-312010-09-302010-06-302010-03-31
Value-90.7-9.2-30.1-72.9-137.438-39.55828-62.509-874.132120-30.915-15.92-0.6176.647-87.751-1.9726.192-11.421-24.107-7.198-7.085-149.192221552-47.534-57.49246-49.929-57.616-5.4457.367
Percentage of NetCashProvidedByUsedInInvestingActivities100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0
Percentage of RevenueFromContractWithCustomerExcludingAssessedTax-12.1-1.3-4.6-12.4-25.27.1-7.96.3-13.2-188.626.1-6.3-2.8-0.01.3-18.0-1.03.0-6.9-15.4-5.1-5.3-105.512.98.130.6-24.4-25.620.0-22.8-26.0-2.53.8

Net Cash Provided By Used In Financing Activities

us-gaap:NetCashProvidedByUsedInFinancingActivities

us-gaap:NetCashProvidedByUsedInFinancingActivities


Net
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302014-03-312013-12-312013-09-302013-06-302013-03-312012-12-312012-09-302012-06-302012-03-312011-12-312011-09-302011-06-302011-03-312010-12-312010-09-302010-06-302010-03-31
Value-17.0-23.5-6.2-17.1-16.7-81.5-13.857-64.618-63.979618-10.514-92.62-7.776-67.096-58.313-135.301-10.071-6.407-8.534-11.046-11.162-14.791-10.445-9.307-12.427-6.491-5.983-6.60221-3.813-3.5958.157-5.776
Percentage of NetCashProvidedByUsedInFinancingActivities100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0
Percentage of RevenueFromContractWithCustomerExcludingAssessedTax-2.3-3.4-0.9-2.9-3.1-15.2-2.8-14.0-13.5133.5-2.3-19.0-1.4-0.0-11.4-27.8-4.9-3.1-5.1-7.0-7.9-11.1-7.4-5.2-6.5-3.8-3.1-2.99.3-1.7-1.63.7-3.0

Cash Cash Equivalents Restricted Cash And Restricted Cash Equivalents Period Increase Decrease Including Exchange Rate Effect

us-gaap:CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect

us-gaap:CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect


Cash
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-31
Value559111564-13.1272819-51.081-226.329244-27.581867.00127-122.01816627
Percentage of CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0
Percentage of RevenueFromContractWithCustomerExcludingAssessedTax7.413.217.410.9-2.45.15.74.2-10.8-48.853.1-5.715.10.05.4-25.134.70.0

Deferred Income Tax Expense Benefit

us-gaap:DeferredIncomeTaxExpenseBenefit

us-gaap:DeferredIncomeTaxExpenseBenefit


Deferred
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302016-03-312015-12-312015-09-302015-06-302015-03-312014-12-312014-09-302014-06-302014-03-312013-12-312013-09-302013-06-302013-03-312012-12-312012-09-302012-06-302012-03-312011-12-312011-09-302011-06-302011-03-312010-12-312010-09-302010-06-302010-03-31
Value0.29.5-6.4-4.12.80.64.852-6.442-0.18-2.445-15.863-4.6951.875-0.705-11.472-1.1579.607-1.809-29.255-10.9481.0340.3472.563-2.495-0.3940.7364.79-0.9225.37-3.974-6.7120.7781.6171.2280.760.881.1471.0324.4650.599-0.5082.993-1.6189.4351.7740.506
Percentage of DeferredIncomeTaxExpenseBenefit100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0

Increase Decrease In Accounts Receivable

us-gaap:IncreaseDecreaseInAccountsReceivable

us-gaap:IncreaseDecreaseInAccountsReceivable


Increase
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302016-03-312015-12-312015-09-302015-06-302015-03-312014-12-312014-09-302014-06-302014-03-312013-12-312013-09-302013-06-302013-03-312012-12-312012-09-302012-06-302012-03-312011-12-312011-09-302011-06-302011-03-312010-12-312010-09-302010-06-302010-03-31
Value103323-20.4-1.2429.37717-23.135-4.028-22.579-19.3865.1753717100.68615138.6342510-13.758-7.363-0.243193.1496.59-18.6262.784181.3575.99710-4.296-19.408-26.80112-4.412-24.464-5.88516-17.8342.381740
Percentage of IncreaseDecreaseInAccountsReceivable100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0

Increase Decrease In Inventories

us-gaap:IncreaseDecreaseInInventories

us-gaap:IncreaseDecreaseInInventories


Increase
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302016-03-312015-12-312015-09-302015-06-302015-03-312014-12-312014-09-302014-06-302014-03-312013-12-312013-09-302013-06-302013-03-312012-12-312012-09-302012-06-302012-03-312011-12-312011-09-302011-06-302011-03-312010-12-312010-09-302010-06-302010-03-31
Value14245.15.621203.494-5.0262010-6.662203128211722118.7218.945-4.7120.844-10.7186.7485.654126.4342.6724.4027.402117.015100.347-6.234-0.1511.622-0.578-3.1591.9766.8965.9848.053161710
Percentage of IncreaseDecreaseInInventories100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0

Net Cash Provided By Used In Operating Activities

us-gaap:NetCashProvidedByUsedInOperatingActivities

us-gaap:NetCashProvidedByUsedInOperatingActivities


Net
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302013-12-312013-09-302013-06-302013-03-312012-12-312012-09-302012-06-302012-03-312011-12-312011-09-302011-06-302011-03-312010-12-312010-09-302010-06-302010-03-31
Value16512614715213974776077291359510972809834363.1832.463233154275145312687372216
Percentage of NetCashProvidedByUsedInOperatingActivities100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0
Percentage of RevenueFromContractWithCustomerExcludingAssessedTax22.018.322.325.825.514.015.513.116.46.329.419.719.10.015.820.416.821.72.01.717.422.530.814.429.923.614.211.539.816.810.28.7

Net Income Loss

us-gaap:NetIncomeLoss

us-gaap:NetIncomeLoss


Net
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302016-03-312015-12-312015-09-302015-06-302015-03-312014-12-312014-09-302014-06-302014-03-312013-12-312013-09-302013-06-302013-03-312012-12-312012-09-302012-06-302012-03-312011-12-312011-09-302011-06-302011-03-312010-12-312010-09-302010-06-302010-03-31
Value14612211591736942473712719312210577751206545329.21172529333334292131202.4587.325.7614.1092.5818222230383835383829
Percentage of NetIncomeLoss100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0
Percentage of RevenueFromContractWithCustomerExcludingAssessedTax19.517.617.515.513.512.98.610.38.02.715.619.121.40.015.215.625.10.011.28.62.89.614.814.215.215.816.815.611.515.19.91.54.74.13.11.810.511.913.215.617.216.416.417.517.615.2

us-gaap:NetIncomeLoss us-gaap:StatementEquityComponents

us-gaap:RetainedEarnings


Net
Period End2021-06-302021-03-312020-09-302020-06-302020-03-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-31
Value1461229173694737127193122105
Percentage of NetIncomeLoss100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0
Percentage of RevenueFromContractWithCustomerExcludingAssessedTax19.517.615.513.512.910.38.02.715.619.121.40.0
Percentage of RevenueFromContractWithCustomerExcludingAssessedTax us-gaap:RetainedEarnings0.00.00.00.00.00.00.00.00.00.00.00.0

Profit Loss

us-gaap:ProfitLoss

us-gaap:ProfitLoss


Profit
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302012-09-302012-06-302011-09-302011-06-30
Value1461221159173694247371271931221057775567687104
Percentage of ProfitLoss100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0
Percentage of RevenueFromContractWithCustomerExcludingAssessedTax19.517.617.515.513.512.98.610.38.02.715.619.121.40.015.215.640.043.145.146.8

Share Based Compensation

us-gaap:ShareBasedCompensation

us-gaap:ShareBasedCompensation


Share
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302016-03-312015-12-312015-09-302015-06-302015-03-312014-12-312014-09-302014-06-302014-03-312013-12-312013-09-302013-06-302013-03-312012-12-312012-09-302012-06-302012-03-312011-12-312011-09-302011-06-302011-03-312010-12-312010-09-302010-06-302010-03-31
Value8.810.06.87.46.88.57.0547.3736.929275.2575.2136.366104.5444.8456.2078.7825.4025.158104.1522.9883.2473.5663.2122.5642.7532.83.1982.4832.75.0113.7983.1312.8213.7793.32.6282.5492.9563.0923.892.4042.1732.137
Percentage of ShareBasedCompensation100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0

Net Cash Provided By Used In Investing Activities

us-gaap:NetCashProvidedByUsedInInvestingActivities

us-gaap:NetCashProvidedByUsedInInvestingActivities


Net
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302014-03-312013-12-312013-09-302013-06-302013-03-312012-12-312012-09-302012-06-302012-03-312011-12-312011-09-302011-06-302011-03-312010-12-312010-09-302010-06-302010-03-31
Value-90.7-9.2-30.1-72.9-137.438-39.55828-62.509-874.132120-30.915-15.92-0.6176.647-87.751-1.9726.192-11.421-24.107-7.198-7.085-149.192221552-47.534-57.49246-49.929-57.616-5.4457.367
Percentage of NetCashProvidedByUsedInInvestingActivities100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0
Percentage of RevenueFromContractWithCustomerExcludingAssessedTax-12.1-1.3-4.6-12.4-25.27.1-7.96.3-13.2-188.626.1-6.3-2.8-0.01.3-18.0-1.03.0-6.9-15.4-5.1-5.3-105.512.98.130.6-24.4-25.620.0-22.8-26.0-2.53.8

Payments To Acquire Property Plant And Equipment

us-gaap:PaymentsToAcquirePropertyPlantAndEquipment

us-gaap:PaymentsToAcquirePropertyPlantAndEquipment


Payments
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302016-03-312015-12-312015-09-302015-06-302015-03-312014-12-312014-09-302014-06-302014-03-312013-12-312013-09-302013-06-302013-03-312012-12-312012-09-302012-06-302012-03-312011-12-312011-09-302011-06-302011-03-312010-12-312010-09-302010-06-302010-03-31
Value162625292010.0191613142615129.39138.1185.644.0997.1644.6955.1082.1563.5833.4972.832.5043.8212.1074.1573.0983.2562.7943.0043.3566.6653.0283.4454.5675.8763.4263.9342.3314.3894.8033.3533.274
Percentage of PaymentsToAcquirePropertyPlantAndEquipment100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0

us-gaap:PaymentsToAcquirePropertyPlantAndEquipment us-gaap:StatementBusinessSegments

mksi:EquipmentAndSolutions


Payments
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-31
Value3.46.37.16.41.41.90.4842.2712.0871.887
Percentage of PaymentsToAcquirePropertyPlantAndEquipment20.923.828.422.16.719.02.513.815.213.0

mksi:LightAndMotionSegment


Payments
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-30
Value5.11110124.54.06.1866.7674.9385.1548.6135.5355.4563.1936.4333.9062.1121.7253.3961.9232.072
Percentage of PaymentsToAcquirePropertyPlantAndEquipment31.343.842.844.521.540.032.341.036.035.533.136.743.934.047.948.137.442.147.441.040.6

mksi:VacuumAndAnalysisSegment


Payments
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302016-03-31
Value7.88.67.29.7154.1127.4616.77.488179.5326.9726.1976.9974.2123.5282.3743.7682.7723.0362.156
Percentage of PaymentsToAcquirePropertyPlantAndEquipment47.932.528.833.471.841.065.245.248.851.566.963.356.166.052.151.962.657.952.659.059.4100.0

Net Cash Provided By Used In Financing Activities

us-gaap:NetCashProvidedByUsedInFinancingActivities

us-gaap:NetCashProvidedByUsedInFinancingActivities


Net
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302014-03-312013-12-312013-09-302013-06-302013-03-312012-12-312012-09-302012-06-302012-03-312011-12-312011-09-302011-06-302011-03-312010-12-312010-09-302010-06-302010-03-31
Value-17.0-23.5-6.2-17.1-16.7-81.5-13.857-64.618-63.979618-10.514-92.62-7.776-67.096-58.313-135.301-10.071-6.407-8.534-11.046-11.162-14.791-10.445-9.307-12.427-6.491-5.983-6.60221-3.813-3.5958.157-5.776
Percentage of NetCashProvidedByUsedInFinancingActivities100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0
Percentage of RevenueFromContractWithCustomerExcludingAssessedTax-2.3-3.4-0.9-2.9-3.1-15.2-2.8-14.0-13.5133.5-2.3-19.0-1.4-0.0-11.4-27.8-4.9-3.1-5.1-7.0-7.9-11.1-7.4-5.2-6.5-3.8-3.1-2.99.3-1.7-1.63.7-3.0

Repayments Of Long Term Debt

us-gaap:RepaymentsOfLongTermDebt

us-gaap:RepaymentsOfLongTermDebt


Repayments
Period End2021-03-312020-03-312019-12-312019-09-302018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-30
Value2.2522.247520.0010.0020.050501251.571514161
Percentage of RepaymentsOfLongTermDebt100.0100.0100.0100.0100.0100.00.0100.0100.0100.0100.0100.0100.0100.0

Payments Of Dividends Common Stock

us-gaap:PaymentsOfDividendsCommonStock

us-gaap:PaymentsOfDividendsCommonStock


Payments
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302016-03-312015-12-312015-09-302015-06-302015-03-312014-12-312014-09-302014-06-302014-03-312013-12-312013-09-302013-06-302013-03-312012-12-312012-09-302012-06-302012-03-312011-12-312011-09-302011-06-302011-03-312010-12-31
Value121111111111101021104242209.8083828189.4193627189.0569.04126178.7848.778.7558.7738.5538.5178.5078.5038.4488.4258.4557.9297.8777.8757.877.8657.7630.0
Percentage of PaymentsOfDividendsCommonStock100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.00.0

Deferred Tax Liabilities

us-gaap:DeferredTaxLiabilities

us-gaap:DeferredTaxLiabilities


Deferred
Period End2020-12-312019-12-312018-12-312017-12-312016-12-312014-12-312013-12-312012-12-312011-12-312010-12-31
Value4959415661119.069117.0317.496
Percentage of DeferredTaxLiabilities100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0

Unrecognized Tax Benefits

us-gaap:UnrecognizedTaxBenefits

us-gaap:UnrecognizedTaxBenefits


Unrecognized
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302016-03-312015-12-312015-09-302015-06-302015-03-312014-12-312014-09-302014-06-302014-03-312013-12-312013-09-302013-06-302013-03-312012-12-312012-09-302012-06-302012-03-312011-12-312011-09-302011-06-302010-12-312009-12-312008-12-31
Value474647474544434140403232280.027938272627252530233.7124.332191919193242424745414140393735351816159.08514
Percentage of UnrecognizedTaxBenefits100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0

Deferred Tax Assets Valuation Allowance

us-gaap:DeferredTaxAssetsValuationAllowance

us-gaap:DeferredTaxAssetsValuationAllowance


Deferred
Period End2020-12-312019-12-312018-12-312017-12-312016-12-312015-12-312014-12-312013-12-312012-12-312011-12-312010-12-31
Value30271713126.1272627272625
Percentage of DeferredTaxAssetsValuationAllowance100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0

mksi:BusinessCombinationIntegrationReversalOfAcquisitionAndIntegrationCosts

mksi:BusinessCombinationIntegrationReversalOfAcquisitionAndIntegrationCosts


Business
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302017-12-312017-09-302017-06-30
Value6.06.20.40.50.72.21.7522.1033.24304.2450.036-1.1680.6342.4660.79
Percentage of BusinessCombinationIntegrationReversalOfAcquisitionAndIntegrationCosts100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0

mksi:ContractWithCustomerAmountOfDeferredRevenueAndCustomerAdvancesRecognized

mksi:ContractWithCustomerAmountOfDeferredRevenueAndCustomerAdvancesRecognized


Contract
Period End2021-06-302021-03-312020-06-302020-03-31
Value-1.5222017
Percentage of ContractWithCustomerAmountOfDeferredRevenueAndCustomerAdvancesRecognized100.0100.0100.0100.0

mksi:ContractWithCustomerLiabilityAdditions

mksi:ContractWithCustomerLiabilityAdditions


Contract
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-31
Value-0.12531292817357.11717
Percentage of ContractWithCustomerLiabilityAdditions100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0

mksi:DebtInstrumentIssueDiscountPercentageOnPrincipal us-gaap:BusinessAcquisition, us-gaap:CreditFacility, us-gaap:DebtInstrument

mksi:DebtInstrumentIssueDiscountPercentageOnPrincipal

mksi:NewportCorporation, us-gaap:SecuredDebt, mksi:TermLoanCreditAgreement


Debt
Period End2021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-31
Value1.000.9900.010000.01
Percentage of DebtInstrumentIssueDiscountPercentageOnPrincipal100.00.0100.00.0100.00.00.00.0100.0

mksi:NewportCorporation, us-gaap:SecuredDebt, mksi:TwoThousandNineteenTermLoanRefinancingFacility


Debt
Period End2021-03-312020-12-312020-09-302020-06-302020-03-312019-12-31
Value0.2500.247500.00250
Percentage of DebtInstrumentIssueDiscountPercentageOnPrincipal25.00.025.00.025.00.0

mksi:GoodwillTranslationAdjustmentsGross

mksi:GoodwillTranslationAdjustmentsGross


Goodwill
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302016-03-312015-12-312015-09-302015-06-302015-03-312014-12-312014-09-302014-06-302014-03-312013-12-312013-09-302013-06-302013-03-31
Value1.6-4.35.44.01.7-2.12.139-3.6080.044-1.068-0.865-0.857-4.7762.4471.9482.2344.341.917-5.8611.598-3.1780.2960.141-0.65-0.05-0.136-0.744-0.1250.526-0.1780.2090.688-0.328-0.393
Percentage of GoodwillTranslationAdjustmentsGross100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0

mksi:InsuranceReimbursementReceived us-gaap:BusinessAcquisition

mksi:InsuranceReimbursementReceived

mksi:NewportCorporation


Insurance
Period End2020-12-312020-06-302020-03-31
Value0500000.0500000.0
Percentage of InsuranceReimbursementReceived0.0100.0100.0

mksi:LineOfCreditFacilityExcessAvailabilityAmount us-gaap:Range, us-gaap:BusinessAcquisition, us-gaap:CreditFacility, us-gaap:DebtInstrument

mksi:LineOfCreditFacilityExcessAvailabilityAmount

srt:Maximum, mksi:NewportCorporation, us-gaap:SecuredDebt, mksi:AssetBasedCreditAgreement


Line
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-31
Value08500000.00008500000.0
Percentage of LineOfCreditFacilityExcessAvailabilityAmount0.0100.00.00.00.0100.0

srt:Minimum, mksi:NewportCorporation, us-gaap:SecuredDebt, mksi:AssetBasedCreditAgreement


Line
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-31
Value08500000.00008500000.0
Percentage of LineOfCreditFacilityExcessAvailabilityAmount0.0100.00.00.00.0100.0

mksi:OtherComprehensiveIncomeGainLossDefinedBenefitPlanNetActuarialGainLossOnPensionAndPostretirementBenefitsAfterTaxAndReclassificationAdjustmentAttributableToParent

mksi:OtherComprehensiveIncomeGainLossDefinedBenefitPlanNetActuarialGainLossOnPensionAndPostretirementBenefitsAfterTaxAndReclassificationAdjustmentAttributableToParent


Other
Period End2021-06-302020-09-302020-06-302019-09-30
Value300000.0100000.0-100000.0100000.0
Percentage of OtherComprehensiveIncomeGainLossDefinedBenefitPlanNetActuarialGainLossOnPensionAndPostretirementBenefitsAfterTaxAndReclassificationAdjustmentAttributableToParent100.0100.0100.0100.0

mksi:OtherCosts

mksi:OtherCosts


Other
Period End2021-06-302021-03-312020-06-302020-03-31
Value900000.02100000.01800000.0700000.0
Percentage of OtherCosts100.0100.0100.0100.0

mksi:PaymentsAndAdjustmentForRestructuring

mksi:PaymentsAndAdjustmentForRestructuring


Payments
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-31
Value-3400000.0-1100000.0-9900000.0-2600000.04700000.01700000.01354000.01629000.01193000.0252000.0216000.01236000.0921000.01806000.0608000.022000.0239000.0347000.0
Percentage of PaymentsAndAdjustmentForRestructuring100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0

mksi:PaymentsForProceedsFromTenantAllowanceYearTwo

mksi:PaymentsForProceedsFromTenantAllowanceYearTwo


Payments
Period End2021-06-302021-03-31
Value-1700000.03600000.0
Percentage of PaymentsForProceedsFromTenantAllowanceYearTwo100.0100.0

mksi:PercentageOfBorrowingBasedOnEligibleAccountsReceivable us-gaap:BusinessAcquisition, us-gaap:CreditFacility, us-gaap:DebtInstrument

mksi:PercentageOfBorrowingBasedOnEligibleAccountsReceivable

mksi:ElectroScientificIndustriesInc, us-gaap:SecuredDebt, mksi:AssetBasedCreditAgreement


Percentage
Period End2021-06-302021-03-312020-12-31
Value085.00
Percentage of PercentageOfBorrowingBasedOnEligibleAccountsReceivable0.0100.00.0

mksi:PercentageOfBorrowingBasedOnLowerOfCostOrMarketValueOfCertainEligibleInventory us-gaap:BusinessAcquisition, us-gaap:CreditFacility, us-gaap:DebtInstrument

mksi:PercentageOfBorrowingBasedOnLowerOfCostOrMarketValueOfCertainEligibleInventory

mksi:ElectroScientificIndustriesInc, us-gaap:SecuredDebt, mksi:AssetBasedCreditAgreement


Percentage
Period End2021-06-302021-03-312020-12-31
Value065.00
Percentage of PercentageOfBorrowingBasedOnLowerOfCostOrMarketValueOfCertainEligibleInventory0.0100.00.0

mksi:PercentageOfBorrowingBasedOnLowerOfNetBookValueOfEligibleInventory us-gaap:BusinessAcquisition, us-gaap:CreditFacility, us-gaap:DebtInstrument

mksi:PercentageOfBorrowingBasedOnLowerOfNetBookValueOfEligibleInventory

mksi:ElectroScientificIndustriesInc, us-gaap:SecuredDebt, mksi:AssetBasedCreditAgreement


Percentage
Period End2021-06-302021-03-312020-12-31
Value020.00
Percentage of PercentageOfBorrowingBasedOnLowerOfNetBookValueOfEligibleInventory0.0100.00.0

mksi:PercentageOfBorrowingBasedOnNetOrderlyLiquidationValueOfCertainEligibleInventory us-gaap:BusinessAcquisition, us-gaap:CreditFacility, us-gaap:DebtInstrument

mksi:PercentageOfBorrowingBasedOnNetOrderlyLiquidationValueOfCertainEligibleInventory

mksi:ElectroScientificIndustriesInc, us-gaap:SecuredDebt, mksi:AssetBasedCreditAgreement


Percentage
Period End2021-06-302021-03-312020-12-31
Value085.00
Percentage of PercentageOfBorrowingBasedOnNetOrderlyLiquidationValueOfCertainEligibleInventory0.0100.00.0

mksi:PercentageOfLineOfCreditFacilityExcessAvailabilityCommitmentFee us-gaap:Range, us-gaap:BusinessAcquisition, us-gaap:CreditFacility, us-gaap:DebtInstrument

mksi:PercentageOfLineOfCreditFacilityExcessAvailabilityCommitmentFee

srt:Maximum, mksi:NewportCorporation, us-gaap:SecuredDebt, mksi:AssetBasedCreditAgreement


Percentage
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-31
Value010.009.900.1
Percentage of PercentageOfLineOfCreditFacilityExcessAvailabilityCommitmentFee0.0100.00.0100.00.0100.0

srt:Minimum, mksi:NewportCorporation, us-gaap:SecuredDebt, mksi:AssetBasedCreditAgreement


Percentage
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-31
Value010.009.900.1
Percentage of PercentageOfLineOfCreditFacilityExcessAvailabilityCommitmentFee0.0100.00.0100.00.0100.0

mksi:ProceedsFromPaymentsForEmployeeStockAwards

mksi:ProceedsFromPaymentsForEmployeeStockAwards


Proceeds
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302016-03-312015-12-312015-09-302015-06-302015-03-312014-12-312014-03-312013-12-312013-09-302013-06-302013-03-312012-12-312012-09-30
Value-2.3-5.34.7-4.5-0.5-20.40.718-0.716-2.025-8.9872.537-0.589-4.131-8.9212.503-1.306-10.519-2.8941.186-0.187-0.334-2.5872.0620.3240.981-2.1052.035-0.7622.0-0.038-1.175-1.2512.3940.258
Percentage of ProceedsFromPaymentsForEmployeeStockAwards100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0

mksi:RestructuringAndOtherCharges

mksi:RestructuringAndOtherCharges


Restructuring
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-30
Value3000000.04900000.02600000.03100000.03300000.0400000.02293000.01525000.01242000.01900000.0193000.01364000.0790000.0
Percentage of RestructuringAndOtherCharges100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0

mksi:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsAccruedDividendEquivalentsWeightedAverageGrantDateFairValue us-gaap:AwardType, us-gaap:PlanName

mksi:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsAccruedDividendEquivalentsWeightedAverageGrantDateFairValue

mksi:Shares, mksi:StockIncentivePlanTwoThousandFourteen


Share
Period End2021-03-31
Value153.0
Percentage of ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsAccruedDividendEquivalentsWeightedAverageGrantDateFairValue100.0

mksi:TenantImprovementsAllowanceReceipts

mksi:TenantImprovementsAllowanceReceipts


Tenant
Period End2021-06-302021-03-31
Value1.72.8
Percentage of TenantImprovementsAllowanceReceipts100.0100.0

mksi:WeightedAverageNumberOfDilutedShares

mksi:WeightedAverageNumberOfDilutedShares


Weighted
Period End2021-06-302021-03-312020-06-302020-03-31
Value55555555
Percentage of WeightedAverageNumberOfDilutedShares100.0100.0100.0100.0

us-gaap:AmortizationOfFinancingCostsAndDiscounts

us-gaap:AmortizationOfFinancingCostsAndDiscounts


Amortization
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-30
Value0.70.50.60.50.51.10.523.6011.7511.2020.9340.8970.8682.0194.3142.6431.0272.7152.8124.045
Percentage of AmortizationOfFinancingCostsAndDiscounts100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0

us-gaap:AssetImpairmentCharges

us-gaap:AssetImpairmentCharges


Asset
Period End2020-12-312020-09-302020-06-302020-03-312017-06-30
Value1100000.0001200000.06719000.0
Percentage of AssetImpairmentCharges100.00.00.0100.0100.0

us-gaap:BusinessCombinationAcquisitionRelatedCosts

us-gaap:BusinessCombinationAcquisitionRelatedCosts


Business
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302016-03-312015-12-312015-09-302015-06-302015-03-312014-12-312014-09-302014-06-302014-03-312013-12-312013-09-302013-06-302013-03-31
Value6.06.20.40.50.72.21.7522.1033.24304.2450.036-1.1680.6342.4660.791.442160.2338.2052.4940.00.00.00.030.00.00.2710.2280.00.00.00.171
Percentage of BusinessCombinationAcquisitionRelatedCosts100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.00.00.00.0100.00.00.0100.0100.00.00.00.0100.0

us-gaap:CommonStockDividendsPerShareCashPaid

us-gaap:CommonStockDividendsPerShareCashPaid


Common
Period End2020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302016-03-312015-12-312015-09-302015-06-302015-03-312014-12-312014-09-302014-06-302014-03-312013-12-312013-09-302013-06-302013-03-312012-12-312012-09-302012-06-302012-03-312011-12-312011-09-302011-06-302011-03-31
Value0.20.20.20.20.20.20.40.20.20.20.20.180.180.1750.1750.1750.170.170.170.170.170.170.170.1650.1650.1650.1650.160.160.160.160.160.160.160.150.150.150.150.150.15
Percentage of CommonStockDividendsPerShareCashPaid100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0

us-gaap:ConcentrationRiskPercentage1 us-gaap:MajorCustomers, us-gaap:ConcentrationRiskByBenchmark, us-gaap:ConcentrationRiskByType

us-gaap:ConcentrationRiskPercentage1

mksi:CustomerOne, us-gaap:SalesRevenueNet, us-gaap:CustomerConcentrationRisk


Concentration
Period End2021-06-302021-03-312020-09-302020-06-302020-03-312018-09-302018-06-302017-09-302017-06-30
Value12.413.014.10.120.10.120.1290.120.13
Percentage of ConcentrationRiskPercentage1100.0100.0100.0100.0100.0100.0100.0100.0100.0

mksi:CustomerTwo, us-gaap:SalesRevenueNet, us-gaap:CustomerConcentrationRisk


Concentration
Period End2021-06-302021-03-312020-09-302020-06-302020-03-312018-09-302018-06-302017-09-302017-06-30
Value10.911.011.00.110.110.080.1310.110.108
Percentage of ConcentrationRiskPercentage187.984.678.091.7110.066.7101.691.783.1

us-gaap:ContractWithCustomerLiabilityRevenueRecognized

us-gaap:ContractWithCustomerLiabilityRevenueRecognized


Contract
Period End2020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-31
Value27201736111313
Percentage of ContractWithCustomerLiabilityRevenueRecognized100.0100.0100.0100.0100.0100.0100.0

us-gaap:DebtInstrumentBasisSpreadOnVariableRate1 us-gaap:BusinessAcquisition, us-gaap:CreditFacility, us-gaap:DebtInstrument

us-gaap:DebtInstrumentBasisSpreadOnVariableRate1

mksi:NewportCorporation, mksi:SecuredDebtRepricingAmendmentOne, mksi:IncrementalTermLoanFacility


Debt
Period End2021-03-312020-03-312019-03-31
Value1.90.03350.047
Percentage of DebtInstrumentBasisSpreadOnVariableRate1100.0100.0100.0

mksi:NewportCorporation, us-gaap:SecuredDebt, mksi:AssetBasedCreditAgreement


Debt
Period End2021-03-312020-03-31
Value0.50.005
Percentage of DebtInstrumentBasisSpreadOnVariableRate126.314.9

us-gaap:DebtInstrumentBasisSpreadOnVariableRate1 us-gaap:BusinessAcquisition, us-gaap:CreditFacility, us-gaap:DebtInstrument, us-gaap:VariableRate

mksi:NewportCorporation, us-gaap:SecuredDebt, mksi:AssetBasedCreditAgreement, mksi:AdjustedOneMonthLibor


Debt
Period End2021-03-312020-03-312019-03-312017-03-31
Value1.00.010.010.01
Percentage of DebtInstrumentBasisSpreadOnVariableRate152.629.921.30.0

mksi:NewportCorporation, us-gaap:SecuredDebt, mksi:AssetBasedCreditAgreement, mksi:FederalFundsRate


Debt
Period End2021-03-312020-03-312019-03-312017-03-31
Value0.50.0050.0050.005
Percentage of DebtInstrumentBasisSpreadOnVariableRate126.314.910.60.0

mksi:NewportCorporation, us-gaap:SecuredDebt, mksi:AssetBasedCreditAgreement, us-gaap:LondonInterbankOfferedRateLIBOR


Debt
Period End2021-03-312020-03-312019-03-312017-03-31
Value1.50.0150.0150.0175
Percentage of DebtInstrumentBasisSpreadOnVariableRate178.944.831.90.0

mksi:NewportCorporation, us-gaap:SecuredDebt, mksi:TermLoanCreditAgreement, mksi:AdjustedOneMonthLibor


Debt
Period End2021-03-312020-03-312019-03-312018-03-312017-03-31
Value1.00.010.010.010.01
Percentage of DebtInstrumentBasisSpreadOnVariableRate152.629.921.30.00.0

mksi:NewportCorporation, us-gaap:SecuredDebt, mksi:TermLoanCreditAgreement, mksi:FederalFundsRate


Debt
Period End2021-03-312020-03-312019-03-312018-03-312017-03-31
Value0.50.0050.0050.0050.005
Percentage of DebtInstrumentBasisSpreadOnVariableRate126.314.910.60.00.0

mksi:NewportCorporation, us-gaap:SecuredDebt, mksi:TermLoanCreditAgreement, us-gaap:InterestRateFloor


Debt
Period End2021-03-312020-03-31
Value1.750.0175
Percentage of DebtInstrumentBasisSpreadOnVariableRate192.152.2

us-gaap:DebtInstrumentBasisSpreadOnVariableRate1 us-gaap:BusinessAcquisition, us-gaap:CreditFacility, us-gaap:VariableRate

mksi:NewportCorporation, us-gaap:SecuredDebt, us-gaap:BaseRate


Debt
Period End2021-03-312020-03-31
Value0.750.0075
Percentage of DebtInstrumentBasisSpreadOnVariableRate139.522.4

us-gaap:DebtInstrumentBasisSpreadOnVariableRate1 us-gaap:BusinessAcquisition, us-gaap:DebtInstrument, us-gaap:VariableRate

mksi:NewportCorporation, mksi:TwoThousandNineteenTermLoanRefinancingFacility, us-gaap:LondonInterbankOfferedRateLIBOR


Debt
Period End2021-03-312020-03-31
Value1.750.0175
Percentage of DebtInstrumentBasisSpreadOnVariableRate192.152.2

us-gaap:DebtInstrumentBasisSpreadOnVariableRate1 us-gaap:CreditFacility, us-gaap:DebtInstrument, us-gaap:VariableRate

mksi:IncrementalTermLoanFacility, mksi:TermLoanCreditAgreement, us-gaap:LondonInterbankOfferedRateLIBOR


Debt
Period End2021-03-312020-03-31
Value2.00.02
Percentage of DebtInstrumentBasisSpreadOnVariableRate1105.359.7

mksi:RepricingAmendment, mksi:TermLoanCreditAgreement, mksi:LiborFloorRate


Debt
Period End2021-03-312020-03-312019-03-31
Value0.750.00750.0075
Percentage of DebtInstrumentBasisSpreadOnVariableRate139.522.416.0

us-gaap:DebtInstrumentBasisSpreadOnVariableRate1 us-gaap:Range, us-gaap:CreditFacility, us-gaap:DebtInstrument, us-gaap:VariableRate

srt:Maximum, mksi:RepricingAmendment, mksi:TermLoanCreditAgreement, us-gaap:LondonInterbankOfferedRateLIBOR


Debt
Period End2021-03-312020-03-312019-03-31
Value4.00.040.04
Percentage of DebtInstrumentBasisSpreadOnVariableRate1210.5119.485.1

srt:Minimum, mksi:RepricingAmendment, mksi:TermLoanCreditAgreement, us-gaap:LondonInterbankOfferedRateLIBOR


Debt
Period End2021-03-312020-03-312019-03-31
Value1.750.01750.0175
Percentage of DebtInstrumentBasisSpreadOnVariableRate192.152.237.2

us-gaap:DebtInstrumentPeriodicPaymentPrincipal us-gaap:BusinessAcquisition, us-gaap:CreditFacility, us-gaap:DebtInstrument

us-gaap:DebtInstrumentPeriodicPaymentPrincipal

mksi:NewportCorporation, mksi:SecuredDebtRepricingAmendmentOne, mksi:IncrementalTermLoanFacility


Debt
Period End2021-03-312020-12-312020-09-302020-06-302020-03-31
Value232.22.32.214
Percentage of DebtInstrumentPeriodicPaymentPrincipal100.0100.0100.0100.0100.0

us-gaap:DepreciationAndAmortization

us-gaap:DepreciationAndAmortization


Depreciation
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302016-03-312015-12-312015-09-302015-06-302015-03-312014-12-312014-09-302014-06-302014-03-312013-12-312013-09-302013-06-302013-03-312012-12-312012-09-302012-03-31
Value2423232324283027272519191920202020212222165.2785.4975.5245.555.5325.7575.7924.8154.154.3874.2454.3784.0924.2453.643.143
Percentage of DepreciationAndAmortization100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0

us-gaap:DepreciationAndAmortization us-gaap:StatementBusinessSegments

mksi:EquipmentAndSolutions


Depreciation
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-31
Value8.79.08.58.68.510129.994107.026
Percentage of DepreciationAndAmortization34.937.836.336.935.335.640.236.737.227.9

mksi:LightAndMotionSegment


Depreciation
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-30
Value9.89.09.79.61013131213141414141514151516161611
Percentage of DepreciationAndAmortization39.437.841.541.243.647.244.547.848.456.171.874.075.075.074.974.975.276.576.676.768.3

mksi:VacuumAndAnalysisSegment


Depreciation
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302016-03-31
Value6.45.85.25.15.14.94.6184.2223.9414.0455.6285.0834.9685.1295.025.0585.0975.1225.1925.1425.2095.278
Percentage of DepreciationAndAmortization25.724.422.221.921.217.315.315.514.416.028.226.025.025.025.125.124.823.523.423.331.7100.0

us-gaap:DerivativeInstrumentsGainLossReclassifiedFromAccumulatedOCIIntoIncomeEffectivePortionNet us-gaap:DerivativeInstrumentRisk, us-gaap:DerivativeInstrumentsGainLossByHedgingRelationship

us-gaap:DerivativeInstrumentsGainLossReclassifiedFromAccumulatedOCIIntoIncomeEffectivePortionNet

us-gaap:CashFlowHedging, us-gaap:ForeignExchangeForward


Derivative
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-30
Value-400000.0-1500000.0-500000.0400000.01100000.0700000.01600000.02000000.01100000.0
Percentage of DerivativeInstrumentsGainLossReclassifiedFromAccumulatedOCIIntoIncomeEffectivePortionNet100.0100.0100.0100.0100.0100.0100.0100.0100.0

us-gaap:DividendsCommonStockCash

us-gaap:DividendsCommonStockCash


Dividends
Period End2021-06-302021-03-312020-09-302020-06-302020-03-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-31
Value12111111111010101010109.808
Percentage of DividendsCommonStockCash100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0

us-gaap:DividendsCommonStockCash us-gaap:StatementEquityComponents

us-gaap:RetainedEarnings


Dividends
Period End2021-06-302021-03-312020-09-302020-06-302020-03-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-31
Value12111111111010101010109.808
Percentage of DividendsCommonStockCash100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0

us-gaap:EffectOfExchangeRateOnCashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsIncludingDisposalGroupAndDiscontinuedOperations

us-gaap:EffectOfExchangeRateOnCashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsIncludingDisposalGroupAndDiscontinuedOperations


Effect
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-31
Value-2100000.0-2700000.04100000.02300000.02000000.0-4000000.04400000.0-5600000.0-2100000.0100000.0
Percentage of EffectOfExchangeRateOnCashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsIncludingDisposalGroupAndDiscontinuedOperations100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0

us-gaap:FiniteLivedIntangibleAssetsForeignCurrencyTranslationGainLoss

us-gaap:FiniteLivedIntangibleAssetsForeignCurrencyTranslationGainLoss


Finite
Period End2020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-30
Value-1500000.0-1400000.0-500000.02000000.0-852000.01474000.0-215000.0940000.0526000.0406000.02575000.0-3152000.0-991000.0-1458000.0-2834000.03453000.03247000.0-278000.0
Percentage of FiniteLivedIntangibleAssetsForeignCurrencyTranslationGainLoss100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0

us-gaap:FiniteLivedIntangibleAssetsForeignCurrencyTranslationGainLoss us-gaap:FiniteLivedIntangibleAssetsByMajorClass

mksi:PatentsTrademarksTradeNamesAndOther


Finite
Period End2021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-30
Value200000.000400000.0-200000.0-73000.0-41000.0-67000.0-41000.010000.04000.044000.0-45000.032000.00-31000.073000.038000.065000.0
Percentage of FiniteLivedIntangibleAssetsForeignCurrencyTranslationGainLoss0.0-0.0-0.0-80.0-10.08.6-2.831.2-4.41.91.01.71.4-3.2-0.01.12.11.2-23.4

us-gaap:CustomerRelationships


Finite
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-30
Value-500000.0-300000.0-1500000.0-1300000.0-700000.01800000.0-705000.01389000.0-142000.0819000.0443000.0376000.02132000.0-2682000.0-739000.0-1178000.0-2288000.02634000.02450000.0-160000.0
Percentage of FiniteLivedIntangibleAssetsForeignCurrencyTranslationGainLoss0.00.0100.092.9140.090.082.794.266.087.184.292.682.885.174.680.880.776.375.557.6

us-gaap:PatentedTechnology


Finite
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-30
Value0100000.00-100000.0-200000.0400000.0-74000.0126000.0-6000.0162000.0399000.0-425000.0-284000.0-280000.0-515000.0746000.0778000.0-76000.0
Percentage of FiniteLivedIntangibleAssetsForeignCurrencyTranslationGainLoss0.00.0-0.07.140.020.08.78.52.817.215.513.528.719.218.221.624.027.3

us-gaap:GainLossOnForeignCurrencyDerivativeInstrumentsNotDesignatedAsHedgingInstruments us-gaap:DerivativeInstrumentRisk

us-gaap:GainLossOnForeignCurrencyDerivativeInstrumentsNotDesignatedAsHedgingInstruments

us-gaap:ForeignExchangeForward


Gain
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302016-03-312015-12-312015-09-30
Value-6000000.0-800000.0-900000.0-600000.0-200000.0200000.0-1148000.082000.0-305000.057000.093000.0-111000.01375000.0-1253000.0-857000.0-877000.0-219000.0-1463000.01252000.0-339000.0-378000.0-565000.0-1371000.0116000.0
Percentage of GainLossOnForeignCurrencyDerivativeInstrumentsNotDesignatedAsHedgingInstruments100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0

us-gaap:GoodwillForeignCurrencyTranslationGainLoss

us-gaap:GoodwillForeignCurrencyTranslationGainLoss


Goodwill
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-30
Value1600000.0-4300000.05400000.04000000.01700000.0-2100000.0000000000000
Percentage of GoodwillForeignCurrencyTranslationGainLoss100.0100.0100.0100.0100.0100.00.00.00.00.00.00.00.00.00.00.00.00.0

us-gaap:ImpairmentOfIntangibleAssetsIndefinitelivedExcludingGoodwill

us-gaap:ImpairmentOfIntangibleAssetsIndefinitelivedExcludingGoodwill


Impairment
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-30
Value100000.01500000.00001500000.00001511000.00001511000.000
Percentage of ImpairmentOfIntangibleAssetsIndefinitelivedExcludingGoodwill100.0100.00.00.00.0100.00.00.00.0100.00.00.00.0100.00.00.0

us-gaap:ImpairmentOfIntangibleAssetsIndefinitelivedExcludingGoodwill us-gaap:FiniteLivedIntangibleAssetsByMajorClass

us-gaap:CustomerRelationships


Impairment
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-30
Value01400000.00001400000.00001406000.00001406000.000
Percentage of ImpairmentOfIntangibleAssetsIndefinitelivedExcludingGoodwill0.093.30.00.00.093.30.00.00.093.10.00.00.093.10.00.0

us-gaap:PatentedTechnology


Impairment
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-30
Value0100000.0000100000.0000105000.0000105000.000
Percentage of ImpairmentOfIntangibleAssetsIndefinitelivedExcludingGoodwill0.06.70.00.00.06.70.00.00.06.90.00.00.06.90.00.0

us-gaap:IncreaseDecreaseInAccountsPayableTrade

us-gaap:IncreaseDecreaseInAccountsPayableTrade


Increase
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302016-03-312015-12-312015-09-302015-06-302015-03-312014-12-312014-09-302014-06-302014-03-312013-12-312013-09-302013-06-302013-03-312012-12-312012-09-302012-06-302012-03-312011-12-312011-09-302011-06-302011-03-312010-12-312010-09-302010-06-302010-03-31
Value1.136-3.57.8-6.022-0.160.674-7.372-17.2942.408-5.989-3.7179.3214.3344.2112.0510.8092.076.6532.6854.772-3.087-7.516-3.6133.5873.694.37-8.882-4.656122.7873.1694.5120.469-7.3850.924-2.2892.316-11.065-1.171-1.726-1.012-1.7273.23710
Percentage of IncreaseDecreaseInAccountsPayableTrade100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0

us-gaap:IncreaseDecreaseInAccruedSalaries

us-gaap:IncreaseDecreaseInAccruedSalaries


Increase
Period End2021-06-302021-03-312020-09-302020-06-302020-03-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302016-03-312015-12-312015-09-302015-06-302015-03-312014-12-312014-09-302014-06-302014-03-312013-12-312013-09-302013-06-302013-03-31
Value23-41.9-8.722-19.34.3595.149-22.9576.880.40416-32.531211116-16.7866.5054.0697.477-7.086-0.2846.0582.491-4.930.5165.583-12.79-6.8727.0286.6932.227-2.271
Percentage of IncreaseDecreaseInAccruedSalaries100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0

us-gaap:IncreaseDecreaseInIncomeTaxesPayableNetOfIncomeTaxesReceivable

us-gaap:IncreaseDecreaseInIncomeTaxesPayableNetOfIncomeTaxesReceivable


Increase
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302016-03-312015-12-312015-09-302015-06-302015-03-312014-12-312014-09-302014-06-302014-03-312013-12-312013-09-302013-06-302013-03-312012-12-31
Value-41.90.30.2127.91.0-11.6143.181-0.288-3.6532.444-2.458-20.2388.822-2.841-6.272138.06710134.1042.316-18.9234.0574.372.034-5.979-9.556-11.747-5.462237.532-0.392-3.253-3.841
Percentage of IncreaseDecreaseInIncomeTaxesPayableNetOfIncomeTaxesReceivable100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0

us-gaap:IncreaseDecreaseInOtherOperatingAssets

us-gaap:IncreaseDecreaseInOtherOperatingAssets


Increase
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312017-03-312016-09-302016-06-302016-03-312015-12-312015-09-302015-06-302015-03-312014-12-312014-09-302014-06-302014-03-312013-12-312013-09-302013-06-302013-03-312012-12-312012-09-302012-06-302012-03-312011-12-312011-09-302011-06-302011-03-312010-12-312010-09-302010-06-302010-03-31
Value-0.9-6.3-30.05.4-6.2-10.1-8.4175.7-4.80.674-4.8027.9010.1891.0850.2867.956-7.8012.088-2.712-0.3371.2861.2320.014-1.6061.801-4.7051.038-0.503-3.519-2.142-0.0698.8371.048-2.0491.0570.5510.145
Percentage of IncreaseDecreaseInOtherOperatingAssets100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0

us-gaap:IncreaseDecreaseInOtherOperatingLiabilities

us-gaap:IncreaseDecreaseInOtherOperatingLiabilities


Increase
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302016-03-312015-12-312015-09-302015-06-302015-03-312014-12-312014-09-302014-06-302014-03-312013-12-312013-09-30
Value1311-20.74.1138.0-11.443.289-0.6320.359-12.882-0.978-0.63210-4.487173.8881.082-0.8875.561-8.7117.718-7.354-2.3054.1272.735-6.4355.3862.0062.512-5.2192.26
Percentage of IncreaseDecreaseInOtherOperatingLiabilities100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0

us-gaap:IncrementalCommonSharesAttributableToShareBasedPaymentArrangements

us-gaap:IncrementalCommonSharesAttributableToShareBasedPaymentArrangements


Incremental
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302016-03-312015-12-312015-09-302015-06-302015-03-312014-12-312014-09-302014-06-302014-03-312013-12-312013-09-302013-06-302013-03-312012-12-312012-09-302012-06-302012-03-312011-12-312011-09-302011-06-302011-03-312010-12-312010-09-302010-06-30
Value300000.0362000.014000.0226000.0178000.0318000.0-9000.0259000.0274000.0701000.0-46000.0478000.0555000.0863000.0-7000.0819000.0823000.01189000.0107000.0741000.0345000.0328000.020000.0254000.0205000.0315000.018000.0256000.0176000.0365000.08000.0348000.0304000.0586000.0-13000.0436000.0527000.0718000.0-13000.0536000.0560000.0979000.0-6000.0768000.0803000.0
Percentage of IncrementalCommonSharesAttributableToShareBasedPaymentArrangements100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0

us-gaap:InterestAndOtherIncome

us-gaap:InterestAndOtherIncome


Interest
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302016-03-312015-12-312015-09-302015-06-302015-03-312014-12-312014-09-302014-06-302014-03-312013-12-312013-09-302013-06-302013-03-312012-12-312012-09-302012-06-302012-03-31
Value100000.0200000.0300000.0100000.0300000.0700000.01086000.01230000.01423000.01714000.01698000.01516000.01456000.01105000.01125000.0873000.0507000.0516000.0702000.0404000.0569000.01246000.0852000.0778000.0828000.0541000.0428000.0399000.0243000.0252000.0239000.0221000.0234000.0305000.0299000.0299000.0200000.0261000.0
Percentage of InterestAndOtherIncome100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0

us-gaap:InventoryWriteDown

us-gaap:InventoryWriteDown


Inventory
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302016-03-312015-12-312015-09-302015-06-302015-03-312014-12-312014-09-302014-06-302014-03-312013-12-312013-09-302013-06-302013-03-312012-12-312012-09-302012-06-302012-03-312011-12-312011-09-302011-06-302011-03-312010-12-312010-09-302010-06-302010-03-31
Value3.94.95.06.96.76.26.1356.5466.995.0636.7495.2834.9595.3334.8644.3475.9715.0314.9944.3083.7892.9484.3672.93.6522.6833.4243.1752.9192.6135.1179.1824.2113.1612.4324.2194.1144.2633.9334.4663.3923.0664.4263.8783.0011.925
Percentage of InventoryWriteDown100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0

us-gaap:LeaseCost

us-gaap:LeaseCost


Lease
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-31
Value7.58.88.38.68.78.57.57.06.76.3
Percentage of LeaseCost100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0

us-gaap:LineOfCreditFacilityCommitmentFeePercentage

us-gaap:LineOfCreditFacilityCommitmentFeePercentage


Line
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-31
Value010.009.900.1
Percentage of LineOfCreditFacilityCommitmentFeePercentage0.0100.00.0100.00.0100.0

us-gaap:LineOfCreditFacilityCommitmentFeePercentage us-gaap:DebtInstrument

mksi:AssetBasedCreditAgreement


Line
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-31
Value010.009.900.1
Percentage of LineOfCreditFacilityCommitmentFeePercentage0.0100.00.0100.00.0100.0

us-gaap:LineOfCreditFacilityUnusedCapacityCommitmentFeePercentage us-gaap:BusinessAcquisition, us-gaap:CreditFacility, us-gaap:DebtInstrument

us-gaap:LineOfCreditFacilityUnusedCapacityCommitmentFeePercentage

mksi:NewportCorporation, us-gaap:SecuredDebt, mksi:AssetBasedCreditAgreement


Line
Period End2021-06-302021-03-312020-12-31
Value00.250
Percentage of LineOfCreditFacilityUnusedCapacityCommitmentFeePercentage0.0100.00.0

us-gaap:OperatingLeaseCost

us-gaap:OperatingLeaseCost


Operating
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-31
Value6.47.77.17.27.67.35.5066.3136.0045.0
Percentage of OperatingLeaseCost100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0

us-gaap:OperatingLeasePayments

us-gaap:OperatingLeasePayments


Operating
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-31
Value4.63.8-2.43.66.75.16.05.95.85.7
Percentage of OperatingLeasePayments100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0

us-gaap:OtherComprehensiveIncomeAvailableforsaleSecuritiesAdjustmentNetOfTaxPortionAttributableToParent

us-gaap:OtherComprehensiveIncomeAvailableforsaleSecuritiesAdjustmentNetOfTaxPortionAttributableToParent


Other
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302016-03-31
Value-600000.0400000.00100000.00100000.0155000.016000.0-96000.0-50000.058000.0230000.0-266000.0-59000.0-65000.01301000.0-168000.0-126000.0-201000.0-31000.068000.0378000.0
Percentage of OtherComprehensiveIncomeAvailableforsaleSecuritiesAdjustmentNetOfTaxPortionAttributableToParent100.0100.00.0100.00.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0

us-gaap:OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent

us-gaap:OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent


Other
Period End2021-03-312020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-31
Value400000.0-100000.0628000.0-91000.0-2000.01000.0-162000.0-24000.0-48000.085000.0-527000.0565000.0-123000.0-115000.0
Percentage of OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0

us-gaap:OtherComprehensiveIncomeDerivativesQualifyingAsHedgesNetOfTaxPortionAttributableToParent

us-gaap:OtherComprehensiveIncomeDerivativesQualifyingAsHedgesNetOfTaxPortionAttributableToParent


Other
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302016-03-31
Value-0.111-2.9-0.6-1.0-6.0-1.459-0.782-0.7390.052-3.1110.1637.7120.178-0.99-0.9080.023-2.445.484-0.229-0.319-1.546
Percentage of OtherComprehensiveIncomeDerivativesQualifyingAsHedgesNetOfTaxPortionAttributableToParent100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0

us-gaap:OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent

us-gaap:OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent


Other
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302016-03-31
Value5.5-18.822176.2-11.212-14.5530.593-4.268-2.847-3.576-18.508106.828.088174.534-22.1775.698-8.8862.652
Percentage of OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0

us-gaap:OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParent

us-gaap:OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParent


Other
Period End2021-06-302021-03-312020-09-302020-06-302020-03-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-31
Value5.1-7.8165.1-17.0-15.229-7.325-4.267-5.738-3.16-11.01410
Percentage of OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParent100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0

us-gaap:OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParent us-gaap:StatementEquityComponents

us-gaap:AociIncludingPortionAttributableToNoncontrollingInterest


Other
Period End2021-06-302021-03-312020-09-302020-06-302020-03-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-31
Value5.1-7.8165.1-17.0-15.229-7.325-4.267-5.738-3.16-11.01410
Percentage of OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParent100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0

us-gaap:OtherComprehensiveIncomeUnrealizedGainLossOnDerivativesArisingDuringPeriodBeforeTax us-gaap:DerivativeInstrumentRisk, us-gaap:DerivativeInstrumentsGainLossByHedgingRelationship

us-gaap:OtherComprehensiveIncomeUnrealizedGainLossOnDerivativesArisingDuringPeriodBeforeTax

us-gaap:CashFlowHedging, us-gaap:ForeignExchangeForward


Other
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-30
Value-0.111-2.9-0.6-1.0-6.01.2-1.0-10.2
Percentage of OtherComprehensiveIncomeUnrealizedGainLossOnDerivativesArisingDuringPeriodBeforeTax100.0100.0100.0100.0100.0100.0100.0100.0100.0

us-gaap:OtherNoncashIncomeExpense

us-gaap:OtherNoncashIncomeExpense


Other
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302016-03-312015-12-312015-09-302015-06-302015-03-312014-12-312014-09-302014-06-302014-03-312013-12-312013-09-302013-06-302013-03-312012-12-312012-09-302012-06-302012-03-312011-12-312011-09-302011-06-302011-03-312010-12-312010-09-30
Value-300000.0-100000.01000000.0-1300000.0-400000.0100000.0-506000.0553000.0-851000.0-66000.0-2118000.0-71000.0-426000.0-34000.08000.0-36000.0-711000.0-85000.0-131000.0-53000.0-4000.0-68000.0-27000.0-45000.0-202000.0-1000.0-115000.00-165000.0141000.01034000.0-233000.0-65000.0-936000.0-319000.0-124000.046000.0-532000.0-64000.0-204000.0-588000.0289000.0-60000.0-102000.0
Percentage of OtherNoncashIncomeExpense100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.00.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0

us-gaap:OtherRestructuringCosts

us-gaap:OtherRestructuringCosts


Other
Period End2020-12-312020-09-30
Value1300000.02300000.0
Percentage of OtherRestructuringCosts100.0100.0

us-gaap:PaymentsForProceedsFromTenantAllowance

us-gaap:PaymentsForProceedsFromTenantAllowance


Payments
Period End2020-12-31
Value1500000.0
Percentage of PaymentsForProceedsFromTenantAllowance100.0

us-gaap:PaymentsToAcquireAvailableForSaleSecuritiesDebt

us-gaap:PaymentsToAcquireAvailableForSaleSecuritiesDebt


Payments
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-31
Value21118516416316430745373443964994930
Percentage of PaymentsToAcquireAvailableForSaleSecuritiesDebt100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0

us-gaap:PaymentsToAcquireBusinessesGross us-gaap:BusinessAcquisition, us-gaap:SubsequentEventType

us-gaap:PaymentsToAcquireBusinessesGross

mksi:AtotechLimited, us-gaap:SubsequentEvent


Payments
Period End2021-07-01
Value5.1
Percentage of PaymentsToAcquireBusinessesGross100.0

mksi:PhotonControlInc, us-gaap:SubsequentEvent


Payments
Period End2021-07-15
Value386
Percentage of PaymentsToAcquireBusinessesGross0.0

us-gaap:ProceedsFromBankDebt

us-gaap:ProceedsFromBankDebt


Proceeds
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-31
Value0.40.56.93.44.6120.0271.2412.3016387.045232511154.5217.9010.736
Percentage of ProceedsFromBankDebt100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0

us-gaap:ProceedsFromMaturitiesPrepaymentsAndCallsOfAvailableForSaleSecurities

us-gaap:ProceedsFromMaturitiesPrepaymentsAndCallsOfAvailableForSaleSecurities


Proceeds
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302016-03-312015-12-312015-09-302015-06-302015-03-312014-12-312014-09-302014-06-302014-03-312013-12-312013-09-302013-06-302013-03-312012-12-312012-09-302012-06-302012-03-31
Value1099515084474949522118464441494031295512343776484250383756491041649672841523619105
Percentage of ProceedsFromMaturitiesPrepaymentsAndCallsOfAvailableForSaleSecurities100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0

us-gaap:ProceedsFromSaleOfAvailableForSaleSecuritiesDebt

us-gaap:ProceedsFromSaleOfAvailableForSaleSecuritiesDebt


Proceeds
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-31
Value261078.2350.0284.54.7053.2211541394.505548.939.993
Percentage of ProceedsFromSaleOfAvailableForSaleSecuritiesDebt100.0100.0100.0100.00.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0

us-gaap:ProductWarrantyAccrualPeriodIncreaseDecrease

us-gaap:ProductWarrantyAccrualPeriodIncreaseDecrease


Product
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-31
Value-9200000.0-7500000.0-5800000.0-6800000.0-5900000.0-6300000.01109000.0-6791000.0-7713000.0-6705000.0-4620000.0-3744000.0-3255000.0-4073000.0
Percentage of ProductWarrantyAccrualPeriodIncreaseDecrease100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0

us-gaap:ProductWarrantyAccrualWarrantiesIssued

us-gaap:ProductWarrantyAccrualWarrantiesIssued


Product
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-31
Value11108.17.26.36.7-1.3035.8096.8296.0624.5392.9643.35.184
Percentage of ProductWarrantyAccrualWarrantiesIssued100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0

us-gaap:ProvisionForDoubtfulAccounts

us-gaap:ProvisionForDoubtfulAccounts


Provision
Period End2021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302016-03-312015-12-312015-09-302015-06-302015-03-312014-12-312014-09-302014-06-302014-03-312013-12-312013-09-302013-06-302013-03-31
Value-300000.0-100000.000200000.0-954000.0917000.0-251000.0-440000.0576000.0263000.0261000.0335000.0175000.0139000.0195000.0316000.0942000.082000.068000.017000.0103000.0-253000.067000.0-172000.0218000.0121000.0235000.094000.0-430000.044000.048000.0969000.0
Percentage of ProvisionForDoubtfulAccounts100.0100.00.00.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0

us-gaap:RepaymentsOfShortTermDebt

us-gaap:RepaymentsOfShortTermDebt


Repayments
Period End2021-03-312020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302015-09-302013-12-312013-09-302012-12-312012-09-302012-06-302012-03-312011-12-312011-09-302011-06-302011-03-312010-12-312010-09-302010-06-302010-03-31
Value5.49.91.4482.0011.750.1769.298291710164.027.8591.3983.4536.050.00.00.04.3920.1850.374.4011313111.46217432942
Percentage of RepaymentsOfShortTermDebt100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.00.00.00.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0

us-gaap:RestructuringCharges

us-gaap:RestructuringCharges


Restructuring
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302016-03-312015-12-312015-09-302015-06-302015-03-312014-12-312014-09-302014-06-302014-03-312013-12-312013-09-302013-06-302013-03-312012-12-31
Value2100000.02800000.01300000.0800000.03300000.0900000.02542000.01525000.01242000.0223000.0193000.01364000.0790000.01220000.01324000.010000.02064000.0522000.0618000.0024000.00505000.0562000.0219000.0788000.0494000.01223000.00747000.001126000.0198000.040000.0343000.0
Percentage of RestructuringCharges100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.00.0100.00.0100.0100.0100.0100.0100.0100.00.0100.00.0100.0100.0100.0100.0

us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeituresWeightedAverageGrantDateFairValue us-gaap:AwardType

us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeituresWeightedAverageGrantDateFairValue

us-gaap:RestrictedStockUnitsRSU


Share
Period End2020-09-302019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-31
Value0.98-0.03-1.4-0.1691.140.854.6-0.8661.631.521.432.5233.5
Percentage of ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeituresWeightedAverageGrantDateFairValue100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0

us-gaap:StockAppreciationRightsSARS


Share
Period End2020-09-302019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-31
Value00-0.02-4.8727.8900-2.1331.130.190.511.7925.58
Percentage of ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeituresWeightedAverageGrantDateFairValue0.0-0.01.43043.830.60.00.0247.750.512.535.771.076.4

us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeituresWeightedAverageGrantDateFairValue us-gaap:AwardType, us-gaap:PlanName

us-gaap:RestrictedStockUnitsRSU, mksi:StockIncentivePlanTwoThousandFourteen


Share
Period End2021-03-31
Value102.0
Percentage of ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeituresWeightedAverageGrantDateFairValue0.0

us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue us-gaap:AwardType, us-gaap:PlanName

us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue

us-gaap:RestrictedStockUnitsRSU, mksi:StockIncentivePlanTwoThousandFourteen


Share
Period End2021-06-302021-03-31
Value8.11170.6
Percentage of ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue100.0100.0

us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodWeightedAverageGrantDateFairValue us-gaap:AwardType

us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodWeightedAverageGrantDateFairValue

us-gaap:RestrictedStockUnitsRSU


Share
Period End2020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-31
Value0.221.0484.061.160.451.0967.570.10.393.2540.960.050.050.8933.59
Percentage of ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodWeightedAverageGrantDateFairValue100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0

us-gaap:StockAppreciationRightsSARS


Share
Period End2020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-31
Value0.233.3223.87-0.780.27-0.5427.340.01-0.141.0127.90.080.041.6725.81
Percentage of ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodWeightedAverageGrantDateFairValue104.5319.228.4-67.260.0-49.540.510.0-35.931.168.1160.080.0187.676.8

us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodWeightedAverageGrantDateFairValue us-gaap:AwardType, us-gaap:PlanName

us-gaap:RestrictedStockUnitsRSU, mksi:StockIncentivePlanTwoThousandFourteen


Share
Period End2021-06-302021-03-31
Value-2.1297.2
Percentage of ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodWeightedAverageGrantDateFairValue0.00.0

us-gaap:StockAppreciationRightsSARS, mksi:StockIncentivePlanTwoThousandFourteen


Share
Period End2021-03-31
Value29.92
Percentage of ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodWeightedAverageGrantDateFairValue0.0

us-gaap:ShortTermLeaseCost

us-gaap:ShortTermLeaseCost


Short
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-31
Value1100000.01100000.01200000.01400000.01100000.01200000.0900000.01100000.01000000.01300000.0
Percentage of ShortTermLeaseCost100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0

us-gaap:StockIssuedDuringPeriodValueShareBasedCompensation

us-gaap:StockIssuedDuringPeriodValueShareBasedCompensation


Stock
Period End2021-06-302021-03-312020-09-302020-06-302020-03-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-31
Value-2.4-5.3-4.5-0.5-20.4-0.629-2.113222.537-0.589-4.132-8.92
Percentage of StockIssuedDuringPeriodValueShareBasedCompensation100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0

us-gaap:StockIssuedDuringPeriodValueShareBasedCompensation us-gaap:StatementEquityComponents

us-gaap:AdditionalPaidInCapital


Stock
Period End2021-06-302021-03-312020-09-302020-06-302020-03-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-31
Value-2.4-5.3-4.5-0.5-20.4-0.629-2.113222.537-0.589-4.132-8.92
Percentage of StockIssuedDuringPeriodValueShareBasedCompensation100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0

us-gaap:UnrecognizedTaxBenefitsIncreasesResultingFromPriorPeriodTaxPositions

us-gaap:UnrecognizedTaxBenefitsIncreasesResultingFromPriorPeriodTaxPositions


Unrecognized
Period End2021-06-302021-03-312020-12-31
Value100000.04000000.03400000.0
Percentage of UnrecognizedTaxBenefitsIncreasesResultingFromPriorPeriodTaxPositions100.0100.0100.0

us-gaap:UnusualOrInfrequentItemNetGainLoss

us-gaap:UnusualOrInfrequentItemNetGainLoss


Unusual
Period End2020-12-312020-09-302020-06-30
Value00-1200000.0
Percentage of UnusualOrInfrequentItemNetGainLoss0.00.0100.0

mksi:AdditionalRightOfUseAssets

mksi:AdditionalRightOfUseAssets


Additional
Period End2020-12-31
Value151
Percentage of AdditionalRightOfUseAssets100.0

mksi:BenefitsOfTheTaxHoliDayPerShare

mksi:BenefitsOfTheTaxHoliDayPerShare


Benefits
Period End2020-12-312019-12-31
Value0.030.04
Percentage of BenefitsOfTheTaxHoliDayPerShare100.0100.0

mksi:BusinessCombinationPricePerShareOfCommonStockInCash us-gaap:BusinessAcquisition, us-gaap:SubsequentEventType

mksi:BusinessCombinationPricePerShareOfCommonStockInCash

mksi:AtotechLimited, us-gaap:SubsequentEvent


Business
Period End2021-07-01
Value16
Percentage of BusinessCombinationPricePerShareOfCommonStockInCash100.0

mksi:CoherentInc, us-gaap:SubsequentEvent


Business
Period End2021-02-04
Value115
Percentage of BusinessCombinationPricePerShareOfCommonStockInCash0.0

mksi:PhotonControlInc, us-gaap:SubsequentEvent


Business
Period End2021-07-15
Value3.6
Percentage of BusinessCombinationPricePerShareOfCommonStockInCash0.0

mksi:BusinessCombinationShareReceivedPerCommonStock us-gaap:BusinessAcquisition, us-gaap:SubsequentEventType

mksi:BusinessCombinationShareReceivedPerCommonStock

mksi:AtotechLimited, us-gaap:SubsequentEvent


Business
Period End2021-07-01
Value0.0552
Percentage of BusinessCombinationShareReceivedPerCommonStock100.0

mksi:CoherentInc, us-gaap:SubsequentEvent


Business
Period End2021-02-04
Value7473.0
Percentage of BusinessCombinationShareReceivedPerCommonStock0.0

mksi:CashEquivalentsFairValueDisclosure us-gaap:FairValueByAssetClass, us-gaap:FairValueByFairValueHierarchyLevel, us-gaap:FairValueByMeasurementFrequency

mksi:CashEquivalentsFairValueDisclosure

us-gaap:MoneyMarketFunds, us-gaap:FairValueInputsLevel1, us-gaap:FairValueMeasurementsRecurring


Cash
Period End2021-06-302020-12-31
Value1121.3
Percentage of CashEquivalentsFairValueDisclosure100.0100.0

us-gaap:USTreasurySecurities, us-gaap:FairValueInputsLevel2, us-gaap:FairValueMeasurementsRecurring


Cash
Period End2020-12-31
Value62
Percentage of CashEquivalentsFairValueDisclosure4776.9

mksi:CashEquivalentsFairValueDisclosure us-gaap:FairValueByAssetClass, us-gaap:FairValueByMeasurementFrequency

us-gaap:MoneyMarketFunds, us-gaap:FairValueMeasurementsRecurring


Cash
Period End2021-06-302020-12-31
Value1121.3
Percentage of CashEquivalentsFairValueDisclosure100.0100.0

us-gaap:USTreasurySecurities, us-gaap:FairValueMeasurementsRecurring


Cash
Period End2020-12-31
Value62
Percentage of CashEquivalentsFairValueDisclosure4776.9

mksi:CashEquivalentsFairValueDisclosure us-gaap:FairValueByFairValueHierarchyLevel, us-gaap:FairValueByMeasurementFrequency

us-gaap:FairValueInputsLevel1, us-gaap:FairValueMeasurementsRecurring


Cash
Period End2021-06-302020-12-31
Value1121.3
Percentage of CashEquivalentsFairValueDisclosure100.0100.0

us-gaap:FairValueInputsLevel2, us-gaap:FairValueMeasurementsRecurring


Cash
Period End2021-06-302020-12-31
Value4662
Percentage of CashEquivalentsFairValueDisclosure41.64800.0

mksi:CashEquivalentsFairValueDisclosure us-gaap:FairValueByFairValueHierarchyLevel, us-gaap:FairValueByMeasurementFrequency, us-gaap:InvestmentType

us-gaap:FairValueInputsLevel2, us-gaap:FairValueMeasurementsRecurring, us-gaap:CommercialPaper


Cash
Period End2021-06-302020-12-31
Value460.3
Percentage of CashEquivalentsFairValueDisclosure41.623.1

mksi:CashEquivalentsFairValueDisclosure us-gaap:FairValueByMeasurementFrequency

us-gaap:FairValueMeasurementsRecurring


Cash
Period End2021-06-302020-12-31
Value15863
Percentage of CashEquivalentsFairValueDisclosure141.64900.0

mksi:CashEquivalentsFairValueDisclosure us-gaap:FairValueByMeasurementFrequency, us-gaap:InvestmentType

us-gaap:FairValueMeasurementsRecurring, us-gaap:CommercialPaper


Cash
Period End2021-06-302020-12-31
Value460.3
Percentage of CashEquivalentsFairValueDisclosure41.623.1

mksi:CurrentAssetsFairValueDisclosure us-gaap:FairValueByFairValueHierarchyLevel, us-gaap:FairValueByMeasurementFrequency

mksi:CurrentAssetsFairValueDisclosure

us-gaap:FairValueInputsLevel1, us-gaap:FairValueMeasurementsRecurring


Current
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302016-03-312015-12-312015-09-302015-06-302015-03-312014-12-312014-09-302014-06-302014-03-312013-12-312013-09-302013-06-302013-03-312012-12-312012-09-302012-06-302012-03-312011-12-31
Value1121.31.30.49.3160.6215.0620.4260.61118017131.1935.1063.989566.53715166.919197106100958712978226039249271379335316374296278
Percentage of CurrentAssetsFairValueDisclosure100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0

us-gaap:FairValueInputsLevel2, us-gaap:FairValueMeasurementsRecurring


Current
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302016-03-312015-12-312015-09-302015-06-302015-03-312014-12-312014-09-302014-06-302014-03-312013-12-312013-09-302013-06-302013-03-312012-12-312012-09-302012-06-302012-03-312011-12-31
Value3323172912912521571751671581958324323624324226019117121558913544321991781591321492123103111751213944503059112
Percentage of CurrentAssetsFairValueDisclosure296.124423.122415.472975.02710.8932.028317.93304.837300.732063.546.11373.71717.820438.54743.06519.2336.02617.61395.9367.01326.8179.5407.6197.9185.8182.2102.7190.9960.6511.2794.270.544.810.513.215.98.120.140.5

mksi:CurrentAssetsFairValueDisclosure us-gaap:FairValueByMeasurementFrequency

us-gaap:FairValueMeasurementsRecurring


Current
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302016-03-312015-12-312015-09-302015-06-302015-03-312014-12-312014-09-302014-06-302014-03-312013-12-312013-09-302013-06-302013-03-312012-12-312012-09-302012-06-302012-03-312011-12-31
Value4443182912922611741761721591962632602492452472642481772307498552538299274247261227235371350424393419379366404356391
Percentage of CurrentAssetsFairValueDisclosure396.124523.122415.473075.02810.81032.028417.93404.837400.732163.5146.11473.71817.820538.54843.06619.2436.02717.61495.9467.01426.8279.5507.6297.9285.8282.2202.7290.91060.6611.2894.2170.5144.8110.5113.2115.9108.1120.1140.5

mksi:DebtInstrumentOutstandingBalanceRepaid

mksi:DebtInstrumentOutstandingBalanceRepaid


Debt
Period End2021-03-312020-12-312020-09-302019-09-30
Value575575575525
Percentage of DebtInstrumentOutstandingBalanceRepaid100.0100.0100.0100.0

mksi:DebtInstrumentPeriodicPaymentPercentage us-gaap:BusinessAcquisition, us-gaap:CreditFacility, us-gaap:DebtInstrument

mksi:DebtInstrumentPeriodicPaymentPercentage

mksi:NewportCorporation, us-gaap:SecuredDebt, mksi:TermLoanCreditAgreement


Debt
Period End2021-06-30
Value0.25
Percentage of DebtInstrumentPeriodicPaymentPercentage100.0

mksi:DeferredCompensationPlanAssetsFairValueDisclosure us-gaap:FairValueByAssetClass, us-gaap:FairValueByFairValueHierarchyLevel, us-gaap:FairValueByMeasurementFrequency

mksi:DeferredCompensationPlanAssetsFairValueDisclosure

mksi:MutualFundsAndExchangeTradedFunds, us-gaap:FairValueInputsLevel2, us-gaap:FairValueMeasurementsRecurring


Deferred
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-31
Value1500000.01400000.01700000.01500000.01400000.01200000.02002000.01832000.02001000.01799000.0
Percentage of DeferredCompensationPlanAssetsFairValueDisclosure100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0

us-gaap:MoneyMarketFunds, us-gaap:FairValueInputsLevel2, us-gaap:FairValueMeasurementsRecurring


Deferred
Period End2020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-31
Value100000.0100000.0100000.0485000.0483000.0288000.0274000.0
Percentage of DeferredCompensationPlanAssetsFairValueDisclosure6.77.18.324.226.414.415.2

mksi:DeferredCompensationPlanAssetsFairValueDisclosure us-gaap:FairValueByAssetClass, us-gaap:FairValueByMeasurementFrequency

mksi:MutualFundsAndExchangeTradedFunds, us-gaap:FairValueMeasurementsRecurring


Deferred
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-31
Value1500000.01400000.01700000.01500000.01400000.01200000.02002000.01832000.02001000.01799000.0
Percentage of DeferredCompensationPlanAssetsFairValueDisclosure100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0

us-gaap:MoneyMarketFunds, us-gaap:FairValueMeasurementsRecurring


Deferred
Period End2020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-31
Value100000.0100000.0100000.0485000.0483000.0288000.0274000.0
Percentage of DeferredCompensationPlanAssetsFairValueDisclosure6.77.18.324.226.414.415.2

mksi:DeferredTaxAssetsAccruedExpensesAndOtherReserves

mksi:DeferredTaxAssetsAccruedExpensesAndOtherReserves


Deferred
Period End2020-12-312019-12-312018-12-312017-12-312016-12-312015-12-31
Value14121015162.343
Percentage of DeferredTaxAssetsAccruedExpensesAndOtherReserves100.0100.0100.0100.0100.0100.0

mksi:DeferredTaxAssetsInventoryAndWarrantyReserves

mksi:DeferredTaxAssetsInventoryAndWarrantyReserves


Deferred
Period End2020-12-312019-12-312018-12-312017-12-312016-12-312015-12-312014-12-312013-12-312012-12-312011-12-312010-12-31
Value3229171724151510108.78917
Percentage of DeferredTaxAssetsInventoryAndWarrantyReserves100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0

mksi:DeferredTaxAssetsLeaseLiability

mksi:DeferredTaxAssetsLeaseLiability


Deferred
Period End2020-12-312019-12-31
Value4815
Percentage of DeferredTaxAssetsLeaseLiability100.0100.0

mksi:DeferredTaxLiabilitiesDepreciationAndAmortization

mksi:DeferredTaxLiabilitiesDepreciationAndAmortization


Deferred
Period End2020-12-312019-12-312018-12-312017-12-312016-12-312015-12-312014-12-312013-12-312012-12-312011-12-312010-12-31
Value14148.33210161.7246.5375.0854.4613.6791.621
Percentage of DeferredTaxLiabilitiesDepreciationAndAmortization100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0

mksi:DeferredTaxLiabilitiesLoanCosts

mksi:DeferredTaxLiabilitiesLoanCosts


Deferred
Period End2020-12-312019-12-312018-12-312017-12-312016-12-31
Value1800000.02317000.01108000.02157000.07282000.0
Percentage of DeferredTaxLiabilitiesLoanCosts100.0100.0100.0100.0100.0

mksi:DeferredTaxLiabilityRightOfUseAsset

mksi:DeferredTaxLiabilityRightOfUseAsset


Deferred
Period End2020-12-312019-12-31
Value4614
Percentage of DeferredTaxLiabilityRightOfUseAsset100.0100.0

mksi:Deferredtaxassetsutilizationloss

mksi:Deferredtaxassetsutilizationloss


Deferredtaxassetsutilizationloss
Period End2020-12-312019-12-31
Value4000000.02700000.0
Percentage of Deferredtaxassetsutilizationloss100.0100.0

mksi:DefinedBenefitPlanAssetsForPlanBenefitsGuaranteedRateOfReturn us-gaap:Range, us-gaap:RetirementPlanType

mksi:DefinedBenefitPlanAssetsForPlanBenefitsGuaranteedRateOfReturn

srt:Maximum, country:DE


Defined
Period End2020-12-312019-12-31
Value4.250.0425
Percentage of DefinedBenefitPlanAssetsForPlanBenefitsGuaranteedRateOfReturn100.0100.0

srt:Minimum, country:DE


Defined
Period End2020-12-312019-12-31
Value2.250.0225
Percentage of DefinedBenefitPlanAssetsForPlanBenefitsGuaranteedRateOfReturn52.952.9

mksi:DefinedBenefitPlanAssetsForPlanBenefitsPercentage

mksi:DefinedBenefitPlanAssetsForPlanBenefitsPercentage


Defined
Period End2020-12-312019-12-312018-12-312017-12-312016-12-31
Value100.01.01.01.01.0
Percentage of DefinedBenefitPlanAssetsForPlanBenefitsPercentage100.0100.0100.0100.0100.0

mksi:DefinedBenefitPlanAssetsForPlanBenefitsPercentage us-gaap:DefinedBenefitPlanByPlanAssetCategories

mksi:DefinedBenefitPlanAssetCategoriesOtherAssets


Defined
Period End2020-12-312019-12-312018-12-31
Value52.60.10.19
Percentage of DefinedBenefitPlanAssetsForPlanBenefitsPercentage52.610.019.0

us-gaap:DefinedBenefitPlanCash


Defined
Period End2020-12-312019-12-312018-12-31
Value1.30.040.02
Percentage of DefinedBenefitPlanAssetsForPlanBenefitsPercentage1.34.02.0

us-gaap:DefinedBenefitPlanDebtSecurity


Defined
Period End2020-12-312019-12-312018-12-31
Value40.50.720.62
Percentage of DefinedBenefitPlanAssetsForPlanBenefitsPercentage40.572.062.0

us-gaap:DefinedBenefitPlanEquitySecurities


Defined
Period End2020-12-312019-12-312018-12-31
Value5.60.140.17
Percentage of DefinedBenefitPlanAssetsForPlanBenefitsPercentage5.614.017.0

mksi:DefinedBenefitPlanExpectedFutureBenefitPaymentsForNextTenYears

mksi:DefinedBenefitPlanExpectedFutureBenefitPaymentsForNextTenYears


Defined
Period End2020-12-31
Value14
Percentage of DefinedBenefitPlanExpectedFutureBenefitPaymentsForNextTenYears100.0

mksi:DefinedBenefitPlanExpectedFutureBenefitPaymentsYearSixToTen

mksi:DefinedBenefitPlanExpectedFutureBenefitPaymentsYearSixToTen


Defined
Period End2020-12-31
Value8800000.0
Percentage of DefinedBenefitPlanExpectedFutureBenefitPaymentsYearSixToTen100.0

mksi:DefinedBenefitPlanVestedBenefitObligation us-gaap:RetirementPlanType

mksi:DefinedBenefitPlanVestedBenefitObligation

country:IL


Defined
Period End2020-12-312019-12-312018-12-31
Value211917
Percentage of DefinedBenefitPlanVestedBenefitObligation100.0100.0100.0

mksi:IncreaseOfAcquiredPropertyPlantAndEquipmentExcludingTheFairValueWriteUp us-gaap:BusinessAcquisition

mksi:IncreaseOfAcquiredPropertyPlantAndEquipmentExcludingTheFairValueWriteUp

mksi:ElectroScientificIndustriesInc


Increase
Period End2020-12-312020-09-30
Value3939
Percentage of IncreaseOfAcquiredPropertyPlantAndEquipmentExcludingTheFairValueWriteUp100.0100.0

mksi:LesseeOperatingLeaseLiabilityPaymentsDueAfterYearFour

mksi:LesseeOperatingLeaseLiabilityPaymentsDueAfterYearFour


Lessee
Period End2021-06-302021-03-312020-09-30
Value166166179
Percentage of LesseeOperatingLeaseLiabilityPaymentsDueAfterYearFour100.0100.0100.0

mksi:LiborFloorRate us-gaap:CreditFacility, us-gaap:DebtInstrument, us-gaap:VariableRate

mksi:LiborFloorRate

mksi:IncrementalTermLoanFacility, mksi:TermLoanCreditAgreement, us-gaap:LondonInterbankOfferedRateLIBOR


Libor
Period End2021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-31
Value1.01.01.00.010.010.010.010.010.010.0075
Percentage of LiborFloorRate100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0

mksi:LongTermDebtMaturitiesRepaymentsOfPrincipalAfterYearFour

mksi:LongTermDebtMaturitiesRepaymentsOfPrincipalAfterYearFour


Long
Period End2021-03-31
Value779
Percentage of LongTermDebtMaturitiesRepaymentsOfPrincipalAfterYearFour100.0

mksi:MinimumTermLoanWithEarlierMaturityThanAssetBasedLineFacility us-gaap:BusinessAcquisition, us-gaap:CreditFacility, us-gaap:DebtInstrument

mksi:MinimumTermLoanWithEarlierMaturityThanAssetBasedLineFacility

mksi:NewportCorporation, us-gaap:SecuredDebt, mksi:AssetBasedCreditAgreement


Minimum
Period End2021-06-30
Value100
Percentage of MinimumTermLoanWithEarlierMaturityThanAssetBasedLineFacility100.0

mksi:NonCurrentAssetsFairValueDisclosure us-gaap:FairValueByFairValueHierarchyLevel, us-gaap:FairValueByMeasurementFrequency

mksi:NonCurrentAssetsFairValueDisclosure

us-gaap:FairValueInputsLevel2, us-gaap:FairValueMeasurementsRecurring


Non
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-31
Value30312725242325
Percentage of NonCurrentAssetsFairValueDisclosure100.0100.0100.0100.0100.0100.0100.0

mksi:NonCurrentAssetsFairValueDisclosure us-gaap:FairValueByMeasurementFrequency

us-gaap:FairValueMeasurementsRecurring


Non
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-31
Value30312725242325
Percentage of NonCurrentAssetsFairValueDisclosure100.0100.0100.0100.0100.0100.0100.0

mksi:NonCurrentInterestRateFairValueHedgeAssetAtFairValue us-gaap:DerivativeInstrumentRisk, us-gaap:FairValueByFairValueHierarchyLevel, us-gaap:FairValueByMeasurementFrequency

mksi:NonCurrentInterestRateFairValueHedgeAssetAtFairValue

us-gaap:InterestRateSwap, us-gaap:FairValueInputsLevel2, us-gaap:FairValueMeasurementsRecurring


Non
Period End2021-06-302021-03-31
Value3700000.05100000.0
Percentage of NonCurrentInterestRateFairValueHedgeAssetAtFairValue100.0100.0

mksi:NonCurrentInterestRateFairValueHedgeAssetAtFairValue us-gaap:DerivativeInstrumentRisk, us-gaap:FairValueByMeasurementFrequency

us-gaap:InterestRateSwap, us-gaap:FairValueMeasurementsRecurring


Non
Period End2021-06-302021-03-31
Value3700000.05100000.0
Percentage of NonCurrentInterestRateFairValueHedgeAssetAtFairValue100.0100.0

mksi:NonCurrentInterestRateFairValueHedgeLiabilitiesAtFairValue us-gaap:DerivativeInstrumentRisk, us-gaap:FairValueByFairValueHierarchyLevel, us-gaap:FairValueByMeasurementFrequency

mksi:NonCurrentInterestRateFairValueHedgeLiabilitiesAtFairValue

us-gaap:InterestRateSwap, us-gaap:FairValueInputsLevel2, us-gaap:FairValueMeasurementsRecurring


Non
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-31
Value9.110141415156.5
Percentage of NonCurrentInterestRateFairValueHedgeLiabilitiesAtFairValue100.0100.0100.0100.0100.0100.0100.0

mksi:NonCurrentInterestRateFairValueHedgeLiabilitiesAtFairValue us-gaap:DerivativeInstrumentRisk, us-gaap:FairValueByMeasurementFrequency

us-gaap:InterestRateSwap, us-gaap:FairValueMeasurementsRecurring


Non
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-31
Value9.110141415156.5
Percentage of NonCurrentInterestRateFairValueHedgeLiabilitiesAtFairValue100.0100.0100.0100.0100.0100.0100.0

mksi:OtherCurrentAssetsFairValueDisclosure us-gaap:FairValueByFairValueHierarchyLevel, us-gaap:FairValueByMeasurementFrequency

mksi:OtherCurrentAssetsFairValueDisclosure

us-gaap:FairValueInputsLevel2, us-gaap:FairValueMeasurementsRecurring


Other
Period End2021-06-302021-03-312020-09-302020-06-302020-03-312019-12-31
Value1700000.02200000.0100000.01600000.02700000.01900000.0
Percentage of OtherCurrentAssetsFairValueDisclosure100.0100.0100.0100.0100.0100.0

mksi:OtherCurrentAssetsFairValueDisclosure us-gaap:FairValueByMeasurementFrequency

us-gaap:FairValueMeasurementsRecurring


Other
Period End2021-06-302021-03-312020-09-302020-06-302020-03-312019-12-31
Value1700000.02200000.0100000.01600000.02700000.01900000.0
Percentage of OtherCurrentAssetsFairValueDisclosure100.0100.0100.0100.0100.0100.0

mksi:OtherNonCurrentAssetsFairValueDisclosure us-gaap:FairValueByFairValueHierarchyLevel, us-gaap:FairValueByMeasurementFrequency

mksi:OtherNonCurrentAssetsFairValueDisclosure

us-gaap:FairValueInputsLevel2, us-gaap:FairValueMeasurementsRecurring


Other
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-31
Value24242018181719
Percentage of OtherNonCurrentAssetsFairValueDisclosure100.0100.0100.0100.0100.0100.0100.0

mksi:OtherNonCurrentAssetsFairValueDisclosure us-gaap:FairValueByMeasurementFrequency

us-gaap:FairValueMeasurementsRecurring


Other
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-31
Value24242018181719
Percentage of OtherNonCurrentAssetsFairValueDisclosure100.0100.0100.0100.0100.0100.0100.0

mksi:PercentageOfBorrowingBase us-gaap:BusinessAcquisition, us-gaap:CreditFacility, us-gaap:DebtInstrument

mksi:PercentageOfBorrowingBase

mksi:ElectroScientificIndustriesInc, us-gaap:SecuredDebt, mksi:AssetBasedCreditAgreement


Percentage
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-31
Value30.030.030.030.00.30.3
Percentage of PercentageOfBorrowingBase100.0100.0100.0100.0100.0100.0

mksi:SegmentAssets

mksi:SegmentAssets


Segment
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312014-12-312014-09-302014-06-302014-03-312013-12-312013-09-302013-06-302013-03-312012-12-312012-09-302012-06-302011-12-31
Value958936894858871855803261260257266259234232221216233250274
Percentage of SegmentAssets100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0

mksi:SegmentAssets us-gaap:ConsolidationItems

mksi:CorporateReconcilingItemsAndEliminations


Segment
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-31
Value-26.7-23.6-12.4-26.5-33.7-31.3-32.0
Percentage of SegmentAssets-2.8-2.5-1.4-3.1-3.9-3.7-4.0

mksi:SegmentAssets us-gaap:ConsolidationItems, us-gaap:StatementBusinessSegments

us-gaap:OperatingSegments, mksi:EquipmentAndSolutions


Segment
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-31
Value130131115107130130113
Percentage of SegmentAssets13.614.012.912.515.015.214.1

us-gaap:OperatingSegments, mksi:LightAndMotionSegment


Segment
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-31
Value288290288313325333310
Percentage of SegmentAssets30.131.032.336.537.338.938.7

us-gaap:OperatingSegments, mksi:VacuumAndAnalysisSegment


Segment
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-31
Value567537502463449423410
Percentage of SegmentAssets59.157.556.254.151.549.551.1

mksi:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsOutstandingAndExercisableWeightedAverageBaseValue us-gaap:AwardType

mksi:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsOutstandingAndExercisableWeightedAverageBaseValue

us-gaap:StockAppreciationRightsSARS


Share
Period End2020-12-31
Value30.64
Percentage of ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsOutstandingAndExercisableWeightedAverageBaseValue100.0

mksi:SharebasedCompensationArrangementBySharebasedPaymentAwardEquityInstrumentsOtherThanOptionsAggregateIntrinsicValueOutstandingAndExercisable us-gaap:AwardType

mksi:SharebasedCompensationArrangementBySharebasedPaymentAwardEquityInstrumentsOtherThanOptionsAggregateIntrinsicValueOutstandingAndExercisable

us-gaap:StockAppreciationRightsSARS


Sharebased
Period End2020-12-31
Value6200000.0
Percentage of SharebasedCompensationArrangementBySharebasedPaymentAwardEquityInstrumentsOtherThanOptionsAggregateIntrinsicValueOutstandingAndExercisable100.0

us-gaap:AllowanceForDoubtfulAccountsReceivableCurrent

us-gaap:AllowanceForDoubtfulAccountsReceivableCurrent


Allowance
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312016-12-312015-12-312014-12-312013-12-312010-12-312009-12-31
Value2400000.02200000.02000000.02000000.01900000.01900000.01783000.05190000.04460000.04968000.05243000.04761000.04591000.04456000.04135000.03909000.01760000.02250000.01924000.02557000.02415000.0
Percentage of AllowanceForDoubtfulAccountsReceivableCurrent100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0

us-gaap:AssetsFairValueDisclosure us-gaap:FairValueByFairValueHierarchyLevel, us-gaap:FairValueByMeasurementFrequency

us-gaap:AssetsFairValueDisclosure

us-gaap:FairValueInputsLevel1, us-gaap:FairValueMeasurementsRecurring


Assets
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302016-03-312015-12-312015-09-302015-06-302015-03-312014-12-312014-09-302014-06-302014-03-312013-12-312013-09-302013-06-302013-03-312012-12-312012-09-302012-06-302012-03-312011-12-312011-09-302011-06-302010-12-31
Value1121.31.30.49.3160.6215.0620.4260.61118017131.1936.1164.809577.28116166.919197106100958712978226039254284389347356383308286395365305
Percentage of AssetsFairValueDisclosure100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0

us-gaap:FairValueInputsLevel2, us-gaap:FairValueMeasurementsRecurring


Assets
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302016-03-312015-12-312015-09-302015-06-302015-03-312014-12-312014-09-302014-06-302014-03-312013-12-312013-09-302013-06-302013-03-312012-12-312012-09-302012-06-302012-03-312011-12-312011-09-302011-06-302010-12-31
Value36234831731727618120019118222210927326627326928421519623978973544324404353972892842933643711751243944503864112333118
Percentage of AssetsFairValueDisclosure323.426823.124392.379275.02971.01071.632352.33782.842942.536476.460.81545.21939.122923.14409.15921.6373.92694.71498.1482.71412.5179.5407.6437.2453.4452.5224.4363.11325.6599.5948.569.143.910.312.714.110.021.039.48.48.56.2

us-gaap:AssetsFairValueDisclosure us-gaap:FairValueByMeasurementFrequency

us-gaap:FairValueMeasurementsRecurring


Assets
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302016-03-312015-12-312015-09-302015-06-302015-03-312014-12-312014-09-302014-06-302014-03-312013-12-312013-09-302013-06-302013-03-312012-12-312012-09-302012-06-302012-03-312011-12-312011-09-302011-06-302010-12-31
Value47535031831728519820119618322329029128027427528927320325594104552538540531485418362316424410429409429392406422372398428396324
Percentage of AssetsFairValueDisclosure423.426923.124492.379375.03071.01171.632452.33882.843042.536576.4160.81645.22039.123023.14509.16021.6473.92794.71598.1582.71512.5279.5507.6537.2553.4552.5324.4463.11425.6699.51048.5169.1143.9110.3112.7114.1110.0121.0139.4108.4108.5106.2

us-gaap:AvailableForSaleSecurities

us-gaap:AvailableForSaleSecurities


Available
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302016-03-312015-12-312014-12-312011-09-302011-06-302010-12-31
Value28320922722217861109889244732032002092281491551895371308430286426396324
Percentage of AvailableForSaleSecurities100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0

us-gaap:AvailableForSaleSecurities mksi:Investment1, us-gaap:InvestmentType

mksi:LongTermInvestments, mksi:GroupInsuranceContracts


Available
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312018-12-31
Value6.66.56.56.36.06.05.8545.89
Percentage of AvailableForSaleSecurities2.33.12.92.83.49.85.48.0

us-gaap:AvailableForSaleSecurities us-gaap:FairValueByAssetClass, us-gaap:FairValueByFairValueHierarchyLevel, us-gaap:FairValueByMeasurementFrequency

mksi:TimeDepositsAndCertificatesOfDeposit, us-gaap:FairValueInputsLevel2, us-gaap:FairValueMeasurementsRecurring


Available
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302016-03-312015-12-312015-09-302015-06-302015-03-312014-12-31
Value29120.70.30.310136.2625.2620.1010.10218109.75721133.479231.39517231121235.420
Percentage of AvailableForSaleSecurities10.36.10.30.10.216.911.97.05.70.20.19.15.24.79.49.12.212.62.624.37.52.80.00.00.07.3

us-gaap:BankersAcceptance, us-gaap:FairValueInputsLevel2, us-gaap:FairValueMeasurementsRecurring


Available
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302016-03-312015-12-312015-09-302015-06-302015-03-312014-12-312014-09-302014-06-302014-03-312013-12-312013-09-302013-06-302012-12-31
Value3.54.23.83.12.52.44.0434.543.8331.7220.9892.5222.1795.333.4521.9341.1171.4392.4873.0561.6460.7280.2660.2220.3270.0820.7650.9680.6370.4910.330.1450.242
Percentage of AvailableForSaleSecurities1.22.01.71.41.43.93.75.14.13.91.31.21.12.51.51.30.70.84.74.30.50.20.00.00.00.00.00.00.00.00.00.00.0

us-gaap:USTreasurySecurities, us-gaap:FairValueInputsLevel2, us-gaap:FairValueMeasurementsRecurring


Available
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302018-12-312018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302016-03-312013-06-302012-12-31
Value7613122321916510.05.03.60213313028251620251.1521.1544.365.00413
Percentage of AvailableForSaleSecurities27.062.998.098.592.816.34.64.118.015.415.113.411.311.413.213.42.21.61.40.00.0

us-gaap:AvailableForSaleSecurities us-gaap:FairValueByAssetClass, us-gaap:FairValueByMeasurementFrequency

mksi:TimeDepositsAndCertificatesOfDeposit, us-gaap:FairValueMeasurementsRecurring


Available
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302016-03-312015-12-312015-09-302015-06-302015-03-312014-12-31
Value29120.70.30.310136.2625.2620.1010.10218109.75721133.479231.39517231121235.420
Percentage of AvailableForSaleSecurities10.36.10.30.10.216.911.97.05.70.20.19.15.24.79.49.12.212.62.624.37.52.80.00.00.07.3

us-gaap:BankersAcceptance, us-gaap:FairValueMeasurementsRecurring


Available
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302016-03-312015-12-312015-09-302015-06-302015-03-312014-12-312014-09-302014-06-302014-03-312013-12-312013-09-302013-06-302012-12-31
Value3.54.23.83.12.52.44.0434.543.8331.7220.9892.5222.1795.333.4521.9341.1171.4392.4873.0561.6460.7280.2660.2220.3270.0820.7650.9680.6370.4910.330.1450.242
Percentage of AvailableForSaleSecurities1.22.01.71.41.43.93.75.14.13.91.31.21.12.51.51.30.70.84.74.30.50.20.00.00.00.00.00.00.00.00.00.00.0

us-gaap:USTreasurySecurities, us-gaap:FairValueMeasurementsRecurring


Available
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302018-12-312018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302016-03-312013-06-302012-12-31
Value7613122321916510.05.03.60213313028251620251.1521.1544.365.00413
Percentage of AvailableForSaleSecurities27.062.998.098.592.816.34.64.118.015.415.113.411.311.413.213.42.21.61.40.00.0

us-gaap:AvailableForSaleSecurities us-gaap:FairValueByFairValueHierarchyLevel, us-gaap:FairValueByMeasurementFrequency, us-gaap:InvestmentType

us-gaap:FairValueInputsLevel2, us-gaap:FairValueMeasurementsRecurring, mksi:GroupInsuranceContracts


Available
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-31
Value6.66.56.56.36.06.05.8545.7466.0015.95
Percentage of AvailableForSaleSecurities2.33.12.92.83.49.85.46.56.513.4

us-gaap:FairValueInputsLevel2, us-gaap:FairValueMeasurementsRecurring, us-gaap:CommercialPaper


Available
Period End2021-06-302021-03-312020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-30
Value166603.8266144603319251613211112242.793
Percentage of AvailableForSaleSecurities58.729.02.142.755.950.664.775.626.212.78.06.69.37.87.812.95.3

us-gaap:FairValueInputsLevel2, us-gaap:FairValueMeasurementsRecurring, us-gaap:CorporateDebtSecurities


Available
Period End2021-06-302019-06-302019-03-312018-12-312018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302016-03-312015-12-312015-09-302014-12-31
Value8.08.2198.9949.3526678778046514616199016516988
Percentage of AvailableForSaleSecurities2.88.820.312.732.739.337.235.031.533.124.731.427.329.438.30.030.9

us-gaap:AvailableForSaleSecurities us-gaap:FairValueByMeasurementFrequency, us-gaap:InvestmentType

us-gaap:FairValueMeasurementsRecurring, mksi:GroupInsuranceContracts


Available
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-31
Value6.66.56.56.36.06.05.8545.7466.0015.95
Percentage of AvailableForSaleSecurities2.33.12.92.83.49.85.46.56.513.4

us-gaap:FairValueMeasurementsRecurring, us-gaap:CommercialPaper


Available
Period End2021-06-302021-03-312020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-30
Value166603.8266144603319251613211112242.793
Percentage of AvailableForSaleSecurities58.729.02.142.755.950.664.775.626.212.78.06.69.37.87.812.95.3

us-gaap:FairValueMeasurementsRecurring, us-gaap:CorporateDebtSecurities


Available
Period End2021-06-302019-06-302019-03-312018-12-312018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302016-03-312015-12-312015-09-302014-12-31
Value8.08.2198.9949.3526678778046514616199016516988
Percentage of AvailableForSaleSecurities2.88.820.312.732.739.337.235.031.533.124.731.427.329.438.30.030.9

us-gaap:AvailableForSaleSecurities us-gaap:InvestmentType

mksi:TimeDepositsAndCertificatesOfDeposit


Available
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302016-03-312015-12-312014-12-31
Value29120.70.30.310136.2625.2620.1010.10218109.75721133.479231.39517231120
Percentage of AvailableForSaleSecurities10.36.10.30.10.216.911.97.05.70.20.19.15.24.79.49.12.212.62.624.37.52.87.3

us-gaap:BankersAcceptance


Available
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302016-03-312015-12-312014-12-31
Value3.54.23.83.12.52.44.0434.543.8331.7220.9892.5222.1795.333.4521.9341.1171.4392.4873.0561.6460.7280.082
Percentage of AvailableForSaleSecurities1.22.01.71.41.43.93.75.14.13.91.31.21.12.51.51.30.70.84.74.30.50.20.0

us-gaap:CommercialPaper


Available
Period End2021-06-302021-03-312020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-30
Value166603.8266144603319251613211112242.793
Percentage of AvailableForSaleSecurities58.729.02.142.755.950.664.775.626.212.78.06.69.37.87.812.95.3

us-gaap:CorporateDebtSecurities


Available
Period End2021-06-302019-06-302019-03-312018-12-312018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302016-03-312015-12-312014-12-31
Value8.08.2198.9949.3526678778046514616199016588
Percentage of AvailableForSaleSecurities2.88.820.312.732.739.337.235.031.533.124.731.427.329.438.330.9

us-gaap:USTreasurySecurities


Available
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302018-12-312018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302016-03-31
Value7613122321916510.05.03.60213313028251620251.1521.1544.36
Percentage of AvailableForSaleSecurities27.062.998.098.592.816.34.64.118.015.415.113.411.311.413.213.42.21.61.4

us-gaap:AvailableForSaleSecuritiesAccumulatedGrossUnrealizedGainBeforeTax mksi:Investment1, us-gaap:InvestmentType

us-gaap:AvailableForSaleSecuritiesAccumulatedGrossUnrealizedGainBeforeTax

mksi:LongTermInvestments, mksi:GroupInsuranceContracts


Available
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312018-12-31
Value900000.0900000.0900000.0800000.0700000.0600000.0593000.0344000.0
Percentage of AvailableForSaleSecuritiesAccumulatedGrossUnrealizedGainBeforeTax100.0100.0100.0100.0100.0100.0100.0100.0

us-gaap:AvailableForSaleSecuritiesAccumulatedGrossUnrealizedLossBeforeTax

us-gaap:AvailableForSaleSecuritiesAccumulatedGrossUnrealizedLossBeforeTax


Available
Period End2021-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302015-12-312015-03-312014-12-31
Value100000.0200000.0294000.0363000.0373000.0247000.0175000.0488000.0163000.0127000.098000.080000.076000.0110000.018000.014000.0740000.093000.0296000.0
Percentage of AvailableForSaleSecuritiesAccumulatedGrossUnrealizedLossBeforeTax100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0

us-gaap:AvailableForSaleSecuritiesAccumulatedGrossUnrealizedLossBeforeTax us-gaap:InvestmentType

us-gaap:USTreasurySecurities


Available
Period End2021-06-30
Value100000.0
Percentage of AvailableForSaleSecuritiesAccumulatedGrossUnrealizedLossBeforeTax100.0

us-gaap:AvailableForSaleSecuritiesAmortizedCost

us-gaap:AvailableForSaleSecuritiesAmortizedCost


Available
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302015-12-312015-03-312014-12-312013-06-302013-03-312012-12-312012-09-302012-06-302012-03-312011-12-312011-09-302011-06-302010-12-31
Value28320922722217861109899344732042002092281481551895371431237157345330326298195223251426396324
Percentage of AvailableForSaleSecuritiesAmortizedCost100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0

us-gaap:AvailableForSaleSecuritiesAmortizedCost mksi:Investment1, us-gaap:InvestmentType

mksi:LongTermInvestments, mksi:GroupInsuranceContracts


Available
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312018-12-31
Value5.75.65.65.55.35.45.2615.546
Percentage of AvailableForSaleSecuritiesAmortizedCost2.02.72.52.53.08.84.87.5

us-gaap:AvailableForSaleSecuritiesAmortizedCost us-gaap:InvestmentType

mksi:TimeDepositsAndCertificatesOfDeposit


Available
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302015-12-312015-03-312014-12-31
Value29120.70.30.310136.2615.2610.0990.10218109.75621133.479231.39517115.420
Percentage of AvailableForSaleSecuritiesAmortizedCost10.36.10.30.10.216.911.97.05.60.20.19.05.24.79.49.12.212.62.624.32.82.313.3

us-gaap:BankersAcceptance


Available
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302015-12-312015-03-312014-12-31
Value3.54.23.83.12.52.44.0434.543.8331.7220.9892.5222.1795.333.4521.9341.1171.4392.4873.0560.7280.3270.082
Percentage of AvailableForSaleSecuritiesAmortizedCost1.22.01.71.41.43.93.75.14.13.91.31.21.12.51.51.30.70.84.74.30.20.10.1

us-gaap:CommercialPaper


Available
Period End2021-06-302021-03-312020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302015-03-31
Value166603.8266145603319261613211112242.7941.447
Percentage of AvailableForSaleSecuritiesAmortizedCost58.629.02.142.956.150.864.875.726.412.98.06.69.37.87.812.95.30.6

us-gaap:CorporateDebtSecurities


Available
Period End2021-06-302019-06-302019-03-312018-12-312018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302015-12-31
Value8.08.2188.9969.367667877804651461619165
Percentage of AvailableForSaleSecuritiesAmortizedCost2.88.820.212.732.639.337.135.031.533.124.631.527.338.4

us-gaap:USTreasurySecurities


Available
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302018-12-312018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-30
Value7613122321916510.04.9993.60113313028251620251.1511.151
Percentage of AvailableForSaleSecuritiesAmortizedCost27.162.998.098.592.816.34.64.018.015.415.013.411.311.313.213.42.21.6

us-gaap:AvailableForSaleSecuritiesNoncurrent us-gaap:FairValueByFairValueHierarchyLevel, us-gaap:FairValueByMeasurementFrequency

us-gaap:AvailableForSaleSecuritiesNoncurrent

us-gaap:FairValueInputsLevel2, us-gaap:FairValueMeasurementsRecurring


Available
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-03-312018-12-312018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302015-03-312014-12-312014-09-302014-06-302014-03-312013-12-312013-09-30
Value6.66.56.56.36.06.05.8545.7465.955.896.0766.4416.2556.1936.0295.6335.5585.9565.932371571348053600.056
Percentage of AvailableForSaleSecuritiesNoncurrent100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0

us-gaap:AvailableForSaleSecuritiesNoncurrent us-gaap:FairValueByMeasurementFrequency

us-gaap:FairValueMeasurementsRecurring


Available
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-03-312018-12-312018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302015-03-312014-12-312014-09-302014-06-302014-03-312013-12-312013-09-302012-12-31
Value6.66.56.56.36.06.05.8545.7465.955.896.0766.4416.2556.1936.0295.6335.5585.9565.932371571348053605.18312
Percentage of AvailableForSaleSecuritiesNoncurrent100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.09255.40.0

us-gaap:CashAndCashEquivalentsFairValueDisclosure us-gaap:FairValueByAssetClass, us-gaap:FairValueByFairValueHierarchyLevel, us-gaap:FairValueByMeasurementFrequency

us-gaap:CashAndCashEquivalentsFairValueDisclosure

us-gaap:MoneyMarketFunds, us-gaap:FairValueInputsLevel1, us-gaap:FairValueMeasurementsRecurring


Cash
Period End2021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302016-03-312015-12-312015-09-302015-06-302015-03-312014-12-312014-09-302014-06-302014-03-312013-12-312013-09-302013-06-302013-03-312012-12-312012-09-302012-06-302012-03-312011-12-312011-09-302011-06-302010-12-31
Value1.31.30.49.3160.2884.7320.1040.29418017131.0754.9873.872511.26310106.919197106100958712978226038574585517020713113775167.032
Percentage of CashAndCashEquivalentsFairValueDisclosure100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0

us-gaap:USTreasurySecurities, us-gaap:FairValueInputsLevel2, us-gaap:FairValueMeasurementsRecurring


Cash
Period End2021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302018-03-312016-03-312010-12-31
Value486269471.22.77.99912350.0
Percentage of CashAndCashEquivalentsFairValueDisclosure3723.14776.917350.0511.87.1937.5169.01204.918.00.0

us-gaap:CashAndCashEquivalentsFairValueDisclosure us-gaap:FairValueByAssetClass, us-gaap:FairValueByMeasurementFrequency

us-gaap:MoneyMarketFunds, us-gaap:FairValueMeasurementsRecurring


Cash
Period End2021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302016-03-312015-12-312015-09-302015-06-302015-03-312014-12-312014-09-302014-06-302014-03-312013-12-312013-09-302013-06-302013-03-312012-12-312012-09-302012-06-302012-03-312011-12-312011-09-302011-06-302010-12-31
Value1.31.30.49.3160.2884.7320.1040.29418017131.0754.9873.872511.26310106.919197106100958712978226038574585517020713113775167.032
Percentage of CashAndCashEquivalentsFairValueDisclosure100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0

us-gaap:USTreasurySecurities, us-gaap:FairValueMeasurementsRecurring


Cash
Period End2021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302018-03-312016-03-312010-12-31
Value486269471.22.77.999123529
Percentage of CashAndCashEquivalentsFairValueDisclosure3723.14776.917350.0511.87.1937.5169.01204.918.0426.6

us-gaap:CashAndCashEquivalentsFairValueDisclosure us-gaap:FairValueByFairValueHierarchyLevel, us-gaap:FairValueByMeasurementFrequency

us-gaap:FairValueInputsLevel1, us-gaap:FairValueMeasurementsRecurring


Cash
Period End2021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302016-03-312015-12-312015-09-302015-06-302015-03-312014-12-312014-09-302014-06-302014-03-312013-12-312013-09-302013-06-302013-03-312012-12-312012-09-302012-06-302012-03-312011-12-312011-09-302011-06-302010-12-31
Value1.31.30.49.3160.6131.0754.9873.872511.26310106.9191971061009587129782260385745855170207131137779151
Percentage of CashAndCashEquivalentsFairValueDisclosure100.0100.0100.0100.0100.0208.3100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0102.3546.6737.0

us-gaap:FairValueInputsLevel2, us-gaap:FairValueMeasurementsRecurring


Cash
Period End2021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302016-03-312015-12-312015-09-302015-06-302015-03-312014-12-312014-09-302014-06-302014-03-312013-12-312013-06-302013-03-312012-12-312012-09-302012-06-302012-03-312011-12-312011-09-302011-06-302010-12-31
Value1056369729364284332304115235.4310.497450.3410.090.0480.0990.8318.322103.593100.2110.1360.0160.0630.1840.00.030292.838
Percentage of CashAndCashEquivalentsFairValueDisclosure8123.14900.017350.0778.5552.722430.6211.54012.3653.2800.580.71198.4227.553.77.223.00.30.10.10.10.610.648.65.927.30.50.20.00.10.10.00.040.8175.440.4

us-gaap:CashAndCashEquivalentsFairValueDisclosure us-gaap:FairValueByFairValueHierarchyLevel, us-gaap:FairValueByMeasurementFrequency, us-gaap:InvestmentType

us-gaap:FairValueInputsLevel2, us-gaap:FairValueMeasurementsRecurring, us-gaap:CommercialPaper


Cash
Period End2021-03-312020-12-312020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-03-31
Value570.333424036822.68713141830212510112.8459.999
Percentage of CashAndCashEquivalentsFairValueDisclosure4400.023.1200.014777.4865.735546.228089.81.575.5105.81710.2611.1562.848.6839.6116.528.25.1

us-gaap:CashAndCashEquivalentsFairValueDisclosure us-gaap:FairValueByMeasurementFrequency

us-gaap:FairValueMeasurementsRecurring


Cash
Period End2021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302016-03-312015-12-312015-09-302015-06-302015-03-312014-12-312014-09-302014-06-302014-03-312013-12-312013-09-302013-06-302013-03-312012-12-312012-09-302012-06-302012-03-312011-12-312011-09-302011-06-302010-12-31
Value1066369811106542443734931633157.416243106100968712986326448574585517020713113710812154
Percentage of CashAndCashEquivalentsFairValueDisclosure8223.14900.017450.0878.5652.722638.9311.54112.3753.2900.5180.71298.4327.5153.7107.2123.0100.3100.1100.1100.1100.6110.6148.6105.9127.3100.0100.5100.2100.0100.1100.1100.0100.0143.1722.0777.3

us-gaap:CashAndCashEquivalentsFairValueDisclosure us-gaap:FairValueByMeasurementFrequency, us-gaap:InvestmentType

us-gaap:FairValueMeasurementsRecurring, us-gaap:CommercialPaper


Cash
Period End2021-03-312020-12-312020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-03-31
Value570.333424036822.68713141830212510112.8459.999
Percentage of CashAndCashEquivalentsFairValueDisclosure4400.023.1200.014777.4865.735546.228089.81.575.5105.81710.2611.1562.848.6839.6116.528.25.1

us-gaap:CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsIncludingDisposalGroupAndDiscontinuedOperations

us-gaap:CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsIncludingDisposalGroupAndDiscontinuedOperations


Cash
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302017-12-312017-09-302016-12-31
Value755699608493428442414386366418644399333306233
Percentage of CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsIncludingDisposalGroupAndDiscontinuedOperations100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0

us-gaap:ContractWithCustomerAssetNet us-gaap:AdjustmentsForNewAccountingPronouncements

us-gaap:ContractWithCustomerAssetNet

us-gaap:AccountingStandardsUpdate201409


Contract
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-01-01
Value3800000.03500000.03700000.03700000.03500000.03400000.03527000.03405000.02883000.03624000.03624000.03951000.03298000.03065000.0
Percentage of ContractWithCustomerAssetNet100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0

us-gaap:ContractWithCustomerLiability

us-gaap:ContractWithCustomerLiability


Contract
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302017-12-31
Value41393635332524252924171214
Percentage of ContractWithCustomerLiability100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0

us-gaap:ContractWithCustomerLiabilityNoncurrent

us-gaap:ContractWithCustomerLiabilityNoncurrent


Contract
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-01-01
Value5000000.04500000.05600000.05100000.04700000.03500000.03290000.02874000.02871000.03018000.03228000.03335000.03126000.0
Percentage of ContractWithCustomerLiabilityNoncurrent100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0

us-gaap:DebtInstrumentFaceAmount us-gaap:BusinessAcquisition, us-gaap:CreditFacility, us-gaap:DebtInstrument

us-gaap:DebtInstrumentFaceAmount

mksi:NewportCorporation, mksi:SecuredDebtRepricingAmendmentOne, mksi:IncrementalTermLoanFacility


Debt
Period End2021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-31
Value831833835837840892894648650
Percentage of DebtInstrumentFaceAmount100.0100.0100.0100.0100.0100.0100.0100.0100.0

mksi:NewportCorporation, us-gaap:SecuredDebt, mksi:IncrementalTermLoanFacility


Debt
Period End2021-06-302019-09-27
Value828896
Percentage of DebtInstrumentFaceAmount0.00.0

mksi:NewportCorporation, us-gaap:SecuredDebt, mksi:TermLoanCreditAgreement


Debt
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-30
Value7807807807807807800.78780780780780780780780780780780780780780780
Percentage of DebtInstrumentFaceAmount0.093.993.693.393.192.80.187.2120.3120.00.00.00.00.00.00.00.00.00.00.00.0

us-gaap:DebtInstrumentFaceAmount us-gaap:BusinessAcquisition, us-gaap:CreditFacility, us-gaap:SubsequentEventType

mksi:AtotechLimited, mksi:NewTermLoanFacility, us-gaap:SubsequentEvent


Debt
Period End2021-07-01
Value5300
Percentage of DebtInstrumentFaceAmount0.0

mksi:AtotechLimited, us-gaap:RevolvingCreditFacility, us-gaap:SubsequentEvent


Debt
Period End2021-07-01
Value500
Percentage of DebtInstrumentFaceAmount0.0

us-gaap:DeferredFinanceCostsGross us-gaap:BusinessAcquisition, us-gaap:CreditFacility, us-gaap:DebtInstrument

us-gaap:DeferredFinanceCostsGross

mksi:NewportCorporation, mksi:IncrementalTermLoanFacility, mksi:TermLoanCreditAgreement


Deferred
Period End2021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-31
Value111111111111111111
Percentage of DeferredFinanceCostsGross100.0100.0100.0100.0100.0100.0100.0100.0100.0

mksi:NewportCorporation, us-gaap:SecuredDebt, mksi:TermLoanCreditAgreement


Deferred
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-31
Value42282828282828747
Percentage of DeferredFinanceCostsGross0.0251.8251.8251.8251.8251.8253010.0

us-gaap:DeferredFinanceCostsGross us-gaap:BusinessAcquisition, us-gaap:DebtInstrument

mksi:NewportCorporation, mksi:TermLoanCreditAgreement


Deferred
Period End2021-06-30
Value8.5
Percentage of DeferredFinanceCostsGross0.0

mksi:NewportCorporation, mksi:TwoThousandNineteenTermLoanRefinancingFacility


Deferred
Period End2021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302018-12-31
Value8.99.49.8101011122.242
Percentage of DeferredFinanceCostsGross78.182.586.090.493.9103.9107.90.0

us-gaap:DeferredIncomeTaxLiabilities

us-gaap:DeferredIncomeTaxLiabilities


Deferred
Period End2020-12-312019-12-312018-12-312017-12-312016-12-312015-12-312014-12-31
Value182163881121551111
Percentage of DeferredIncomeTaxLiabilities100.0100.0100.0100.0100.0100.0100.0

us-gaap:DeferredTaxAssetsGross

us-gaap:DeferredTaxAssetsGross


Deferred
Period End2020-12-312019-12-312018-12-312017-12-312016-12-312015-12-312014-12-312013-12-312012-12-312011-12-312010-12-31
Value1631316569106335453535461
Percentage of DeferredTaxAssetsGross100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0

us-gaap:DeferredTaxAssetsOperatingLossCarryforwards

us-gaap:DeferredTaxAssetsOperatingLossCarryforwards


Deferred
Period End2020-12-312019-12-312018-12-312017-12-312016-12-312015-12-312014-12-312013-12-312012-12-312011-12-312010-12-31
Value54592325508.5313028292827
Percentage of DeferredTaxAssetsOperatingLossCarryforwards100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0

us-gaap:DeferredTaxAssetsOther

us-gaap:DeferredTaxAssetsOther


Deferred
Period End2020-12-312019-12-312018-12-312017-12-312011-12-312010-12-31
Value2700000.02347000.02396000.0597000.01245000.03824000.0
Percentage of DeferredTaxAssetsOther100.0100.0100.0100.0100.0100.0

us-gaap:DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsEmployeeBenefits

us-gaap:DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsEmployeeBenefits


Deferred
Period End2020-12-312019-12-312018-12-312017-12-312016-12-312015-12-312014-12-312013-12-312012-12-312011-12-312010-12-31
Value1800000.01556000.05972000.04984000.06888000.03947000.03321000.08026000.06132000.04826000.04584000.0
Percentage of DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsEmployeeBenefits100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0

us-gaap:DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsShareBasedCompensationCost

us-gaap:DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsShareBasedCompensationCost


Deferred
Period End2020-12-312019-12-312018-12-312017-12-312016-12-312015-12-312014-12-312013-12-312012-12-312011-12-312010-12-31
Value5100000.08580000.05351000.05092000.08995000.03713000.03255000.03581000.05032000.04610000.05692000.0
Percentage of DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsShareBasedCompensationCost100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0

us-gaap:DeferredTaxLiabilitiesGoodwillAndIntangibleAssetsIntangibleAssets

us-gaap:DeferredTaxLiabilitiesGoodwillAndIntangibleAssetsIntangibleAssets


Deferred
Period End2020-12-312019-12-312018-12-312017-12-312016-12-312015-12-312014-12-312013-12-312012-12-312011-12-312010-12-31
Value11612874831279.4342.8332.7825.8573.333.927
Percentage of DeferredTaxLiabilitiesGoodwillAndIntangibleAssetsIntangibleAssets100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0

us-gaap:DeferredTaxLiabilitiesUndistributedForeignEarnings

us-gaap:DeferredTaxLiabilitiesUndistributedForeignEarnings


Deferred
Period End2020-12-312019-12-312018-12-312017-12-31
Value3.25.0083.17616
Percentage of DeferredTaxLiabilitiesUndistributedForeignEarnings100.0100.0100.0100.0

us-gaap:DefinedBenefitPlanAssetsForPlanBenefitsNoncurrent us-gaap:FairValueByFairValueHierarchyLevel, us-gaap:FairValueByMeasurementFrequency, us-gaap:InvestmentType

us-gaap:DefinedBenefitPlanAssetsForPlanBenefitsNoncurrent

us-gaap:FairValueInputsLevel2, us-gaap:FairValueMeasurementsRecurring, mksi:IsraeliPensionAssets


Defined
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312016-12-31
Value18181817161616161514141515151513
Percentage of DefinedBenefitPlanAssetsForPlanBenefitsNoncurrent100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0

us-gaap:DefinedBenefitPlanAssetsForPlanBenefitsNoncurrent us-gaap:FairValueByMeasurementFrequency, us-gaap:InvestmentType

us-gaap:FairValueMeasurementsRecurring, mksi:IsraeliPensionAssets


Defined
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312016-12-31
Value18181817161616161514141515151513
Percentage of DefinedBenefitPlanAssetsForPlanBenefitsNoncurrent100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0

us-gaap:DefinedBenefitPlanAssetsForPlanBenefitsNoncurrent us-gaap:RetirementPlanType

country:DE


Defined
Period End2020-12-312019-12-312018-12-31
Value6.55.8545.89
Percentage of DefinedBenefitPlanAssetsForPlanBenefitsNoncurrent34.635.040.9

country:IL


Defined
Period End2020-12-312019-12-312018-12-31
Value181614
Percentage of DefinedBenefitPlanAssetsForPlanBenefitsNoncurrent100.0100.0100.0

us-gaap:DefinedBenefitPlanBenefitObligation us-gaap:BusinessAcquisition

us-gaap:DefinedBenefitPlanBenefitObligation

mksi:NewportCorporation


Defined
Period End2020-12-312019-12-312018-12-312017-12-312016-12-312016-06-30
Value363024252322
Percentage of DefinedBenefitPlanBenefitObligation100.0100.0100.0100.0100.0100.0

us-gaap:DefinedBenefitPlanExpectedFutureBenefitPaymentsNextTwelveMonths

us-gaap:DefinedBenefitPlanExpectedFutureBenefitPaymentsNextTwelveMonths


Defined
Period End2020-12-31
Value900000.0
Percentage of DefinedBenefitPlanExpectedFutureBenefitPaymentsNextTwelveMonths100.0

us-gaap:DefinedBenefitPlanExpectedFutureBenefitPaymentsYearFive

us-gaap:DefinedBenefitPlanExpectedFutureBenefitPaymentsYearFive


Defined
Period End2020-12-31
Value1300000.0
Percentage of DefinedBenefitPlanExpectedFutureBenefitPaymentsYearFive100.0

us-gaap:DefinedBenefitPlanExpectedFutureBenefitPaymentsYearFour

us-gaap:DefinedBenefitPlanExpectedFutureBenefitPaymentsYearFour


Defined
Period End2020-12-31
Value1100000.0
Percentage of DefinedBenefitPlanExpectedFutureBenefitPaymentsYearFour100.0

us-gaap:DefinedBenefitPlanExpectedFutureBenefitPaymentsYearThree

us-gaap:DefinedBenefitPlanExpectedFutureBenefitPaymentsYearThree


Defined
Period End2020-12-31
Value1300000.0
Percentage of DefinedBenefitPlanExpectedFutureBenefitPaymentsYearThree100.0

us-gaap:DefinedBenefitPlanExpectedFutureBenefitPaymentsYearTwo

us-gaap:DefinedBenefitPlanExpectedFutureBenefitPaymentsYearTwo


Defined
Period End2020-12-31
Value1100000.0
Percentage of DefinedBenefitPlanExpectedFutureBenefitPaymentsYearTwo100.0

us-gaap:DefinedBenefitPlanFairValueOfPlanAssets

us-gaap:DefinedBenefitPlanFairValueOfPlanAssets


Defined
Period End2020-12-312019-12-312018-12-31
Value12117.822
Percentage of DefinedBenefitPlanFairValueOfPlanAssets100.0100.0100.0

us-gaap:DefinedBenefitPlanFairValueOfPlanAssets us-gaap:BusinessAcquisition

mksi:NewportCorporation


Defined
Period End2020-12-312019-12-312018-12-312017-12-312016-12-31
Value12117.8228.1527.672
Percentage of DefinedBenefitPlanFairValueOfPlanAssets100.0100.0100.00.00.0

us-gaap:DefinedBenefitPlanFairValueOfPlanAssets us-gaap:DefinedBenefitPlanByPlanAssetCategories

mksi:DefinedBenefitPlanAssetCategoriesOtherAssets


Defined
Period End2020-12-312019-12-312018-12-31
Value6.81.1211.432
Percentage of DefinedBenefitPlanFairValueOfPlanAssets52.710.118.3

us-gaap:DefinedBenefitPlanCash


Defined
Period End2020-12-312019-12-312018-12-31
Value0.20.430.193
Percentage of DefinedBenefitPlanFairValueOfPlanAssets1.63.92.5

us-gaap:DefinedBenefitPlanDebtSecurity


Defined
Period End2020-12-312019-12-312018-12-31
Value5.28.0234.855
Percentage of DefinedBenefitPlanFairValueOfPlanAssets40.372.362.1

us-gaap:DefinedBenefitPlanEquitySecurities


Defined
Period End2020-12-312019-12-312018-12-31
Value0.71.5191.342
Percentage of DefinedBenefitPlanFairValueOfPlanAssets5.413.717.2

us-gaap:DefinedBenefitPlanFundedStatusOfPlan us-gaap:BusinessAcquisition

us-gaap:DefinedBenefitPlanFundedStatusOfPlan

mksi:NewportCorporation


Defined
Period End2020-12-312019-12-312018-12-312017-12-312016-12-31
Value2318171715
Percentage of DefinedBenefitPlanFundedStatusOfPlan100.0100.0100.0100.0100.0

us-gaap:DerivativeAssetNotionalAmount us-gaap:DerivativeInstrumentRisk

us-gaap:DerivativeAssetNotionalAmount

us-gaap:ForeignExchangeForward


Derivative
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-31
Value521169176158138104154
Percentage of DerivativeAssetNotionalAmount100.0100.0100.0100.0100.0100.0100.0

us-gaap:DerivativeAssetNotionalAmount us-gaap:DerivativeInstrumentRisk, us-gaap:DerivativeInstrumentsGainLossByHedgingRelationship

us-gaap:ForeignExchangeForward, mksi:USDollarCanadianDollar


Derivative
Period End2021-06-30
Value312
Percentage of DerivativeAssetNotionalAmount59.9

us-gaap:ForeignExchangeForward, mksi:USDollarEuro


Derivative
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302015-12-31
Value131213131210153131202323263326141420183.9696.73210
Percentage of DerivativeAssetNotionalAmount2.57.67.48.69.39.710.10.00.00.00.00.00.00.00.00.00.00.00.00.00.00.0

us-gaap:ForeignExchangeForward, mksi:USDollarJapaneseYen


Derivative
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302015-12-31
Value61586155543445434639434047757029233530132126
Percentage of DerivativeAssetNotionalAmount11.734.734.934.739.233.029.70.00.00.00.00.00.00.00.00.00.00.00.00.00.00.0

us-gaap:ForeignExchangeForward, mksi:USDollarKoreanWon


Derivative
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302015-12-31
Value75586240333251425254595673857924224550182634
Percentage of DerivativeAssetNotionalAmount14.534.435.325.724.031.133.40.00.00.00.00.00.00.00.00.00.00.00.00.00.00.0

us-gaap:ForeignExchangeForward, mksi:USDollarTaiwaneseDollars


Derivative
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302015-12-31
Value523333433122331820192118182020111016154.6788.18512
Percentage of DerivativeAssetNotionalAmount10.019.618.927.122.521.221.40.00.00.00.00.00.00.00.00.00.00.00.00.00.00.0

us-gaap:ForeignExchangeForward, mksi:UsDollarUkPound


Derivative
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302015-12-31
Value7.16.56.16.26.95.38.2797.32101011101213125.2724.7136.5996.0671.4612.8564.587
Percentage of DerivativeAssetNotionalAmount1.43.83.53.95.05.15.40.00.00.00.00.00.00.00.00.00.00.00.00.00.00.0

us-gaap:DerivativeBasisSpreadOnVariableRate us-gaap:BusinessAcquisition, us-gaap:CreditFacility, us-gaap:DebtInstrument, us-gaap:DerivativeInstrumentRisk

us-gaap:DerivativeBasisSpreadOnVariableRate

mksi:ElectroScientificIndustriesInc, us-gaap:SecuredDebt, mksi:TermLoanCreditAgreement, us-gaap:InterestRateSwap


Derivative
Period End2020-09-302020-06-302020-03-31
Value1.750.01750.0175
Percentage of DerivativeBasisSpreadOnVariableRate100.0100.0100.0

mksi:NewportCorporation, mksi:SecuredDebtRepricingAmendmentOne, mksi:IncrementalTermLoanFacility, us-gaap:InterestRateSwap


Derivative
Period End2020-09-302020-06-302020-03-31
Value1.750.01750.0175
Percentage of DerivativeBasisSpreadOnVariableRate100.0100.0100.0

mksi:NewportCorporation, mksi:SecuredDebtRepricingAmendmentOne, mksi:TermLoanCreditAgreement, us-gaap:InterestRateSwap


Derivative
Period End2020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302016-09-30
Value1.750.01750.01750.01750.01750.02250.020.01750.01750.01750.020.020.02250.02750.035
Percentage of DerivativeBasisSpreadOnVariableRate100.0100.0100.00.00.00.00.00.00.00.00.00.00.00.00.0

mksi:NewportCorporation, us-gaap:SecuredDebt, mksi:TermLoanCreditAgreement, us-gaap:InterestRateSwap


Derivative
Period End2020-09-302020-06-302020-03-312019-12-31
Value1.750.01750.01750.0175
Percentage of DerivativeBasisSpreadOnVariableRate100.0100.0100.00.0

us-gaap:DerivativeFairValueOfDerivativeNet us-gaap:BusinessAcquisition, us-gaap:CreditFacility, us-gaap:DebtInstrument, us-gaap:DerivativeInstrumentRisk

us-gaap:DerivativeFairValueOfDerivativeNet

mksi:NewportCorporation, mksi:SecuredDebtRepricingAmendmentOne, mksi:IncrementalTermLoanFacility, us-gaap:InterestRateSwap


Derivative
Period End2020-09-302020-06-302020-03-312019-12-31
Value1415156.5
Percentage of DerivativeFairValueOfDerivativeNet100.0100.0100.0100.0

us-gaap:DerivativeFairValueOfDerivativeNet us-gaap:CreditFacility, us-gaap:DebtInstrument, us-gaap:DerivativeInstrumentRisk

mksi:SwapAgreementFour, mksi:IncrementalTermLoanFacility, us-gaap:InterestRateSwap


Derivative
Period End2020-12-31
Value-0.9
Percentage of DerivativeFairValueOfDerivativeNet0.0

mksi:SwapAgreementOne, mksi:IncrementalTermLoanFacility, us-gaap:InterestRateSwap


Derivative
Period End2021-06-302021-03-312020-12-312019-12-31
Value-9.1-10.6-12.40.8
Percentage of DerivativeFairValueOfDerivativeNet0.00.00.012.3

mksi:SwapAgreementThree, mksi:IncrementalTermLoanFacility, us-gaap:InterestRateSwap


Derivative
Period End2021-06-302021-03-312020-12-31
Value1.42.0-0.7
Percentage of DerivativeFairValueOfDerivativeNet0.00.00.0

mksi:SwapAgreementTwo, mksi:IncrementalTermLoanFacility, us-gaap:InterestRateSwap


Derivative
Period End2021-06-302021-03-312020-12-312019-12-31
Value2.33.1-12.4-6.5
Percentage of DerivativeFairValueOfDerivativeNet0.00.00.0-100.0

us-gaap:DerivativeFairValueOfDerivativeNet us-gaap:DebtInstrument, us-gaap:DerivativeInstrumentRisk

mksi:IncrementalTermLoanFacility, us-gaap:InterestRateSwap


Derivative
Period End2021-06-302021-03-312020-12-312019-12-31
Value-5.4-5.5-14.0-5.7
Percentage of DerivativeFairValueOfDerivativeNet0.00.00.0-87.7

us-gaap:DerivativeFixedInterestRate us-gaap:CreditFacility, us-gaap:DebtInstrument, us-gaap:DerivativeInstrumentRisk

us-gaap:DerivativeFixedInterestRate

mksi:SwapAgreementFour, mksi:IncrementalTermLoanFacility, us-gaap:InterestRateSwap


Derivative
Period End2020-12-31
Value0.623
Percentage of DerivativeFixedInterestRate100.0

mksi:SwapAgreementOne, mksi:IncrementalTermLoanFacility, us-gaap:InterestRateSwap


Derivative
Period End2021-06-302021-03-312020-12-31
Value2.3092.3091.198
Percentage of DerivativeFixedInterestRate0.00.0192.3

mksi:SwapAgreementThree, mksi:IncrementalTermLoanFacility, us-gaap:InterestRateSwap


Derivative
Period End2021-06-302021-03-312020-12-31
Value0.6230.6230.485
Percentage of DerivativeFixedInterestRate0.00.077.8

mksi:SwapAgreementTwo, mksi:IncrementalTermLoanFacility, us-gaap:InterestRateSwap


Derivative
Period End2021-06-302021-03-312020-12-31
Value0.4850.4852.309
Percentage of DerivativeFixedInterestRate0.00.0370.6

us-gaap:DerivativeLiabilities us-gaap:BalanceSheetLocation, us-gaap:FairValueByFairValueHierarchyLevel, us-gaap:FairValueByMeasurementFrequency

us-gaap:DerivativeLiabilities

us-gaap:OtherCurrentLiabilities, us-gaap:FairValueInputsLevel2, us-gaap:FairValueMeasurementsRecurring


Derivative
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-31
Value9.31.96.52.21.21.00.3
Percentage of DerivativeLiabilities100.0100.0100.0100.0100.0100.0100.0

us-gaap:OtherNoncurrentLiabilities, us-gaap:FairValueInputsLevel2, us-gaap:FairValueMeasurementsRecurring


Derivative
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-31
Value9.110141415156.5
Percentage of DerivativeLiabilities97.8557.9215.4636.41275.01520.02166.7

us-gaap:DerivativeLiabilities us-gaap:BalanceSheetLocation, us-gaap:FairValueByMeasurementFrequency

us-gaap:OtherCurrentLiabilities, us-gaap:FairValueMeasurementsRecurring


Derivative
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-31
Value9.31.96.52.21.21.00.3
Percentage of DerivativeLiabilities100.0100.0100.0100.0100.0100.0100.0

us-gaap:OtherNoncurrentLiabilities, us-gaap:FairValueMeasurementsRecurring


Derivative
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-31
Value9.110141415156.5
Percentage of DerivativeLiabilities97.8557.9215.4636.41275.01520.02166.7

us-gaap:DerivativeLiabilities us-gaap:FairValueByFairValueHierarchyLevel, us-gaap:FairValueByMeasurementFrequency

us-gaap:FairValueInputsLevel2, us-gaap:FairValueMeasurementsRecurring


Derivative
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-30
Value1812201616166.7697.2165.656
Percentage of DerivativeLiabilities197.8657.9315.4736.41375.01620.02256.30.00.0

us-gaap:DerivativeLiabilities us-gaap:FairValueByMeasurementFrequency

us-gaap:FairValueMeasurementsRecurring


Derivative
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-30
Value1812201616166.7697.2165.656
Percentage of DerivativeLiabilities197.8657.9315.4736.41375.01620.02256.30.00.0

us-gaap:DerivativeNotionalAmount us-gaap:CreditFacility, us-gaap:DebtInstrument, us-gaap:DerivativeInstrumentRisk

us-gaap:DerivativeNotionalAmount

mksi:SwapAgreementFour, mksi:IncrementalTermLoanFacility, us-gaap:InterestRateSwap


Derivative
Period End2020-12-31
Value100
Percentage of DerivativeNotionalAmount100.0

mksi:SwapAgreementOne, mksi:IncrementalTermLoanFacility, us-gaap:InterestRateSwap


Derivative
Period End2021-06-302021-03-312020-12-31
Value300300335
Percentage of DerivativeNotionalAmount0.00.0335.0

mksi:SwapAgreementThree, mksi:IncrementalTermLoanFacility, us-gaap:InterestRateSwap


Derivative
Period End2021-06-302021-03-312020-12-31
Value100100200
Percentage of DerivativeNotionalAmount0.00.0200.0

mksi:SwapAgreementTwo, mksi:IncrementalTermLoanFacility, us-gaap:InterestRateSwap


Derivative
Period End2021-06-302021-03-312020-12-31
Value200200300
Percentage of DerivativeNotionalAmount0.00.0300.0

us-gaap:EmployeeRelatedLiabilitiesCurrent

us-gaap:EmployeeRelatedLiabilitiesCurrent


Employee
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302016-03-312015-12-312015-09-302015-06-302015-03-312014-12-312014-09-302014-06-302014-03-312013-12-312013-09-302013-06-302013-03-312012-12-312012-09-302012-06-302012-03-312011-12-312011-09-302011-06-302011-03-312010-12-312009-12-31
Value9976117951048210087646182747562967565506763592028292321262722354325191720232121212429242910
Percentage of EmployeeRelatedLiabilitiesCurrent100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0

us-gaap:EmployeeRelatedLiabilitiesCurrentAndNoncurrent

us-gaap:EmployeeRelatedLiabilitiesCurrentAndNoncurrent


Employee
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302015-12-312014-03-312013-12-31
Value484749444342434362605556555351504846444413109.646
Percentage of EmployeeRelatedLiabilitiesCurrentAndNoncurrent100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0

us-gaap:EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognized

us-gaap:EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognized


Employee
Period End2021-06-302021-03-312020-09-30
Value513637
Percentage of EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognized100.0100.0100.0

us-gaap:EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognized us-gaap:AwardType

us-gaap:RestrictedStockUnitsRSU


Employee
Period End2020-12-312019-12-312018-12-312017-12-312016-12-31
Value3126192023
Percentage of EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognized0.00.00.00.00.0

us-gaap:FiniteLivedIntangibleAssetsAccumulatedAmortization

us-gaap:FiniteLivedIntangibleAssetsAccumulatedAmortization


Finite
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302016-03-312015-12-312015-09-302015-06-302015-03-312014-12-312014-09-302014-06-302014-03-312013-12-312013-09-302013-06-302013-03-312012-12-312012-09-302012-06-302012-03-312011-12-312011-09-302011-06-302010-12-31
Value388375363350338324307290273256244233222210199196185173160147135126124122121119117116114113112112111111110110109109109109109108
Percentage of FiniteLivedIntangibleAssetsAccumulatedAmortization100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0

us-gaap:FiniteLivedIntangibleAssetsAccumulatedAmortization us-gaap:FiniteLivedIntangibleAssetsByMajorClass

mksi:PatentsTrademarksTradeNamesAndOther


Finite
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302016-03-312015-12-312015-09-302015-06-302015-03-312014-12-312014-09-302014-06-302014-03-312013-12-312013-09-302013-06-302013-03-312012-12-312012-09-302012-06-302012-03-312011-12-312011-09-302011-06-302010-12-31
Value504948474746454442404241403938383736333128262525252525252525242424242424242424242424
Percentage of FiniteLivedIntangibleAssetsAccumulatedAmortization13.013.213.413.613.914.414.815.115.516.017.618.018.518.919.419.820.420.820.821.621.020.620.820.921.121.221.521.721.922.122.122.122.122.222.222.322.322.322.322.322.422.4

us-gaap:CustomerRelationships


Finite
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302016-03-312015-12-312015-09-302015-06-302015-03-312014-12-312014-09-302014-06-302014-03-312013-12-312013-09-302013-06-302013-03-312012-12-312012-09-302012-06-302012-03-312011-12-312011-09-302011-06-302010-12-31
Value11510910499948984797368635954504543383429252017161514131211109.9839.8319.599.3579.1258.8868.6758.558.4718.3938.38.2288.083
Percentage of FiniteLivedIntangibleAssetsAccumulatedAmortization29.729.228.928.427.927.527.327.227.026.826.125.424.623.822.822.121.019.718.517.415.513.713.112.612.011.410.710.09.38.88.78.58.48.28.07.97.87.77.77.67.57.4

us-gaap:PatentedTechnology


Finite
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302016-03-312015-12-312015-09-302015-06-302015-03-312014-12-312014-09-302014-06-302014-03-312013-12-312013-09-302013-06-302013-03-312012-12-312012-09-302012-06-302012-03-312011-12-312011-09-302011-06-302010-12-31
Value222216209203196188178167157146137131126120115114108103978985828281818079797878787777777776767676767676
Percentage of FiniteLivedIntangibleAssetsAccumulatedAmortization57.457.657.858.058.258.257.957.757.557.256.356.656.957.357.858.158.659.460.860.963.665.766.166.566.967.467.868.368.869.169.269.369.569.669.869.869.970.070.070.170.170.2

us-gaap:FiniteLivedIntangibleAssetsAmortizationExpenseAfterYearFive

us-gaap:FiniteLivedIntangibleAssetsAmortizationExpenseAfterYearFive


Finite
Period End2021-06-302021-03-312020-12-312020-09-30
Value18996229228
Percentage of FiniteLivedIntangibleAssetsAmortizationExpenseAfterYearFive100.0100.0100.0100.0

us-gaap:FiniteLivedIntangibleAssetsAmortizationExpenseNextTwelveMonths

us-gaap:FiniteLivedIntangibleAssetsAmortizationExpenseNextTwelveMonths


Finite
Period End2021-06-302021-03-312020-12-312020-09-30
Value45454847
Percentage of FiniteLivedIntangibleAssetsAmortizationExpenseNextTwelveMonths100.0100.0100.0100.0

us-gaap:FiniteLivedIntangibleAssetsAmortizationExpenseRemainderOfFiscalYear

us-gaap:FiniteLivedIntangibleAssetsAmortizationExpenseRemainderOfFiscalYear


Finite
Period End2021-06-302021-03-312020-09-30
Value233513
Percentage of FiniteLivedIntangibleAssetsAmortizationExpenseRemainderOfFiscalYear100.0100.0100.0

us-gaap:FiniteLivedIntangibleAssetsAmortizationExpenseYearFive

us-gaap:FiniteLivedIntangibleAssetsAmortizationExpenseYearFive


Finite
Period End2021-06-302021-03-312020-12-312020-09-30
Value391324343
Percentage of FiniteLivedIntangibleAssetsAmortizationExpenseYearFive100.0100.0100.0100.0

us-gaap:FiniteLivedIntangibleAssetsAmortizationExpenseYearFour

us-gaap:FiniteLivedIntangibleAssetsAmortizationExpenseYearFour


Finite
Period End2021-06-302021-03-312020-12-312020-09-30
Value43434444
Percentage of FiniteLivedIntangibleAssetsAmortizationExpenseYearFour100.0100.0100.0100.0

us-gaap:FiniteLivedIntangibleAssetsAmortizationExpenseYearThree

us-gaap:FiniteLivedIntangibleAssetsAmortizationExpenseYearThree


Finite
Period End2021-06-302021-03-312020-12-312020-09-30
Value44444545
Percentage of FiniteLivedIntangibleAssetsAmortizationExpenseYearThree100.0100.0100.0100.0

us-gaap:FiniteLivedIntangibleAssetsAmortizationExpenseYearTwo

us-gaap:FiniteLivedIntangibleAssetsAmortizationExpenseYearTwo


Finite
Period End2021-06-302021-03-312020-12-312020-09-30
Value45454545
Percentage of FiniteLivedIntangibleAssetsAmortizationExpenseYearTwo100.0100.0100.0100.0

us-gaap:FiniteLivedIntangibleAssetsGross

us-gaap:FiniteLivedIntangibleAssetsGross


Finite
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302016-03-312015-12-312015-09-302015-06-302015-03-312014-12-312014-09-302014-06-302014-03-312013-12-312013-09-302013-06-302013-03-312012-12-312012-09-302012-06-302012-03-312011-12-312011-09-302011-06-302010-12-31
Value875875875875875875875875875877565565565565565573573573573568563168168168168168163163163124124124124124121121110110110110110110
Percentage of FiniteLivedIntangibleAssetsGross100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0100.0

us-gaap:FiniteLivedIntangibleAssetsGross us-gaap:FiniteLivedIntangibleAssetsByMajorClass

mksi:PatentsTrademarksTradeNamesAndOther


Finite
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302016-03-312015-12-312015-09-302015-06-302015-03-312014-12-312014-09-302014-06-302014-03-312013-12-312013-09-302013-06-302013-03-312012-12-312012-09-302012-06-302012-03-312011-12-312011-09-302011-06-302010-12-31
Value12012012012012012012012012012011011011011011011111111111110499303030303027272725252525252525242424242424
Percentage of FiniteLivedIntangibleAssetsGross13.813.813.813.813.813.813.813.813.813.819.519.519.519.519.519.519.519.519.518.417.718.018.018.018.018.016.816.816.920.520.520.520.620.520.620.522.322.322.322.322.322.3

us-gaap:CustomerRelationships


Finite
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302016-03-312015-12-312015-09-302015-06-302015-03-312014-12-312014-09-302014-06-302014-03-312013-12-312013-09-302013-06-302013-03-312012-12-312012-09-302012-06-302012-03-312011-12-312011-09-302011-06-302010-12-31
Value3083083083083083083083083083082822822822822822852852852852802803737373737353535141414141414149.199.199.199.198.948.94
Percentage of FiniteLivedIntangibleAssetsGross35.235.235.235.235.235.235.235.235.235.150.050.050.050.050.049.749.749.749.749.349.722.122.122.122.122.121.921.921.911.711.711.711.711.712.012.18.38.38.38.38.18.1

us-gaap:PatentedTechnology


Finite
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302016-03-312015-12-312015-09-302015-06-302015-03-312014-12-312014-09-302014-06-302014-03-312013-12-312013-09-302013-06-302013-03-312012-12-312012-09-302012-06-302012-03-312011-12-312011-09-302011-06-302010-12-31
Value44644644644644644644644644644817217217217217217617617617617617610110110110110110010010084848484848282777776767676
Percentage of FiniteLivedIntangibleAssetsGross51.051.051.051.051.051.051.051.051.051.130.530.530.530.530.530.830.830.830.831.131.359.959.959.959.959.961.361.361.267.867.867.867.767.867.567.469.569.569.469.469.669.6

us-gaap:ForeignCurrencyCashFlowHedgeAssetAtFairValue us-gaap:BalanceSheetLocation, us-gaap:DerivativeInstrumentRisk

us-gaap:ForeignCurrencyCashFlowHedgeAssetAtFairValue

us-gaap:OtherCurrentAssets, us-gaap:ForeignExchangeContract


Foreign
Period End2020-09-302020-06-302020-03-312019-12-31
Value0.11.62.71.1
Percentage of ForeignCurrencyCashFlowHedgeAssetAtFairValue100.0100.0100.0100.0

us-gaap:OtherCurrentAssets, us-gaap:ForeignExchangeForward


Foreign
Period End2021-06-302021-03-31
Value1.72.2
Percentage of ForeignCurrencyCashFlowHedgeAssetAtFairValue0.00.0

us-gaap:ForeignCurrencyCashFlowHedgeAssetAtFairValue us-gaap:DerivativeInstrumentRisk, us-gaap:FairValueByFairValueHierarchyLevel, us-gaap:FairValueByMeasurementFrequency

us-gaap:ForeignExchangeForward, us-gaap:FairValueInputsLevel2, us-gaap:FairValueMeasurementsRecurring


Foreign
Period End2021-06-302021-03-312020-09-302020-06-302020-03-312019-12-31
Value1.72.20.11.62.71.1
Percentage of ForeignCurrencyCashFlowHedgeAssetAtFairValue0.00.0100.0100.0100.0100.0

us-gaap:ForeignCurrencyCashFlowHedgeAssetAtFairValue us-gaap:DerivativeInstrumentRisk, us-gaap:FairValueByMeasurementFrequency

us-gaap:ForeignExchangeForward, us-gaap:FairValueMeasurementsRecurring


Foreign
Period End2021-06-302021-03-312020-09-302020-06-302020-03-312019-12-31
Value1.72.20.11.62.71.1
Percentage of ForeignCurrencyCashFlowHedgeAssetAtFairValue0.00.0100.0100.0100.0100.0

us-gaap:ForeignCurrencyCashFlowHedgeAssetAtFairValue us-gaap:DerivativeInstrumentRisk, us-gaap:HedgingDesignation

us-gaap:ForeignExchangeContract, us-gaap:DesignatedAsHedgingInstrument


Foreign
Period End2021-03-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-31
Value2.20.11.62.71.0744.2322.923.4922.4853.4343.6660.0850.1680.4250.610.6642.985
Percentage of ForeignCurrencyCashFlowHedgeAssetAtFairValue0.0100.0100.0100.097.60.00.00.00.00.00.00.00.00.00.00.00.0

us-gaap:ForeignExchangeForward, us-gaap:DesignatedAsHedgingInstrument


Foreign
Period End2021-06-302016-12-312016-09-302016-06-302015-12-31
Value1.72.9850.250.6551.486
Percentage of ForeignCurrencyCashFlowHedgeAssetAtFairValue0.00.00.00.00.0

us-gaap:InterestRateSwap, us-gaap:DesignatedAsHedgingInstrument


Foreign
Period End2021-06-302021-03-312019-12-312019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-31
Value3.75.10.8434.4596.0838.5398.5658.176.1794.3624.2945.4284.9
Percentage of ForeignCurrencyCashFlowHedgeAssetAtFairValue0.00.076.60.00.00.00.00.00.00.00.00.00.0

us-gaap:ForeignCurrencyCashFlowHedgeDerivativeAtFairValueNet us-gaap:DerivativeInstrumentRisk

us-gaap:ForeignCurrencyCashFlowHedgeDerivativeAtFairValueNet

us-gaap:ForeignExchangeForward


Foreign
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-31
Value-7.60.3-6.5-2.10.72.2-0.2
Percentage of ForeignCurrencyCashFlowHedgeDerivativeAtFairValueNet100.0100.0100.0100.0100.0100.0100.0

us-gaap:ForeignCurrencyCashFlowHedgeDerivativeAtFairValueNet us-gaap:DerivativeInstrumentRisk, us-gaap:DerivativeInstrumentsGainLossByHedgingRelationship

us-gaap:ForeignExchangeForward, mksi:USDollarCanadianDollar


Foreign
Period End2021-06-30
Value-7.5
Percentage of ForeignCurrencyCashFlowHedgeDerivativeAtFairValueNet98.7

us-gaap:ForeignExchangeForward, mksi:USDollarEuro


Foreign
Period End2021-06-302021-03-312020-12-312020-09-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302015-12-31
Value-0.1-0.1-0.6-0.30.40.2211.3260.3060.9160.6880.6120.435-1.068-1.047-1.052-0.904-0.0150.156-0.0140.0220.019
Percentage of ForeignCurrencyCashFlowHedgeDerivativeAtFairValueNet1.3-33.39.214.318.2-110.50.00.00.00.00.00.00.00.00.00.00.00.00.00.00.0

us-gaap:ForeignExchangeForward, mksi:USDollarJapaneseYen


Foreign
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302015-12-31
Value1.31.6-1.1-0.40.4-0.20.043-0.083-0.5080.302-0.4781.1430.416-3.212-0.233-0.0010.162-0.4930.763-1.876-2.56-0.136
Percentage of ForeignCurrencyCashFlowHedgeDerivativeAtFairValueNet-17.1533.316.919.057.1-9.1-21.50.00.00.00.00.00.00.00.00.00.00.00.00.00.00.0

us-gaap:ForeignExchangeForward, mksi:USDollarKoreanWon


Foreign
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302015-12-31
Value-0.6-0.8-3.1-0.40.71.80.1672.1911.5231.4240.570.7591.226-2.772-3.799-0.324-0.457-1.8041.342-0.93-0.0680.915
Percentage of ForeignCurrencyCashFlowHedgeDerivativeAtFairValueNet7.9-266.747.719.0100.081.8-83.50.00.00.00.00.00.00.00.00.00.00.00.00.00.00.0

us-gaap:ForeignExchangeForward, mksi:USDollarTaiwaneseDollars


Foreign
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302015-12-31
Value-0.5-0.2-1.4-0.9-0.6-0.1-0.450.1080.30.4030.2140.2630.517-0.624-0.614-0.273-0.312-0.6470.064-0.167-0.0330.364
Percentage of ForeignCurrencyCashFlowHedgeDerivativeAtFairValueNet6.6-66.721.542.9-85.7-4.5225.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.0

us-gaap:ForeignExchangeForward, mksi:UsDollarUkPound


Foreign
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302015-12-31
Value-0.2-0.2-0.3-0.10.20.3-0.1660.3820.2760.1250.3230.3140.25-0.512-0.337-0.315-0.236-0.0430.1170.2070.3050.061
Percentage of ForeignCurrencyCashFlowHedgeDerivativeAtFairValueNet2.6-66.74.64.828.613.683.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.0

us-gaap:ForeignCurrencyCashFlowHedgeDerivativeAtFairValueNet us-gaap:HedgingDesignation

us-gaap:DesignatedAsHedgingInstrument


Foreign
Period End2021-06-302021-03-312020-12-312020-09-302020-06-302020-03-312019-12-312019-09-302019-06-302019-03-312018-12-312018-09-302018-06-302018-03-312017-12-312017-09-302017-06-302017-03-312016-12-312016-09-302016-06-302016-03-312015-12-312015-09-302015-06-302015-03-312014-12-312014-09-302014-06-302014-03-312013-12-312013-09-302013-06-302013-03-312012-12-312012-09-302012-06-302012-03-312011-12-312011-09-302011-06-302010-12-31
Value-13.0-5.2-20.5-16.1-14.9-13.6-5.852-2.984-2.7367.6297.41111-0.0180.1492.3972.5472.447.33-2.725-2.326-1.7061.2231.8780.2660.9221.9660.954-1.117-0.0070.264-0.0031.3791.266-0.349-1.128-0.3830.532-0.523-1.165-3.227-3.094
Percentage of ForeignCurrencyCashFlowHedgeDerivativeAtFairValueNet171.1-1733.3315.4766.7-2128.6-618.22926.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.00.0

us-gaap:ForeignCurrencyCashFlowHedgeLiabilityAtFairValue us-gaap:BalanceSheetL